MEMS and nanotechnology for gas sensors:
How Can We Lower the Power Consumption of Gas Sensors? There is a growing demand for low-power, high-density gas sensor arrays that can overcome problems relative to high power consumption. Low power consumption is a prerequisite for any type of sensor system to operate at optimum efficiency. Focuse...
Gespeichert in:
| Beteiligte Personen: | , |
|---|---|
| Format: | Elektronisch E-Book |
| Sprache: | Englisch |
| Veröffentlicht: |
Boca Raton, FL
CRC Press
[2016]
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| Schlagwörter: | |
| Links: | https://learning.oreilly.com/library/view/-/9781498700139/?ar |
| Zusammenfassung: | How Can We Lower the Power Consumption of Gas Sensors? There is a growing demand for low-power, high-density gas sensor arrays that can overcome problems relative to high power consumption. Low power consumption is a prerequisite for any type of sensor system to operate at optimum efficiency. Focused on fabrication-friendly microelectromechanical systems (MEMS) and other areas of sensor technology, MEMS and Nanotechnology for Gas Sensors explores the distinct advantages of using MEMS in low power consumption, and provides extensive coverage of the MEMS/nanotechnology platform for gas sensor applications. This book outlines the microfabrication technology needed to fabricate a gas sensor on a MEMS platform. It discusses semiconductors, graphene, nanocrystalline ZnO-based microfabricated sensors, and nanostructures for volatile organic compounds. It also includes performance parameters for the state of the art of sensors, and the applications of MEMS and nanotechnology in different areas relevant to the sensor domain. In addition, the book includes: An introduction to MEMS for MEMS materials, and a historical background of MEMS A concept for cleanroom technology The substrate materials used for MEMS Two types of deposition techniques, including chemical vapour deposition (CVD) The properties and types of photoresists, and the photolithographic processes Different micromachining techniques for the gas sensor platform, and bulk and surface micromachining The design issues of a microheater for MEMS-based sensors The synthesis technique of a nanocrystalline metal oxide layer A detailed review about graphene; its different deposition techniques; and its important electronic, electrical, and mechanical properties with its application as a gas sensor Low-cost, low-temperature synthesis techniques An explanation of volatile organic compound (VOC) detection and how relative humidity affects the sensing parameters MEMS and Nanotechnology for Gas Sensors provides a broad overview of current, emerging, and possible future MEMS applications. MEMS technology can be applied in the automotive, consumer, industrial, and biotechnology domains. |
| Beschreibung: | Includes bibliographical references and index. - Print version record |
| Umfang: | 1 Online-Ressource (xvii, 224 Seiten) illustrations |
| ISBN: | 1498700136 9781498700139 9781315214351 1315214350 9781351821551 1351821555 |
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| spelling | Roy, Sunipa VerfasserIn aut MEMS and nanotechnology for gas sensors Sunipa Roy, Chandan Kumar Sarkar Boca Raton, FL CRC Press [2016] ©2016 1 Online-Ressource (xvii, 224 Seiten) illustrations Text txt rdacontent Computermedien c rdamedia Online-Ressource cr rdacarrier Includes bibliographical references and index. - Print version record How Can We Lower the Power Consumption of Gas Sensors? There is a growing demand for low-power, high-density gas sensor arrays that can overcome problems relative to high power consumption. Low power consumption is a prerequisite for any type of sensor system to operate at optimum efficiency. Focused on fabrication-friendly microelectromechanical systems (MEMS) and other areas of sensor technology, MEMS and Nanotechnology for Gas Sensors explores the distinct advantages of using MEMS in low power consumption, and provides extensive coverage of the MEMS/nanotechnology platform for gas sensor applications. This book outlines the microfabrication technology needed to fabricate a gas sensor on a MEMS platform. It discusses semiconductors, graphene, nanocrystalline ZnO-based microfabricated sensors, and nanostructures for volatile organic compounds. It also includes performance parameters for the state of the art of sensors, and the applications of MEMS and nanotechnology in different areas relevant to the sensor domain. In addition, the book includes: An introduction to MEMS for MEMS materials, and a historical background of MEMS A concept for cleanroom technology The substrate materials used for MEMS Two types of deposition techniques, including chemical vapour deposition (CVD) The properties and types of photoresists, and the photolithographic processes Different micromachining techniques for the gas sensor platform, and bulk and surface micromachining The design issues of a microheater for MEMS-based sensors The synthesis technique of a nanocrystalline metal oxide layer A detailed review about graphene; its different deposition techniques; and its important electronic, electrical, and mechanical properties with its application as a gas sensor Low-cost, low-temperature synthesis techniques An explanation of volatile organic compound (VOC) detection and how relative humidity affects the sensing parameters MEMS and Nanotechnology for Gas Sensors provides a broad overview of current, emerging, and possible future MEMS applications. MEMS technology can be applied in the automotive, consumer, industrial, and biotechnology domains. English. Microelectromechanical systems Nanotechnology Gas detectors Microsystèmes électromécaniques Détecteurs de gaz Nanotechnologie TECHNOLOGY & ENGINEERING ; Technical & Manufacturing Industries & Trades Sarkar, Chandan Kumar VerfasserIn aut 9781498700122 Erscheint auch als Druck-Ausgabe 9781498700122 |
| spellingShingle | Roy, Sunipa Sarkar, Chandan Kumar MEMS and nanotechnology for gas sensors Microelectromechanical systems Nanotechnology Gas detectors Microsystèmes électromécaniques Détecteurs de gaz Nanotechnologie TECHNOLOGY & ENGINEERING ; Technical & Manufacturing Industries & Trades |
| title | MEMS and nanotechnology for gas sensors |
| title_auth | MEMS and nanotechnology for gas sensors |
| title_exact_search | MEMS and nanotechnology for gas sensors |
| title_full | MEMS and nanotechnology for gas sensors Sunipa Roy, Chandan Kumar Sarkar |
| title_fullStr | MEMS and nanotechnology for gas sensors Sunipa Roy, Chandan Kumar Sarkar |
| title_full_unstemmed | MEMS and nanotechnology for gas sensors Sunipa Roy, Chandan Kumar Sarkar |
| title_short | MEMS and nanotechnology for gas sensors |
| title_sort | mems and nanotechnology for gas sensors |
| topic | Microelectromechanical systems Nanotechnology Gas detectors Microsystèmes électromécaniques Détecteurs de gaz Nanotechnologie TECHNOLOGY & ENGINEERING ; Technical & Manufacturing Industries & Trades |
| topic_facet | Microelectromechanical systems Nanotechnology Gas detectors Microsystèmes électromécaniques Détecteurs de gaz Nanotechnologie TECHNOLOGY & ENGINEERING ; Technical & Manufacturing Industries & Trades |
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