New approaches to image processing based failure analysis of nano-scale ULSI devices:

New Approaches to Image Processing Based Failure Analysis of Nano-Scale ULSI Devices introduces the reader to transmission and scanning microscope image processing for metal and non-metallic microstructures. Engineers and scientists face the pressing problem in ULSI development and quality assurance...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Beteilige Person: Zalevsky, Zeev (VerfasserIn)
Format: Elektronisch E-Book
Sprache:Englisch
Veröffentlicht: Oxford William Andrew 2014
Schriftenreihe:Micro & nano technologies
Schlagwörter:
Links:http://www.sciencedirect.com/science/book/9780323241434
http://www.sciencedirect.com/science/book/9780323241434
Zusammenfassung:New Approaches to Image Processing Based Failure Analysis of Nano-Scale ULSI Devices introduces the reader to transmission and scanning microscope image processing for metal and non-metallic microstructures. Engineers and scientists face the pressing problem in ULSI development and quality assurance: microscopy methods can't keep pace with the continuous shrinking of feature size in microelectronics. Nanometer scale sizes are below the resolution of light, and imaging these features is nearly impossible even with electron microscopes, due to image noise
Beschreibung:Includes bibliographical references
Umfang:1 online resource (179 pages)
ISBN:9780323241434
0323241433
9780128000175
0128000171