Smart sensors and MEMS: intelligent devices and microsystems for industrial applications
Saved in:
| Other Authors: | , |
|---|---|
| Format: | Electronic eBook |
| Language: | English |
| Published: |
Oxford ; Cambridge ; Philadelphia ; New Delhi
Woodhead Publishing
2013
|
| Series: | Woodhead Publishing series in electronic and optical materials
51 |
| Subjects: | |
| Links: | http://www.sciencedirect.com/science/book/9780857095022 http://www.sciencedirect.com/science/book/9780857095022 http://www.sciencedirect.com/science/book/9780857095022 |
| Physical Description: | 1 Online-Ressource Illustrationen |
| ISBN: | 9780857099297 0857099299 1306540933 9781306540933 0857095021 9780857095022 |
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| 505 | 8 | |a Includes bibliographical references and index | |
| 505 | 8 | |a Smart sensors and MEMS can include a variety of devices and systems that have a high level of functionality. They do this either by integrating multiple sensing and actuating modes into one device, or else by integrating sensing and actuating with information processing, analog-to-digital conversion and memory functions. Part one outlines the industrial applications for smart sensors, covering direct interface circuits for sensors, capacitive sensors for displacement measurement in the sub-nanometer range, integrated inductive displacement sensors for harsh industrial environments, advanced silicon radiation detectors in the vacuum ultraviolet (VUV) and extreme ultraviolet (EUV) spectral range, and advanced optical incremental sensors (encoders and interferometers), among other topics. The second part of the book describes the industrial applications of smart micro-electro-mechanical systems (MEMS). Some of the topics covered in this section include microfabrication technologies used for creating smart devices for industrial applications, microactuators, dynamic behaviour of smart MEMS in industrial applications, MEMS integrating motion and displacement sensors, MEMS print heads for industrial printing, Photovoltaic and fuel cells in power MEMS for smart energy management, and radio frequency (RF)-MEMS for smart communication microsystems. Smart sensors and MEMS is invaluable reference for academics, materials scientists and electrical engineers working in the microelectronics, sensors and micromechanics industry, and engineers looking for industrial sensing, monitoring and automation solutions. Outlines industrial applications for smart sensors and smart MEMSCovers smart sensors including capacitive, inductive, resistive and magnetic sensors and sensors to detect radiation and measure temperatureCovers smart MEMS including power MEMS, radio frequency MEMS, optical MEMS, inertial MEMS, and microreaction chambers | |
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| contents | Includes bibliographical references and index Smart sensors and MEMS can include a variety of devices and systems that have a high level of functionality. They do this either by integrating multiple sensing and actuating modes into one device, or else by integrating sensing and actuating with information processing, analog-to-digital conversion and memory functions. Part one outlines the industrial applications for smart sensors, covering direct interface circuits for sensors, capacitive sensors for displacement measurement in the sub-nanometer range, integrated inductive displacement sensors for harsh industrial environments, advanced silicon radiation detectors in the vacuum ultraviolet (VUV) and extreme ultraviolet (EUV) spectral range, and advanced optical incremental sensors (encoders and interferometers), among other topics. The second part of the book describes the industrial applications of smart micro-electro-mechanical systems (MEMS). Some of the topics covered in this section include microfabrication technologies used for creating smart devices for industrial applications, microactuators, dynamic behaviour of smart MEMS in industrial applications, MEMS integrating motion and displacement sensors, MEMS print heads for industrial printing, Photovoltaic and fuel cells in power MEMS for smart energy management, and radio frequency (RF)-MEMS for smart communication microsystems. Smart sensors and MEMS is invaluable reference for academics, materials scientists and electrical engineers working in the microelectronics, sensors and micromechanics industry, and engineers looking for industrial sensing, monitoring and automation solutions. Outlines industrial applications for smart sensors and smart MEMSCovers smart sensors including capacitive, inductive, resistive and magnetic sensors and sensors to detect radiation and measure temperatureCovers smart MEMS including power MEMS, radio frequency MEMS, optical MEMS, inertial MEMS, and microreaction chambers |
| ctrlnum | (OCoLC)874966039 (DE-599)BVBBV042300153 |
| dewey-full | 681.2 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 681 - Precision instruments and other devices |
| dewey-raw | 681.2 |
| dewey-search | 681.2 |
| dewey-sort | 3681.2 |
| dewey-tens | 680 - Manufacture of products for specific uses |
| discipline | Handwerk und Gewerbe / Verschiedene Technologien |
| format | Electronic eBook |
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| indexdate | 2025-01-11T13:09:14Z |
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| isbn | 9780857099297 0857099299 1306540933 9781306540933 0857095021 9780857095022 |
| language | English |
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| spellingShingle | Smart sensors and MEMS intelligent devices and microsystems for industrial applications Woodhead Publishing series in electronic and optical materials Includes bibliographical references and index Smart sensors and MEMS can include a variety of devices and systems that have a high level of functionality. They do this either by integrating multiple sensing and actuating modes into one device, or else by integrating sensing and actuating with information processing, analog-to-digital conversion and memory functions. Part one outlines the industrial applications for smart sensors, covering direct interface circuits for sensors, capacitive sensors for displacement measurement in the sub-nanometer range, integrated inductive displacement sensors for harsh industrial environments, advanced silicon radiation detectors in the vacuum ultraviolet (VUV) and extreme ultraviolet (EUV) spectral range, and advanced optical incremental sensors (encoders and interferometers), among other topics. The second part of the book describes the industrial applications of smart micro-electro-mechanical systems (MEMS). Some of the topics covered in this section include microfabrication technologies used for creating smart devices for industrial applications, microactuators, dynamic behaviour of smart MEMS in industrial applications, MEMS integrating motion and displacement sensors, MEMS print heads for industrial printing, Photovoltaic and fuel cells in power MEMS for smart energy management, and radio frequency (RF)-MEMS for smart communication microsystems. Smart sensors and MEMS is invaluable reference for academics, materials scientists and electrical engineers working in the microelectronics, sensors and micromechanics industry, and engineers looking for industrial sensing, monitoring and automation solutions. Outlines industrial applications for smart sensors and smart MEMSCovers smart sensors including capacitive, inductive, resistive and magnetic sensors and sensors to detect radiation and measure temperatureCovers smart MEMS including power MEMS, radio frequency MEMS, optical MEMS, inertial MEMS, and microreaction chambers Detectors Industrial applications Microelectromechanical systems Industrial applications Mikrosystemtechnik (DE-588)4221617-5 gnd MEMS (DE-588)4824724-8 gnd Intelligenter Sensor (DE-588)4293453-9 gnd |
| subject_GND | (DE-588)4221617-5 (DE-588)4824724-8 (DE-588)4293453-9 (DE-588)4143413-4 |
| title | Smart sensors and MEMS intelligent devices and microsystems for industrial applications |
| title_alt | Smart sensors and microelectromechanical systems |
| title_auth | Smart sensors and MEMS intelligent devices and microsystems for industrial applications |
| title_exact_search | Smart sensors and MEMS intelligent devices and microsystems for industrial applications |
| title_full | Smart sensors and MEMS intelligent devices and microsystems for industrial applications edited by Stoyan Nihtianov and Antonio Luque |
| title_fullStr | Smart sensors and MEMS intelligent devices and microsystems for industrial applications edited by Stoyan Nihtianov and Antonio Luque |
| title_full_unstemmed | Smart sensors and MEMS intelligent devices and microsystems for industrial applications edited by Stoyan Nihtianov and Antonio Luque |
| title_short | Smart sensors and MEMS |
| title_sort | smart sensors and mems intelligent devices and microsystems for industrial applications |
| title_sub | intelligent devices and microsystems for industrial applications |
| topic | Detectors Industrial applications Microelectromechanical systems Industrial applications Mikrosystemtechnik (DE-588)4221617-5 gnd MEMS (DE-588)4824724-8 gnd Intelligenter Sensor (DE-588)4293453-9 gnd |
| topic_facet | Detectors Industrial applications Microelectromechanical systems Industrial applications Mikrosystemtechnik MEMS Intelligenter Sensor Aufsatzsammlung |
| url | http://www.sciencedirect.com/science/book/9780857095022 |
| volume_link | (DE-604)BV042543615 |
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