Atomic layer deposition in energy conversion applications:
Gespeichert in:
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| Format: | Buch |
| Sprache: | Englisch |
| Veröffentlicht: |
Weinheim
Wiley-VCH
[2017]
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| Links: | http://www.wiley-vch.de/publish/dt/books/ISBN978-3-527-33912-9/ http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=029704858&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA |
| Umfang: | xxv, 281 Seiten Illustrationen, Diagramme (überwiegend farbig) |
| ISBN: | 9783527339129 |
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| 653 | |a Dünne Schicht | ||
| 653 | |a Dünne Schichten, Oberflächen u. Grenzflächen | ||
| 653 | |a Electrical & Electronics Engineering | ||
| 653 | |a Electronic Materials | ||
| 653 | |a Elektronische Materialien | ||
| 653 | |a Elektrotechnik u. Elektronik | ||
| 653 | |a Energie | ||
| 653 | |a Energieumwandlung | ||
| 653 | |a Energiewandler | ||
| 653 | |a Energy | ||
| 653 | |a Erneuerbare Energien | ||
| 653 | |a Materials Science | ||
| 653 | |a Materialwissenschaften | ||
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Datensatz im Suchindex
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|---|---|
| adam_text | CONTENTS
PREFACE XI
JULIEN BACHMANN
THE PAST OF ENERGY CONVERSION XI
THE FUTURE OF ENERGY CONVERSION XI
TECHNICAL INGREDIENTS NEEDED XIII
SCOPE OF THIS BOOK XIV
PHOTOVOLTAICS: STRATEGIES, LENGTH SCALES, AND ALD XV
ELECTROCHEMICAL ENERGY STORAGE: PRINCIPLES, CHEMISTRIES, AND
ALD XVII
OTHER ENERGY CONVERSION STRATEGIES BASED ON INTERFACES XIX
REFERENCES XX
LIST OF CONTRIBUTORS XXIII
PART I INTRODUCTION TO ATOMIC LAYER DEPOSITION
1
1 BASICS OF ATOMIC LAYER DEPOSITION: GROWTH CHARACTERISTICS AND
CONFORMALITY
3
JOLIEN DENDOOVEN AND CHRISTOPHE DETAVERNIER
1.1 ATOMIC LAYER DEPOSITION 3
1.1.1 PRINCIPLE OF ALD 3
1.1.2 ALD GROWTH CHARACTERISTICS - LINEARITY, SATURATION, AND ALD
WINDOW 5
1.1.3 PLASMA-ENHANCED ALD 8
1.1.3.1 PLASMA CONFIGURATIONS FOR PLASMA-ENHANCED ALD 9
1.1.3.2 REACTIONS IN PLASMA-ENHANCED ALD 10
1.1.3.3 ADVANTAGES AND CHALLENGES OF PLASMA-ENHANCED ALD 10
1.2 IN SITU CHARACTERIZATION FOR STUDYING ALD PROCESSES 11
1.2.1 QUARTZ CRYSTAL MICROBALANCE 12
1.2.2 QUADRUPOLE MASS SPECTROMETRY (QMS) 13
1.2.3 SPECTROSCOPIC ELLIPSOMETRY 14
1.2.4 FOURIER TRANSFORM INFRARED SPECTROSCOPY IS
1.2.5 OPTICAL EMISSION SPECTROSCOPY 15
1.2.6 OTHER
IN SITU TECHNIQUES 16
1.3 CONFORMALITY OF ALD PROCESSES 16
1.3.1 QUANTIFYING THE CONFORMALITY OF ALD PROCESSES 17
1.3.2 MODELING THE CONFORMALITY OF ALD 21
1.3.3 THE CONFORMALITY OF PLASMA-ENHANCED ALD 24
1.3.4 CONFORMAL COATING OF NANOPOROUS MATERIALS 29
REFERENCES 34
PART II ATOMIC LAYER DEPOSITION IN PHOTOVOLTAIC DEVICES 41
2
ATOMIC LAYER DEPOSITION FOR HIGH-EFFICIENCY CRYSTALLINE SILICON
SOLAR CELLS 43
BARTMACCO, BAS W. H. VAN DE LOOF AND WILHELMUS M. M. KESSELS
2.1 INTRODUCTION TO HIGH-EFFICIENCY CRYSTALLINE SILICON SOLAR CELLS 43
2.1.1 ALD FOR SI HOMOJUNCTION SOLAR CELLS 44
2.1.2 ALD FOR SI HETEROJUNCTION SOLAR CELLS 46
2.1.3 NOVEL PASSIVATING CONTACTS AND ALD 47
2.1.4 OUTLINE OF THIS CHAPTER 47
2.2 NANOLAYERS FOR SURFACE PASSIVATION OF SI HOMOJUNCTION SOLAR CELLS 48
2.2.1 BASICS OF SURFACE PASSIVATION 48
2.2.1.1 THE PHYSICS OF SURFACE RECOMBINATION 48
2.2.1.2 SURFACE PASSIVATION SO
2.2.1.3 COMPATIBILITY WITH SI HOMOJUNCTION SOLAR CELLS 53
2.2.2 SURFACE PASSIVATION BY ALD A120 3 54
2.2.2.1 ALD OF A120 3 FOR PASSIVATION 55
2.2.2.2 HYDROGENATION OF INTERFACE DEFECTS 56
2.2.2.3 INTERFACE ENGINEERING BY A120 3 57
2.2.2.4 INFLUENCE OF THE SURFACE CONDITIONS ON THE PASSIVATION
PROPERTIES 58
2.2.3 ALD IN SOLAR CELL MANUFACTURING 59
2.2.3.1 REQUIREMENTS FOR MANUFACTURING IN THE PV INDUSTRY 59
2.2.3.2 HIGH-THROUGHPUT ALD REACTORS
60
2.2.3.3 ALD A120 3 IN THE PV INDUSTRY 60
2.2.4 NEW DEVELOPMENTS FOR ALD PASSIVATION SCHEMES 63
2.2.4.1 ALD STACKS FOR THE PASSIVATION OF N+ SI OR N+ AND
P+ SI SURFACES 63
2.2.4.2 ALD FOR THE PASSIVATION OF SURFACES WITH DEMANDING TOPOLOGIES 64
2.2A3 NOVEL ALD-BASED PASSIVATION SCHEMES 66
2.3 TRANSPARENT CONDUCTIVE OXIDES FOR SI HETEROJUNCTION SOLAR CELLS 68
2.3.1 BASICS OF TCOS IN SHJ SOLAR CELLS 69
2.3.1.1 LATERAL CONDUCTIVITY 69
2.3.1.2 TRANSPARENCY 71
2.3.1.3 COMPATIBILITY WITH SHJ SOLAR CELLS 74
2.3.2 ALD OF TRANSPARENT CONDUCTIVE OXIDES 74
2.3.2.1 ALD OF DOPED ZNO 74
23.2.2 BEYOND A1 DOPING: DOPING BY B, TI, GA, HF, AND H 77
23.23 ALD OF LN20 3 78
2.3.3 HIGH-VOLUME MANUFACTURING OF ALD TCOS 79
2.4 PROSPECTS FOR ALD IN PASSIVATING CONTACTS 80
2.4.1 BASICS OF PASSIVATING CONTACTS 80
2.4.1.1 HOW TO MAKE A PASSIVATING CONTACT? 81
2.4.1.2 REQUIREMENTS OF A PASSIVATING CONTACT 84
2.4.2 ALD FOR PASSIVATING CONTACTS 86
2.4.2.1 ALD FOR TUNNELING OXIDES 86
2A2.2 ALD FOR ELECTRON-SELECTIVE CONTACTS 87
2.4.2. Z ALD FOR HOLE-SELECTIVE CONTACTS 89
2.5 CONCLUSIONS AND OUTLOOK 89
REFERENCES 90
3 ALD FOR LIGHT ABSORPTION 101
ALEX MARTINSON
3.1 INTRODUCTION TO SOLAR LIGHT ABSORPTION 101
3.2 WHY ALD FOR SOLAR LIGHT ABSORBERS? 104
3.2.1 UNIFORMITY AND PRECISION OF LARGE-AREA COATINGS 104
3.2.2 ORTHOGONALIZING LIGHT HARVESTING AND CHARGE EXTRACTION 1 OS
3.2.3 PINHOLE-FREE ULTRATHIN FILMS, ETA CELLS 107
3.2.4 CHEMICAL CONTROL OF STOICHIOMETRY AND DOPING 107
3.2.5 LOW-TEMPERATURE EPITAXY 109
3.3 ALD PROCESSES FOR VISIBLE AND NIR LIGHT ABSORBERS 109
3.3.1 ALD METAL OXIDES FOR LIGHT ABSORPTION 111
3.3.2 ALD METAL CHALCOGENIDES FOR LIGHT ABSORPTION 111
3.3.2.1 CIS 112
3.3.2.2 CZTS 112
3.3.2.3 CU2S 112
3.3.2.4 SNS 113
3.3.2.5 PBS 113
3.3.2. OE SB2S3 113
3.3.2.7 CDS 113
3.3.2.5 IN2S3 114
3.3.2.9 BI2S3 114
3.3.3 OTHER ALD MATERIALS FOR LIGHT ABSORPTION 115
3.4 PROSPECTS AND FUTURE CHALLENGES 115
REFERENCES 115
4 ATOMIC LAYER DEPOSITION FOR SURFACE AND INTERFACE ENGINEERING
IN NANOSTRUCTURED PHOTOVOLTAIC DEVICES 119
CARLOS GUERRA-NUNEZ, HYUNG GYU PARK, AND IVO UTKE
4.1 INTRODUCTION 119
4.2 ALD FOR IMPROVED NANOSTRUCTURED SOLAR CELLS 120
4.2.1 COMPACT LAYER: THE TCO/METAL OXIDE INTERFACE 121
4.2.2 BLOCKING LAYER: THE METAL OXIDE/ABSORBER INTERFACE 126
4.2.3 SURFACE PASSIVATION AND ABSORBER STABILIZATION: THE ABSORBER/HTM
INTERFACE 130
4.2.4 ATOMIC LAYER DEPOSITION ON QUANTUM DOTS 132
4.2.5 ALD ON LARGE-SURFACE-AREA CURRENT COLLECTORS: COMPACT BLOCKING
LAYERS 134
4.3 ALD FOR PHOTOELECTROCHEMICAL DEVICES FOR WATER SPLITTING 138
4.4 PROSPECTS AND CONCLUSIONS 142
REFERENCES 143
PART III ALD TOWARD ELECTROCHEMICAL ENERGY STORAGE 149
5 ATOMIC LAYER DEPOSITION OF ELECTROCATALYSTS FOR USE IN FUEL CELLS
AND ELECTROLYZERS 151
LIFENG LIU
5.1 INTRODUCTION 151
5.2 ALD OF PT-GROUP METAL AND ALLOY ELECTROCATALYSTS 153
5.2.1 ALD OF PT ELECTROCATALYSTS 154
5.2.1.1 FABRICATION AND MICROSTRUCTURE 154
5.2.1.2 ELECTROCHEMICAL PERFORMANCE 157
5.2.2 ALD OF PD ELECTROCATALYSTS 168
5.2.3 ALD OF PT-BASED ALLOY AND CORE/SHELL NANOPARTICLE
ELECTROCATALYSTS 169
5.2.3.1 ALD OF PT ALLOY NANOPARTICLE ELECTROCATALYSTS 170
5.2.3.2 ALD OF CORE/SHELL NANOPARTICLE ELECTROCATALYSTS 172
5.3 ALD OF TRANSITION METAL OXIDE ELECTROCATALYSTS 174
5.4 SUMMARY AND OUTLOOK 175
ACKNOWLEDGMENT 178
REFERENCES 178
6 ATOMIC LAYER DEPOSITION FOR THIN-FILM LITHIUM-ION
BATTERIES 183
OLA NILSEN, KNUT B. GANDRUD, AMUND RUUD, AND HELMER FJELLVAEG
6.1 INTRODUCTION 183
6.2 COATED POWDER BATTERY MATERIALS BY ALD 184
6.3 LI CHEMISTRY FOR ALD 186
6.4 THIN-FILM BATTERIES 187
6.5 ALD FOR SOLID-STATE ELECTROLYTES 189
6.5.1 LI2C 0 3 189
6.5.2 LI-LA-O 189
6.5.3 LET 189
6.5.4 LI-A L-O (LIA102) 190
6.5.5 UXSIYOZ 191
6.5.6 LI-A L-SI-O 191
6.5.7 LINBOZ 192
6.5.8 LITAOZ 192
6.5.9 LI3P0 4 192
6.5.10 LI3N 192
6.5.11 LIPON 193
6.5.12 LIF 194
6.6 ALD FOR CATHODE MATERIALS 194
6.6.1 V20 5 194
6.6.2 LICO02 195
6.6.3 MN0*/LI2MN20 4/LIMN20 4 296
6.6.4 SUBSEQUENT LITHIATION 196
6.6.5 LIFEP04 297
6.6.6 SULFIDES 298
6.7 ALD FOR ANODE MATERIALS 2 98
6.8 OUTLOOK 299
ACKNOWLEDGMENTS 204
REFERENCES 204
7 ALD-PROCESSED OXIDES FOR HIGH-TEMPERATURE FUEL CELLS 209
MICHEL CASSIR, ARTURO MELENDEZ-CEBALLOS; MARIE-HELENE CHAVANNE, DORRA
DAL LEI, AND ARMELLE RINGUEDE
7.1 BRIEF DESCRIPTION OF HIGH-TEMPERATURE FUEL CELLS 209
7.1.1 SOLID OXIDE FUEL CELLS 209
7.1.2 MOLTEN CARBONATE FUEL CELLS 210
7.2 THIN LAYERS IN SOFC AND MCFC DEVICES 210
7.2.1 GENERAL FEATURES 210
7.2.2 INTEREST OF ALD 212
7.3 ALD FOR SOFC MATERIALS 213
7.3.1 ELECTROLYTES AND INTERFACES 213
7.3.1.1 ZIRCONIA-BASED MATERIALS 213
7.3.1.2 CERIA-BASED MATERIALS 214
7.3.1.3 GALLATE MATERIALS 215
7.3.2 ELECTRODES AND CURRENT COLLECTORS 215
7.3.2.1 PT DEPOSITS 215
7.3.2.2 ANODE 216
7.3.2.3 CATHODE 216
7A COATINGS FOR MCFC CATHODES AND BIPOLAR PLATES 216
7.5 CONCLUSION AND EMERGING TOPICS 218
REFERENCES 218
PART IV ALD IN PHOTOELECTROCHEMICAL AND THERMOELECTRIC
ENERGY CONVERSION 223
8 ALD FOR PHOTOELECTROCHEMICAL WATER SPLITTING 225
LIONEL SANTINACCI
8.1 INTRODUCTION 225
8.2 PHOTOELECTROCHEMICAL CELL: PRINCIPLE, MATERIALS, AND
IMPROVEMENTS 227
8.2.1 PRINCIPLE OF THE PEC 227
8.2.2 PHOTOELECTRODE MATERIALS 228
8.2.2.1 METAL OXIDES 229
S.2.2.2 ELEMENTAL AND COMPOUND SEMICONDUCTORS 229
8.2.2.Z NITRIDES 230
8.2.3 GEOMETRY OF THE PHOTOELECTRODES: MICRO- AND NANOSTRUCTURING 230
8.2.4 COATING AND FUNCTIONALIZATION OF THE PHOTOELECTRODES 233
8.3 INTEREST OF ALD FOR PEC 233
8.3.1 SYNTHESIS OF ELECTRODE MATERIALS 234
8.3.2 NANOSTRUCTURED PHOTOELECTRODES 235
8.3.3 CATALYST DEPOSITION 239
8.3.4 PASSIVATION AND MODIFICATION OF THE JUNCTION 240
8.3.5 PHOTOCORROSION PROTECTION 244
8.3.5.1 PROTECTION OF PLANAR PHOTOANODES 244
5.3.5.2 PROTECTION OF PLANAR PHOTOCATHODES 246
8.3.5.3 PROTECTION OF NANOSTRUCTURED PHOTOELECTRODES 246
8.4 CONCLUSION AND OUTLOOK 247
REFERENCES 247
9 ATOMIC LAYER DEPOSITION OF THERMOELECTRIC MATERIALS 259
MOARIT KARPPINEN AND ANTTI J. KARTTUNEN
9.1 INTRODUCTION 259
9.1.1 THERMOELECTRIC ENERGY CONVERSION AND COOLING 259
9.1.2 DESIGNING AND OPTIMIZING THERMOELECTRIC MATERIALS 260
9.1.3 THIN-FILM THERMOELECTRIC DEVICES 262
9.2 ALD PROCESSES FOR THERMOELECTRICS 263
9.2.1 THERMOELECTRIC OXIDE THIN FILMS 263
9.2.2 THERMOELECTRIC SELENIDE AND TELLURIDE THIN FILMS 266
9.3 SUPERLATTICES FOR ENHANCED THERMOELECTRIC PERFORMANCE 266
9.4 PROSPECTS AND FUTURE CHALLENGES 271
REFERENCES 272
INDEX 275
|
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| id | DE-604.BV044300976 |
| illustrated | Illustrated |
| indexdate | 2024-12-20T17:59:16Z |
| institution | BVB |
| institution_GND | (DE-588)16179388-5 |
| isbn | 9783527339129 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-029704858 |
| oclc_num | 992477054 |
| open_access_boolean | |
| owner | DE-11 DE-29T DE-703 DE-634 |
| owner_facet | DE-11 DE-29T DE-703 DE-634 |
| physical | xxv, 281 Seiten Illustrationen, Diagramme (überwiegend farbig) |
| publishDate | 2017 |
| publishDateSearch | 2017 |
| publishDateSort | 2017 |
| publisher | Wiley-VCH |
| record_format | marc |
| spellingShingle | Atomic layer deposition in energy conversion applications Energiewandler (DE-588)4152239-4 gnd Erneuerbare Energien (DE-588)4068598-6 gnd Atomlagenabscheidung (DE-588)7712127-2 gnd Energiedirektumwandlung (DE-588)4152215-1 gnd Werkstoffwahl (DE-588)4136338-3 gnd |
| subject_GND | (DE-588)4152239-4 (DE-588)4068598-6 (DE-588)7712127-2 (DE-588)4152215-1 (DE-588)4136338-3 |
| title | Atomic layer deposition in energy conversion applications |
| title_auth | Atomic layer deposition in energy conversion applications |
| title_exact_search | Atomic layer deposition in energy conversion applications |
| title_full | Atomic layer deposition in energy conversion applications Julien Bachmann |
| title_fullStr | Atomic layer deposition in energy conversion applications Julien Bachmann |
| title_full_unstemmed | Atomic layer deposition in energy conversion applications Julien Bachmann |
| title_short | Atomic layer deposition in energy conversion applications |
| title_sort | atomic layer deposition in energy conversion applications |
| topic | Energiewandler (DE-588)4152239-4 gnd Erneuerbare Energien (DE-588)4068598-6 gnd Atomlagenabscheidung (DE-588)7712127-2 gnd Energiedirektumwandlung (DE-588)4152215-1 gnd Werkstoffwahl (DE-588)4136338-3 gnd |
| topic_facet | Energiewandler Erneuerbare Energien Atomlagenabscheidung Energiedirektumwandlung Werkstoffwahl |
| url | http://www.wiley-vch.de/publish/dt/books/ISBN978-3-527-33912-9/ http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=029704858&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA |
| work_keys_str_mv | AT bachmannjulien atomiclayerdepositioninenergyconversionapplications AT wileyvch atomiclayerdepositioninenergyconversionapplications |