Thin film materials: stress, defect formation, and surface evolution
Gespeichert in:
Bibliographische Detailangaben
Beteilige Person: Freund, L. B. (VerfasserIn)
Format: Elektronisch E-Book
Sprache:Englisch
Veröffentlicht: Cambridge, UK Cambridge University Press 2003
Schlagwörter:
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Beschreibung:Includes bibliographical references (p. 713-737) and index
1 - Introduction and Overview -- - 2 - Film stress and substrate curvature -- - 3 - Stress in anisotropic and patterned films -- - 4 - Delamination and fracture -- - 5 - Film buckling, bulging and peeling -- - 6 - Dislocation formation in epitaxial systems -- - 7 - Dislocation interactions and strain relaxation -- - 8 - Equilibrium and stability of surfaces -- - 9 - The role of stress in mass transport
"Thin films play an important role in many technological applications including microelectronic device, magnetic storage media and surface coatings. This book provides a comprehensive coverage of the major issues and topics dealing with stress, defect formation and surface evolution in thin films. Physical phenomena are examined from the continuum down to the sub-microscopic length scales, with the connections between the structure of the material and its behavior described wherever appropriate
While the book develops a comprehensive scientific basis with which stress, deformation and failure in thin film materials can be characterized, an attempt is also made to link the scientific concepts to a broad range of practical applications through example problems, historical notes, case studies and exercises. Of particular interest to engineers, materials scientists and physicists, this book will be essential reading for senior undergraduate and graduate courses on thin films"--Book jacket
Umfang:1 Online-Ressource (xviii, 750 p.)
ISBN:051116372X
0511164521
051116565X
0511184123
051175471X
0521822815
9780511163722
9780511164521
9780511165658
9780511184123
9780511754715
9780521822817