In-situ x-ray study of nano SiO_x with Germanium doping in Czochralski silicon:
Gespeichert in:
| Beteilige Person: | |
|---|---|
| Format: | Hochschulschrift/Dissertation Elektronisch E-Book |
| Sprache: | Englisch |
| Veröffentlicht: |
Erlangen ; Nürnberg
2017
|
| Schlagwörter: | |
| Links: | https://nbn-resolving.org/urn:nbn:de:bvb:29-opus4-89657 http://d-nb.info/1144619238/34 https://open.fau.de/handle/openfau/8965 |
| Umfang: | 1 Online-Ressource |
| Format: | Langzeitarchivierung gewährleistet, LZA |
Internformat
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Datensatz im Suchindex
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| _version_ | 1821935561654403074 |
| any_adam_object | |
| author | Li, Zhen |
| author_facet | Li, Zhen |
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| dewey-ones | 530 - Physics |
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| discipline | Physik |
| format | Thesis Electronic eBook |
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| language | English |
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| spellingShingle | Li, Zhen In-situ x-ray study of nano SiO_x with Germanium doping in Czochralski silicon Röntgenstrukturanalyse (DE-588)4137203-7 gnd Czochralski-Verfahren (DE-588)4148717-5 gnd Silicium (DE-588)4077445-4 gnd Ausscheidung (DE-588)4143607-6 gnd Sauerstoff (DE-588)4051803-6 gnd |
| subject_GND | (DE-588)4137203-7 (DE-588)4148717-5 (DE-588)4077445-4 (DE-588)4143607-6 (DE-588)4051803-6 (DE-588)4113937-9 |
| title | In-situ x-ray study of nano SiO_x with Germanium doping in Czochralski silicon |
| title_auth | In-situ x-ray study of nano SiO_x with Germanium doping in Czochralski silicon |
| title_exact_search | In-situ x-ray study of nano SiO_x with Germanium doping in Czochralski silicon |
| title_full | In-situ x-ray study of nano SiO_x with Germanium doping in Czochralski silicon vorgelegt von: Zhen Li aus Erlangen |
| title_fullStr | In-situ x-ray study of nano SiO_x with Germanium doping in Czochralski silicon vorgelegt von: Zhen Li aus Erlangen |
| title_full_unstemmed | In-situ x-ray study of nano SiO_x with Germanium doping in Czochralski silicon vorgelegt von: Zhen Li aus Erlangen |
| title_short | In-situ x-ray study of nano SiO_x with Germanium doping in Czochralski silicon |
| title_sort | in situ x ray study of nano sio x with germanium doping in czochralski silicon |
| topic | Röntgenstrukturanalyse (DE-588)4137203-7 gnd Czochralski-Verfahren (DE-588)4148717-5 gnd Silicium (DE-588)4077445-4 gnd Ausscheidung (DE-588)4143607-6 gnd Sauerstoff (DE-588)4051803-6 gnd |
| topic_facet | Röntgenstrukturanalyse Czochralski-Verfahren Silicium Ausscheidung Sauerstoff Hochschulschrift |
| url | https://nbn-resolving.org/urn:nbn:de:bvb:29-opus4-89657 http://d-nb.info/1144619238/34 https://open.fau.de/handle/openfau/8965 |
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