Smart sensors and MEMS: intelligent devices and microsystems for industrial applications
Gespeichert in:
| Weitere beteiligte Personen: | , |
|---|---|
| Format: | Elektronisch E-Book |
| Sprache: | Englisch |
| Veröffentlicht: |
Oxford ; Cambridge ; Philadelphia ; New Delhi
Woodhead Publishing
2013
|
| Schriftenreihe: | Woodhead Publishing series in electronic and optical materials
51 |
| Schlagwörter: | |
| Links: | http://www.sciencedirect.com/science/book/9780857095022 http://www.sciencedirect.com/science/book/9780857095022 http://www.sciencedirect.com/science/book/9780857095022 |
| Umfang: | 1 Online-Ressource Illustrationen |
| ISBN: | 9780857099297 0857099299 1306540933 9781306540933 0857095021 9780857095022 |
Internformat
MARC
| LEADER | 00000nam a2200000 cb4500 | ||
|---|---|---|---|
| 001 | BV042300153 | ||
| 003 | DE-604 | ||
| 005 | 20230323 | ||
| 007 | cr|uuu---uuuuu | ||
| 008 | 150129s2013 xx a||| o|||| 00||| eng d | ||
| 020 | |a 9780857099297 |c electronic bk. |9 978-0-85709-929-7 | ||
| 020 | |a 0857099299 |c electronic bk. |9 0-85709-929-9 | ||
| 020 | |a 1306540933 |c electronic bk. |9 1-306-54093-3 | ||
| 020 | |a 9781306540933 |c electronic bk. |9 978-1-306-54093-3 | ||
| 020 | |a 0857095021 |c electronic bk. |9 0-85709-502-1 | ||
| 020 | |a 9780857095022 |c electronic bk. |9 978-0-85709-502-2 | ||
| 035 | |a (OCoLC)874966039 | ||
| 035 | |a (DE-599)BVBBV042300153 | ||
| 040 | |a DE-604 |b ger |e rda | ||
| 041 | 0 | |a eng | |
| 049 | |a DE-1046 |a DE-91 |a DE-188 |a DE-83 | ||
| 082 | 0 | |a 681.2 |2 23 | |
| 245 | 1 | 0 | |a Smart sensors and MEMS |b intelligent devices and microsystems for industrial applications |c edited by Stoyan Nihtianov and Antonio Luque |
| 246 | 1 | 3 | |a Smart sensors and microelectromechanical systems |
| 264 | 1 | |a Oxford ; Cambridge ; Philadelphia ; New Delhi |b Woodhead Publishing |c 2013 | |
| 300 | |a 1 Online-Ressource |b Illustrationen | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b c |2 rdamedia | ||
| 338 | |b cr |2 rdacarrier | ||
| 490 | 1 | |a Woodhead Publishing series in electronic and optical materials |v 51 | |
| 505 | 8 | |a Includes bibliographical references and index | |
| 505 | 8 | |a Smart sensors and MEMS can include a variety of devices and systems that have a high level of functionality. They do this either by integrating multiple sensing and actuating modes into one device, or else by integrating sensing and actuating with information processing, analog-to-digital conversion and memory functions. Part one outlines the industrial applications for smart sensors, covering direct interface circuits for sensors, capacitive sensors for displacement measurement in the sub-nanometer range, integrated inductive displacement sensors for harsh industrial environments, advanced silicon radiation detectors in the vacuum ultraviolet (VUV) and extreme ultraviolet (EUV) spectral range, and advanced optical incremental sensors (encoders and interferometers), among other topics. The second part of the book describes the industrial applications of smart micro-electro-mechanical systems (MEMS). Some of the topics covered in this section include microfabrication technologies used for creating smart devices for industrial applications, microactuators, dynamic behaviour of smart MEMS in industrial applications, MEMS integrating motion and displacement sensors, MEMS print heads for industrial printing, Photovoltaic and fuel cells in power MEMS for smart energy management, and radio frequency (RF)-MEMS for smart communication microsystems. Smart sensors and MEMS is invaluable reference for academics, materials scientists and electrical engineers working in the microelectronics, sensors and micromechanics industry, and engineers looking for industrial sensing, monitoring and automation solutions. Outlines industrial applications for smart sensors and smart MEMSCovers smart sensors including capacitive, inductive, resistive and magnetic sensors and sensors to detect radiation and measure temperatureCovers smart MEMS including power MEMS, radio frequency MEMS, optical MEMS, inertial MEMS, and microreaction chambers | |
| 650 | 4 | |a Detectors |x Industrial applications | |
| 650 | 4 | |a Microelectromechanical systems |x Industrial applications | |
| 650 | 0 | 7 | |a Mikrosystemtechnik |0 (DE-588)4221617-5 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a MEMS |0 (DE-588)4824724-8 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Intelligenter Sensor |0 (DE-588)4293453-9 |2 gnd |9 rswk-swf |
| 655 | 7 | |0 (DE-588)4143413-4 |a Aufsatzsammlung |2 gnd-content | |
| 689 | 0 | 0 | |a Intelligenter Sensor |0 (DE-588)4293453-9 |D s |
| 689 | 0 | 1 | |a Mikrosystemtechnik |0 (DE-588)4221617-5 |D s |
| 689 | 0 | 2 | |a MEMS |0 (DE-588)4824724-8 |D s |
| 689 | 0 | |8 1\p |5 DE-604 | |
| 700 | 1 | |a Nihtianov, Stoyan |d 19XX- |0 (DE-588)1186646608 |4 edt | |
| 700 | 1 | |a Luque López, Antonio |d 1941- |0 (DE-588)1139445413 |4 edt | |
| 830 | 0 | |a Woodhead Publishing series in electronic and optical materials |v 51 |w (DE-604)BV042543615 |9 51 | |
| 856 | 4 | 0 | |u http://www.sciencedirect.com/science/book/9780857095022 |x Verlag |z URL des Erstveröffentlichers |3 Volltext |
| 883 | 1 | |8 1\p |a cgwrk |d 20201028 |q DE-101 |u https://d-nb.info/provenance/plan#cgwrk | |
| 912 | |a ZDB-33-ESD | ||
| 912 | |a ZDB-33-EBS | ||
| 940 | 1 | |q FAW_PDA_ESD | |
| 943 | 1 | |a oai:aleph.bib-bvb.de:BVB01-027737145 | |
| 966 | e | |u http://www.sciencedirect.com/science/book/9780857095022 |l DE-188 |p ZDB-33-ESD |q ZDB-33-ESD 2021 |x Verlag |3 Volltext | |
| 966 | e | |u http://www.sciencedirect.com/science/book/9780857095022 |l DE-91 |p ZDB-33-ESD |q TUM_PDA_ESD_ENG_Kauf |x Verlag |3 Volltext | |
Datensatz im Suchindex
| DE-BY-TUM_katkey | 2108768 |
|---|---|
| _version_ | 1821935332427300864 |
| adam_text | |
| any_adam_object | |
| author2 | Nihtianov, Stoyan 19XX- Luque López, Antonio 1941- |
| author2_role | edt edt |
| author2_variant | s n sn l a l la lal |
| author_GND | (DE-588)1186646608 (DE-588)1139445413 |
| author_facet | Nihtianov, Stoyan 19XX- Luque López, Antonio 1941- |
| building | Verbundindex |
| bvnumber | BV042300153 |
| collection | ZDB-33-ESD ZDB-33-EBS |
| contents | Includes bibliographical references and index Smart sensors and MEMS can include a variety of devices and systems that have a high level of functionality. They do this either by integrating multiple sensing and actuating modes into one device, or else by integrating sensing and actuating with information processing, analog-to-digital conversion and memory functions. Part one outlines the industrial applications for smart sensors, covering direct interface circuits for sensors, capacitive sensors for displacement measurement in the sub-nanometer range, integrated inductive displacement sensors for harsh industrial environments, advanced silicon radiation detectors in the vacuum ultraviolet (VUV) and extreme ultraviolet (EUV) spectral range, and advanced optical incremental sensors (encoders and interferometers), among other topics. The second part of the book describes the industrial applications of smart micro-electro-mechanical systems (MEMS). Some of the topics covered in this section include microfabrication technologies used for creating smart devices for industrial applications, microactuators, dynamic behaviour of smart MEMS in industrial applications, MEMS integrating motion and displacement sensors, MEMS print heads for industrial printing, Photovoltaic and fuel cells in power MEMS for smart energy management, and radio frequency (RF)-MEMS for smart communication microsystems. Smart sensors and MEMS is invaluable reference for academics, materials scientists and electrical engineers working in the microelectronics, sensors and micromechanics industry, and engineers looking for industrial sensing, monitoring and automation solutions. Outlines industrial applications for smart sensors and smart MEMSCovers smart sensors including capacitive, inductive, resistive and magnetic sensors and sensors to detect radiation and measure temperatureCovers smart MEMS including power MEMS, radio frequency MEMS, optical MEMS, inertial MEMS, and microreaction chambers |
| ctrlnum | (OCoLC)874966039 (DE-599)BVBBV042300153 |
| dewey-full | 681.2 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 681 - Precision instruments and other devices |
| dewey-raw | 681.2 |
| dewey-search | 681.2 |
| dewey-sort | 3681.2 |
| dewey-tens | 680 - Manufacture of products for specific uses |
| discipline | Handwerk und Gewerbe / Verschiedene Technologien |
| format | Electronic eBook |
| fullrecord | <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>00000nam a2200000 cb4500</leader><controlfield tag="001">BV042300153</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">20230323</controlfield><controlfield tag="007">cr|uuu---uuuuu</controlfield><controlfield tag="008">150129s2013 xx a||| o|||| 00||| eng d</controlfield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">9780857099297</subfield><subfield code="c">electronic bk.</subfield><subfield code="9">978-0-85709-929-7</subfield></datafield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">0857099299</subfield><subfield code="c">electronic bk.</subfield><subfield code="9">0-85709-929-9</subfield></datafield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">1306540933</subfield><subfield code="c">electronic bk.</subfield><subfield code="9">1-306-54093-3</subfield></datafield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">9781306540933</subfield><subfield code="c">electronic bk.</subfield><subfield code="9">978-1-306-54093-3</subfield></datafield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">0857095021</subfield><subfield code="c">electronic bk.</subfield><subfield code="9">0-85709-502-1</subfield></datafield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">9780857095022</subfield><subfield code="c">electronic bk.</subfield><subfield code="9">978-0-85709-502-2</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)874966039</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)BVBBV042300153</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield><subfield code="e">rda</subfield></datafield><datafield tag="041" ind1="0" ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="049" ind1=" " ind2=" "><subfield code="a">DE-1046</subfield><subfield code="a">DE-91</subfield><subfield code="a">DE-188</subfield><subfield code="a">DE-83</subfield></datafield><datafield tag="082" ind1="0" ind2=" "><subfield code="a">681.2</subfield><subfield code="2">23</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Smart sensors and MEMS</subfield><subfield code="b">intelligent devices and microsystems for industrial applications</subfield><subfield code="c">edited by Stoyan Nihtianov and Antonio Luque</subfield></datafield><datafield tag="246" ind1="1" ind2="3"><subfield code="a">Smart sensors and microelectromechanical systems</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">Oxford ; Cambridge ; Philadelphia ; New Delhi</subfield><subfield code="b">Woodhead Publishing</subfield><subfield code="c">2013</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">1 Online-Ressource</subfield><subfield code="b">Illustrationen</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">c</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">cr</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="490" ind1="1" ind2=" "><subfield code="a">Woodhead Publishing series in electronic and optical materials</subfield><subfield code="v">51</subfield></datafield><datafield tag="505" ind1="8" ind2=" "><subfield code="a">Includes bibliographical references and index</subfield></datafield><datafield tag="505" ind1="8" ind2=" "><subfield code="a">Smart sensors and MEMS can include a variety of devices and systems that have a high level of functionality. They do this either by integrating multiple sensing and actuating modes into one device, or else by integrating sensing and actuating with information processing, analog-to-digital conversion and memory functions. Part one outlines the industrial applications for smart sensors, covering direct interface circuits for sensors, capacitive sensors for displacement measurement in the sub-nanometer range, integrated inductive displacement sensors for harsh industrial environments, advanced silicon radiation detectors in the vacuum ultraviolet (VUV) and extreme ultraviolet (EUV) spectral range, and advanced optical incremental sensors (encoders and interferometers), among other topics. The second part of the book describes the industrial applications of smart micro-electro-mechanical systems (MEMS). Some of the topics covered in this section include microfabrication technologies used for creating smart devices for industrial applications, microactuators, dynamic behaviour of smart MEMS in industrial applications, MEMS integrating motion and displacement sensors, MEMS print heads for industrial printing, Photovoltaic and fuel cells in power MEMS for smart energy management, and radio frequency (RF)-MEMS for smart communication microsystems. Smart sensors and MEMS is invaluable reference for academics, materials scientists and electrical engineers working in the microelectronics, sensors and micromechanics industry, and engineers looking for industrial sensing, monitoring and automation solutions. Outlines industrial applications for smart sensors and smart MEMSCovers smart sensors including capacitive, inductive, resistive and magnetic sensors and sensors to detect radiation and measure temperatureCovers smart MEMS including power MEMS, radio frequency MEMS, optical MEMS, inertial MEMS, and microreaction chambers</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Detectors</subfield><subfield code="x">Industrial applications</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Microelectromechanical systems</subfield><subfield code="x">Industrial applications</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Mikrosystemtechnik</subfield><subfield code="0">(DE-588)4221617-5</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">MEMS</subfield><subfield code="0">(DE-588)4824724-8</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Intelligenter Sensor</subfield><subfield code="0">(DE-588)4293453-9</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="655" ind1=" " ind2="7"><subfield code="0">(DE-588)4143413-4</subfield><subfield code="a">Aufsatzsammlung</subfield><subfield code="2">gnd-content</subfield></datafield><datafield tag="689" ind1="0" ind2="0"><subfield code="a">Intelligenter Sensor</subfield><subfield code="0">(DE-588)4293453-9</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="1"><subfield code="a">Mikrosystemtechnik</subfield><subfield code="0">(DE-588)4221617-5</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="2"><subfield code="a">MEMS</subfield><subfield code="0">(DE-588)4824724-8</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2=" "><subfield code="8">1\p</subfield><subfield code="5">DE-604</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Nihtianov, Stoyan</subfield><subfield code="d">19XX-</subfield><subfield code="0">(DE-588)1186646608</subfield><subfield code="4">edt</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Luque López, Antonio</subfield><subfield code="d">1941-</subfield><subfield code="0">(DE-588)1139445413</subfield><subfield code="4">edt</subfield></datafield><datafield tag="830" ind1=" " ind2="0"><subfield code="a">Woodhead Publishing series in electronic and optical materials</subfield><subfield code="v">51</subfield><subfield code="w">(DE-604)BV042543615</subfield><subfield code="9">51</subfield></datafield><datafield tag="856" ind1="4" ind2="0"><subfield code="u">http://www.sciencedirect.com/science/book/9780857095022</subfield><subfield code="x">Verlag</subfield><subfield code="z">URL des Erstveröffentlichers</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="883" ind1="1" ind2=" "><subfield code="8">1\p</subfield><subfield code="a">cgwrk</subfield><subfield code="d">20201028</subfield><subfield code="q">DE-101</subfield><subfield code="u">https://d-nb.info/provenance/plan#cgwrk</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">ZDB-33-ESD</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">ZDB-33-EBS</subfield></datafield><datafield tag="940" ind1="1" ind2=" "><subfield code="q">FAW_PDA_ESD</subfield></datafield><datafield tag="943" ind1="1" ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-027737145</subfield></datafield><datafield tag="966" ind1="e" ind2=" "><subfield code="u">http://www.sciencedirect.com/science/book/9780857095022</subfield><subfield code="l">DE-188</subfield><subfield code="p">ZDB-33-ESD</subfield><subfield code="q">ZDB-33-ESD 2021</subfield><subfield code="x">Verlag</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="966" ind1="e" ind2=" "><subfield code="u">http://www.sciencedirect.com/science/book/9780857095022</subfield><subfield code="l">DE-91</subfield><subfield code="p">ZDB-33-ESD</subfield><subfield code="q">TUM_PDA_ESD_ENG_Kauf</subfield><subfield code="x">Verlag</subfield><subfield code="3">Volltext</subfield></datafield></record></collection> |
| genre | (DE-588)4143413-4 Aufsatzsammlung gnd-content |
| genre_facet | Aufsatzsammlung |
| id | DE-604.BV042300153 |
| illustrated | Illustrated |
| indexdate | 2025-01-11T13:09:14Z |
| institution | BVB |
| isbn | 9780857099297 0857099299 1306540933 9781306540933 0857095021 9780857095022 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-027737145 |
| oclc_num | 874966039 |
| open_access_boolean | |
| owner | DE-1046 DE-91 DE-BY-TUM DE-188 DE-83 |
| owner_facet | DE-1046 DE-91 DE-BY-TUM DE-188 DE-83 |
| physical | 1 Online-Ressource Illustrationen |
| psigel | ZDB-33-ESD ZDB-33-EBS FAW_PDA_ESD ZDB-33-ESD ZDB-33-ESD 2021 ZDB-33-ESD TUM_PDA_ESD_ENG_Kauf |
| publishDate | 2013 |
| publishDateSearch | 2013 |
| publishDateSort | 2013 |
| publisher | Woodhead Publishing |
| record_format | marc |
| series | Woodhead Publishing series in electronic and optical materials |
| series2 | Woodhead Publishing series in electronic and optical materials |
| spellingShingle | Smart sensors and MEMS intelligent devices and microsystems for industrial applications Woodhead Publishing series in electronic and optical materials Includes bibliographical references and index Smart sensors and MEMS can include a variety of devices and systems that have a high level of functionality. They do this either by integrating multiple sensing and actuating modes into one device, or else by integrating sensing and actuating with information processing, analog-to-digital conversion and memory functions. Part one outlines the industrial applications for smart sensors, covering direct interface circuits for sensors, capacitive sensors for displacement measurement in the sub-nanometer range, integrated inductive displacement sensors for harsh industrial environments, advanced silicon radiation detectors in the vacuum ultraviolet (VUV) and extreme ultraviolet (EUV) spectral range, and advanced optical incremental sensors (encoders and interferometers), among other topics. The second part of the book describes the industrial applications of smart micro-electro-mechanical systems (MEMS). Some of the topics covered in this section include microfabrication technologies used for creating smart devices for industrial applications, microactuators, dynamic behaviour of smart MEMS in industrial applications, MEMS integrating motion and displacement sensors, MEMS print heads for industrial printing, Photovoltaic and fuel cells in power MEMS for smart energy management, and radio frequency (RF)-MEMS for smart communication microsystems. Smart sensors and MEMS is invaluable reference for academics, materials scientists and electrical engineers working in the microelectronics, sensors and micromechanics industry, and engineers looking for industrial sensing, monitoring and automation solutions. Outlines industrial applications for smart sensors and smart MEMSCovers smart sensors including capacitive, inductive, resistive and magnetic sensors and sensors to detect radiation and measure temperatureCovers smart MEMS including power MEMS, radio frequency MEMS, optical MEMS, inertial MEMS, and microreaction chambers Detectors Industrial applications Microelectromechanical systems Industrial applications Mikrosystemtechnik (DE-588)4221617-5 gnd MEMS (DE-588)4824724-8 gnd Intelligenter Sensor (DE-588)4293453-9 gnd |
| subject_GND | (DE-588)4221617-5 (DE-588)4824724-8 (DE-588)4293453-9 (DE-588)4143413-4 |
| title | Smart sensors and MEMS intelligent devices and microsystems for industrial applications |
| title_alt | Smart sensors and microelectromechanical systems |
| title_auth | Smart sensors and MEMS intelligent devices and microsystems for industrial applications |
| title_exact_search | Smart sensors and MEMS intelligent devices and microsystems for industrial applications |
| title_full | Smart sensors and MEMS intelligent devices and microsystems for industrial applications edited by Stoyan Nihtianov and Antonio Luque |
| title_fullStr | Smart sensors and MEMS intelligent devices and microsystems for industrial applications edited by Stoyan Nihtianov and Antonio Luque |
| title_full_unstemmed | Smart sensors and MEMS intelligent devices and microsystems for industrial applications edited by Stoyan Nihtianov and Antonio Luque |
| title_short | Smart sensors and MEMS |
| title_sort | smart sensors and mems intelligent devices and microsystems for industrial applications |
| title_sub | intelligent devices and microsystems for industrial applications |
| topic | Detectors Industrial applications Microelectromechanical systems Industrial applications Mikrosystemtechnik (DE-588)4221617-5 gnd MEMS (DE-588)4824724-8 gnd Intelligenter Sensor (DE-588)4293453-9 gnd |
| topic_facet | Detectors Industrial applications Microelectromechanical systems Industrial applications Mikrosystemtechnik MEMS Intelligenter Sensor Aufsatzsammlung |
| url | http://www.sciencedirect.com/science/book/9780857095022 |
| volume_link | (DE-604)BV042543615 |
| work_keys_str_mv | AT nihtianovstoyan smartsensorsandmemsintelligentdevicesandmicrosystemsforindustrialapplications AT luquelopezantonio smartsensorsandmemsintelligentdevicesandmicrosystemsforindustrialapplications AT nihtianovstoyan smartsensorsandmicroelectromechanicalsystems AT luquelopezantonio smartsensorsandmicroelectromechanicalsystems |