Photovoltaic Power Generation: Proceedings of the Second Contractors’ Meeting held in Hamburg, 16–18 September 1987
Amorphous silicon PV panel mass production will require to mas ter plasma chemical deposition in terms of large sizes, cost, maintenance and all other problems related to industrialization. Since plasma deposition is a novel technique, the development of all this production related know how involve...
Gespeichert in:
| Weitere beteiligte Personen: | , |
|---|---|
| Format: | Elektronisch E-Book |
| Sprache: | Englisch |
| Veröffentlicht: |
Dordrecht
Springer Netherlands
1988
|
| Schriftenreihe: | Solar Energy Development — Third Programme
3 |
| Schlagwörter: | |
| Links: | https://doi.org/10.1007/978-94-009-2933-3 https://doi.org/10.1007/978-94-009-2933-3 |
| Zusammenfassung: | Amorphous silicon PV panel mass production will require to mas ter plasma chemical deposition in terms of large sizes, cost, maintenance and all other problems related to industrialization. Since plasma deposition is a novel technique, the development of all this production related know how involves a considerable technical research effort. The major problems related to the design of a production deposi tion machine are the following - deposition should be uniform on very large area substrate (typical dimension 1 meter) ; - the deposited amorphous silicon should have good electronic properties (density of state of the order or less than 16 3 10 cm /eV) and very low impurities concentrations (for exam ple oxygen atomic concentration should idealy be less than 0. 01 %) ; - the film stress should be limited, the density of ponctual defects (particulates) should remain reasonable (less than 2 per 100 cm ) ; - dopant level control should be stable and efficient ; - silane consumption should remain reasonably efficient - financial cost being important the machine productivity should be high hence deposition rate optimized ; - downtime due to maintenance should be reduced to a minimum. We present here some results on the R&D effort addressed to the above mentioned problems. An original single chamber was designed. This machine will be made available on the market for R&D purposes by a process machine company. Finally the maintenance problem is considered. Plasma cleaning based on a fluorine containing etchant gases is studied and evaluated. 2 |
| Umfang: | 1 Online-Ressource (320 p) |
| ISBN: | 9789400929333 |
| DOI: | 10.1007/978-94-009-2933-3 |
Internformat
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| 520 | |a Amorphous silicon PV panel mass production will require to mas ter plasma chemical deposition in terms of large sizes, cost, maintenance and all other problems related to industrialization. Since plasma deposition is a novel technique, the development of all this production related know how involves a considerable technical research effort. The major problems related to the design of a production deposi tion machine are the following - deposition should be uniform on very large area substrate (typical dimension 1 meter) ; - the deposited amorphous silicon should have good electronic properties (density of state of the order or less than 16 3 10 cm /eV) and very low impurities concentrations (for exam ple oxygen atomic concentration should idealy be less than 0. 01 %) ; - the film stress should be limited, the density of ponctual defects (particulates) should remain reasonable (less than 2 per 100 cm ) ; - dopant level control should be stable and efficient ; - silane consumption should remain reasonably efficient - financial cost being important the machine productivity should be high hence deposition rate optimized ; - downtime due to maintenance should be reduced to a minimum. We present here some results on the R&D effort addressed to the above mentioned problems. An original single chamber was designed. This machine will be made available on the market for R&D purposes by a process machine company. Finally the maintenance problem is considered. Plasma cleaning based on a fluorine containing etchant gases is studied and evaluated. 2 | ||
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Datensatz im Suchindex
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| spelling | Photovoltaic Power Generation Proceedings of the Second Contractors’ Meeting held in Hamburg, 16–18 September 1987 edited by R. van Overstraeten, G. Caratti Proceedings of the Second Contractors' Meeting held in Hamburg, September 16-18, 1987 Dordrecht Springer Netherlands 1988 1 Online-Ressource (320 p) txt rdacontent c rdamedia cr rdacarrier Solar Energy Development — Third Programme 3 Amorphous silicon PV panel mass production will require to mas ter plasma chemical deposition in terms of large sizes, cost, maintenance and all other problems related to industrialization. Since plasma deposition is a novel technique, the development of all this production related know how involves a considerable technical research effort. The major problems related to the design of a production deposi tion machine are the following - deposition should be uniform on very large area substrate (typical dimension 1 meter) ; - the deposited amorphous silicon should have good electronic properties (density of state of the order or less than 16 3 10 cm /eV) and very low impurities concentrations (for exam ple oxygen atomic concentration should idealy be less than 0. 01 %) ; - the film stress should be limited, the density of ponctual defects (particulates) should remain reasonable (less than 2 per 100 cm ) ; - dopant level control should be stable and efficient ; - silane consumption should remain reasonably efficient - financial cost being important the machine productivity should be high hence deposition rate optimized ; - downtime due to maintenance should be reduced to a minimum. We present here some results on the R&D effort addressed to the above mentioned problems. An original single chamber was designed. This machine will be made available on the market for R&D purposes by a process machine company. Finally the maintenance problem is considered. Plasma cleaning based on a fluorine containing etchant gases is studied and evaluated. 2 Engineering Renewable and Green Energy Renewable energy resources Renewable energy sources Alternate energy sources Green energy industries Fotovoltaik (DE-588)4121476-6 gnd rswk-swf 1\p (DE-588)1071861417 Konferenzschrift 1987 Hamburg gnd-content Fotovoltaik (DE-588)4121476-6 s 2\p DE-604 Overstraeten, R. van edt Caratti, G. edt Erscheint auch als Druck-Ausgabe 9789401078214 https://doi.org/10.1007/978-94-009-2933-3 Verlag URL des Erstveröffentlichers Volltext 1\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk 2\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk |
| spellingShingle | Photovoltaic Power Generation Proceedings of the Second Contractors’ Meeting held in Hamburg, 16–18 September 1987 Engineering Renewable and Green Energy Renewable energy resources Renewable energy sources Alternate energy sources Green energy industries Fotovoltaik (DE-588)4121476-6 gnd |
| subject_GND | (DE-588)4121476-6 (DE-588)1071861417 |
| title | Photovoltaic Power Generation Proceedings of the Second Contractors’ Meeting held in Hamburg, 16–18 September 1987 |
| title_alt | Proceedings of the Second Contractors' Meeting held in Hamburg, September 16-18, 1987 |
| title_auth | Photovoltaic Power Generation Proceedings of the Second Contractors’ Meeting held in Hamburg, 16–18 September 1987 |
| title_exact_search | Photovoltaic Power Generation Proceedings of the Second Contractors’ Meeting held in Hamburg, 16–18 September 1987 |
| title_full | Photovoltaic Power Generation Proceedings of the Second Contractors’ Meeting held in Hamburg, 16–18 September 1987 edited by R. van Overstraeten, G. Caratti |
| title_fullStr | Photovoltaic Power Generation Proceedings of the Second Contractors’ Meeting held in Hamburg, 16–18 September 1987 edited by R. van Overstraeten, G. Caratti |
| title_full_unstemmed | Photovoltaic Power Generation Proceedings of the Second Contractors’ Meeting held in Hamburg, 16–18 September 1987 edited by R. van Overstraeten, G. Caratti |
| title_short | Photovoltaic Power Generation |
| title_sort | photovoltaic power generation proceedings of the second contractors meeting held in hamburg 16 18 september 1987 |
| title_sub | Proceedings of the Second Contractors’ Meeting held in Hamburg, 16–18 September 1987 |
| topic | Engineering Renewable and Green Energy Renewable energy resources Renewable energy sources Alternate energy sources Green energy industries Fotovoltaik (DE-588)4121476-6 gnd |
| topic_facet | Engineering Renewable and Green Energy Renewable energy resources Renewable energy sources Alternate energy sources Green energy industries Fotovoltaik Konferenzschrift 1987 Hamburg |
| url | https://doi.org/10.1007/978-94-009-2933-3 |
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