Low voltage electron microscopy: principles and applications
Gespeichert in:
| Weitere beteiligte Personen: | |
|---|---|
| Format: | Buch |
| Sprache: | Englisch |
| Veröffentlicht: |
Hoboken, NJ
Wiley
2013
|
| Ausgabe: | 1. publ. |
| Links: | http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=026744065&sequence=000003&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=026744065&sequence=000004&line_number=0002&func_code=DB_RECORDS&service_type=MEDIA |
| Umfang: | XIII, 203 S. graph. Darst. |
| ISBN: | 9781119971115 |
Internformat
MARC
| LEADER | 00000nam a2200000 c 4500 | ||
|---|---|---|---|
| 001 | BV041295164 | ||
| 003 | DE-604 | ||
| 005 | 20140827 | ||
| 007 | t| | ||
| 008 | 130930s2013 xx d||| |||| 00||| eng d | ||
| 020 | |a 9781119971115 |9 978-1-119-97111-5 | ||
| 035 | |a (OCoLC)840419940 | ||
| 035 | |a (DE-599)HBZHT017608179 | ||
| 040 | |a DE-604 |b ger |e rakwb | ||
| 041 | 0 | |a eng | |
| 049 | |a DE-703 |a DE-1043 | ||
| 084 | |a UH 6300 |0 (DE-625)159498: |2 rvk | ||
| 245 | 1 | 0 | |a Low voltage electron microscopy |b principles and applications |c ed. by David C. Bell ... |
| 250 | |a 1. publ. | ||
| 264 | 1 | |a Hoboken, NJ |b Wiley |c 2013 | |
| 300 | |a XIII, 203 S. |b graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 700 | 1 | |a Bell, David C. |0 (DE-588)171722434 |4 edt | |
| 856 | 4 | 2 | |m Digitalisierung UB Bayreuth - ADAM Catalogue Enrichment |q application/pdf |u http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=026744065&sequence=000003&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA |3 Inhaltsverzeichnis |
| 856 | 4 | 2 | |m Digitalisierung UB Bayreuth - ADAM Catalogue Enrichment |q application/pdf |u http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=026744065&sequence=000004&line_number=0002&func_code=DB_RECORDS&service_type=MEDIA |3 Klappentext |
| 943 | 1 | |a oai:aleph.bib-bvb.de:BVB01-026744065 | |
Datensatz im Suchindex
| _version_ | 1819267683411034112 |
|---|---|
| adam_text | Contents
List of Contributors
ix
Preface
xi
1
Introduction to the Theory and Advantages of Low Voltage
Electron Microscopy
1
David C. Bell and Natasha Erdman
1.1
Introduction
1
1.2
Historical Perspective
2
1.3
Beam Interaction with Specimen
—
Elastic and Inelastic
Scattering
3
1.3.1
The Scattering Cross Section
6
1.3.2
Effects of Specimen Damage
10
1.4
Instrument Configuration
11
1.4.1
Scanning Electron Microscope
11
1.4.2
Transmission Electron Microscope
12
1.4.3
Scanning Transmission Electron Microscope
12
1.5
Influence of Electron Optics Aberrations at Low
Voltages
12
1.5.1
Spherical Aberration
13
1.5.2
Effect of Chromatic Aberration
14
1.5.3
The Diffraction Limit
15
1.5.4
Optimizing Spot Size for
SEM
and STEM
15
1.6 SEM
Imaging at Low Voltages
16
1.6.1
Primary Contrast Signals and their Detection
in
SEM 18
1.6.2
Backscattered Electrons
18
1.6.3
Secondary Electrons
21
1.6.4
Charge Balance in
SEM 23
vi
CONTENTS
1.6.5 SEM Image
Contrast
24
1.6.6 Microanalysis in SEM
at Low Voltages
25
1.7
TEM/STEM
Imaging and Analysis at Low Voltages
26
1.8
Conclusion
27
References
28
2 SEM
Instrumentation Developments for Low
kV
Imaging and
Microanalysis
31
Natasha Erdman and David C. Bell
2.1
Introduction
31
2.2
The Electron Source
33
2.3 SEM
Column Design Considerations
36
2.4
Beam Deceleration
41
2.5
Novel Detector Options and Energy Filters
43
2.5.1
Secondary Detectors
43
2.5.2
Backscatter Detectors
45
2.6
Low Voltage STEM in
SEM 48
2.7
Aberration Correction in
SEM 50
2.8
Conclusions
53
References
53
3
Extreme High-Resolution (XHR)
SEM
Using a Beam
Monochromator
57
Richard J. Young, Gerard N.A. van Veen,
Alexander Henstra and
Lubomir
Тита
3.1
Introduction
57
3.2
Limitations in Low Voltage
SEM
Performance
58
3.2.1
Aberration Correction
58
3.2.2
Electron Source Energy Spread
59
3.3
Beam Monochromator Design and Implementation
59
3.4
XHR Systems and Applications
63
3.4.1
Elstar XHR Electron Column
64
3.4.2
Beam Deceleration for Extending Low-Voltage
Performance
65
3.4.3
Combination of a Monochromator with
Non-Immersion Lens
67
3.4.4
XHR Applications
68
3.5
Conclusions
69
Acknowledgements
70
References
70
CONTENTS
VII
The Application of Low-Voltage
SEM—
From
Nanotechnology to Biological Research
73
Natasha Erdman and David C. Bell
4.1
Introduction
73
4.2
Specimen Preparation Considerations
74
4.3
Nanomaterials Applications
76
4.3.1
Nanoparticles, Nanotubes and Nanowires
76
4.3.2
Nanoporous Materials
81
4.3.3
Graphene
83
4.4
Beam Sensitive Materials
84
4.5
Semiconductor Materials
85
4.6
Biological Specimens
87
4.7
Low-Voltage Microanalysis
91
4.8
Conclusions
92
References
93
Low Voltage High-Resolution Transmission Electron
Microscopy
97
David C. Bell
5.1
Introduction
97
5.2
So How Low is Low?
99
5.3
The Effect of Chromatic Aberration and Chromatic
Aberration Correction
100
5.4
The Electron Monochromator
103
5.5
Theoretical Tradeoffs of Low
kV
Imaging
105
5.6
Our Experience at
40
keV LV-HREM
109
5.7
Examples of LV-HREM Imaging
110
5.8
Conclusions
114
References
Gentle STEM of Single Atoms: Low keV Imaging and
Analysis at Ultimate Detection Limits
119
Ondrej L.
Křivánek,
Wu Zhou, Matthew F. Chisholm,
Juan Carlos Idrobo, Tracy C. Love joy,
Quentin M. Ramasse
and
Niklas Dellby
6.1
Introduction
6.2
Optimizing STEM Resolution and Probe Current at Low
Primary Energies
6.3
STEM Image Formation
128
6.3.1
Basic Principles
128
Vlil
CONTENTS
6.3.2
ADF
Imaging
132
6.4
Gentle STEM Applications
135
6.4.1
Single Atom Imaging
135
6.4.2
Single Atom Spectroscopy
146
6.4.3
Single Atom Fine Structure EELS
152
6.5
Discussion
154
6.6
Conclusion
156
Acknowledgements
157
References
157
7
Low Voltage Scanning Transmission Electron Microscopy
of Oxide Interfaces
163
Robert Kite
7.1
Introduction
163
7.2
Methods and Instrumentation
166
7.3
Low Voltage Imaging and Spectroscopy
168
7.3.1
SrTiOs/BiFeOs Interface
168
7.3.2
SÍ3N4/SÍO2
Interfaces
170
7.3.3
Ultrathin SrTiO3 films on GaAs
175
7.4
Summary
180
Acknowledgements
180
References
180
8
What s Next? The Future Directions in Low Voltage Electron
Microscopy
185
David
C. Bell
and Natasha Erdman
8.1
Introduction
185
8.2
Unique Low Voltage
SEM
and
ТЕМ
Instruments
186
8.2.1
Miniature
SEM
Columns
186
8.2.2
Dedicated Low Voltage
ТЕМ
187
8.2.3
The Helium Ion Microscope as an Alternative
to Low Voltage
SEM
Imaging
189
8.3
Cameras, Detectors, and Other Accessories
192
8.3.1
The Direct Electron Detector
192
8.3.2
Silicon Drift Detectors for Low
kV
Nanoanalysis
195
8.4
Conclusions
198
References
199
Index
201
Low Voltage
Electron Microscopy
Principles and Applications
Editors
David C. Bell, Harvard University, USA
Natasha Erdman, JEOL USA Inc., USA
This timely book delves into the rapidly developing, and cutting-edge field, of low
voltage electron microscopy that has only recently become available due to the
rapid developments in the electron optics design and image processing. Low voltage
techniques are particularly crucial in nanotechnology and the study of surface related
phenomena, allowing researchers to observe materials as never before.
Contributions in this book provide an overview of the different tow voltage microscope
techniques for research, essentially providing a handbook for scientists working in this
field.
Low Voltage Electron Microscopy: Principles and Applications focuses on the
recent advances in this field, covering topics in
TEM, SEM,
and STEM, including:
•
New developments in microscope design and improvement in operation.
•
Developments and improvements to existing detector technologies.
•
Novel applications of low voltage for imaging and microanalysis of nanomatertals,
biological specimens as well as beam sensitive materials.
•
A discussion dedicated to the unique electron optics designs for
SEM
and
ТЕМ
and comparison to the emerging field of He ion microscopy.
This topical book highlights the relevant applications of low voltage microscopy to
materials science, nanotechnology and biological research, covering topics such as
imaging techniques and eiemental microanalysis, and addressing the issues associated
with sample preparation requirements for low voltage imaging and analysis. It serves
as a guide for current and new microscopists and materials scientists who are active
in the field of nanotechnology. Edited by two eminently qualified scientists, with
contributions from leading researchers, this is the first book in the field to give a
description of low voltage electron microscopy as a whole.
Also available
as an e-book
WILEY
wilev.com
|
| any_adam_object | 1 |
| author2 | Bell, David C. |
| author2_role | edt |
| author2_variant | d c b dc dcb |
| author_GND | (DE-588)171722434 |
| author_facet | Bell, David C. |
| building | Verbundindex |
| bvnumber | BV041295164 |
| classification_rvk | UH 6300 |
| ctrlnum | (OCoLC)840419940 (DE-599)HBZHT017608179 |
| discipline | Physik |
| edition | 1. publ. |
| format | Book |
| fullrecord | <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>01389nam a2200301 c 4500</leader><controlfield tag="001">BV041295164</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">20140827 </controlfield><controlfield tag="007">t|</controlfield><controlfield tag="008">130930s2013 xx d||| |||| 00||| eng d</controlfield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">9781119971115</subfield><subfield code="9">978-1-119-97111-5</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)840419940</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)HBZHT017608179</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield><subfield code="e">rakwb</subfield></datafield><datafield tag="041" ind1="0" ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="049" ind1=" " ind2=" "><subfield code="a">DE-703</subfield><subfield code="a">DE-1043</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">UH 6300</subfield><subfield code="0">(DE-625)159498:</subfield><subfield code="2">rvk</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Low voltage electron microscopy</subfield><subfield code="b">principles and applications</subfield><subfield code="c">ed. by David C. Bell ...</subfield></datafield><datafield tag="250" ind1=" " ind2=" "><subfield code="a">1. publ.</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">Hoboken, NJ</subfield><subfield code="b">Wiley</subfield><subfield code="c">2013</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">XIII, 203 S.</subfield><subfield code="b">graph. Darst.</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">n</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">nc</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Bell, David C.</subfield><subfield code="0">(DE-588)171722434</subfield><subfield code="4">edt</subfield></datafield><datafield tag="856" ind1="4" ind2="2"><subfield code="m">Digitalisierung UB Bayreuth - ADAM Catalogue Enrichment</subfield><subfield code="q">application/pdf</subfield><subfield code="u">http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=026744065&sequence=000003&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA</subfield><subfield code="3">Inhaltsverzeichnis</subfield></datafield><datafield tag="856" ind1="4" ind2="2"><subfield code="m">Digitalisierung UB Bayreuth - ADAM Catalogue Enrichment</subfield><subfield code="q">application/pdf</subfield><subfield code="u">http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=026744065&sequence=000004&line_number=0002&func_code=DB_RECORDS&service_type=MEDIA</subfield><subfield code="3">Klappentext</subfield></datafield><datafield tag="943" ind1="1" ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-026744065</subfield></datafield></record></collection> |
| id | DE-604.BV041295164 |
| illustrated | Illustrated |
| indexdate | 2024-12-20T16:44:23Z |
| institution | BVB |
| isbn | 9781119971115 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-026744065 |
| oclc_num | 840419940 |
| open_access_boolean | |
| owner | DE-703 DE-1043 |
| owner_facet | DE-703 DE-1043 |
| physical | XIII, 203 S. graph. Darst. |
| publishDate | 2013 |
| publishDateSearch | 2013 |
| publishDateSort | 2013 |
| publisher | Wiley |
| record_format | marc |
| spellingShingle | Low voltage electron microscopy principles and applications |
| title | Low voltage electron microscopy principles and applications |
| title_auth | Low voltage electron microscopy principles and applications |
| title_exact_search | Low voltage electron microscopy principles and applications |
| title_full | Low voltage electron microscopy principles and applications ed. by David C. Bell ... |
| title_fullStr | Low voltage electron microscopy principles and applications ed. by David C. Bell ... |
| title_full_unstemmed | Low voltage electron microscopy principles and applications ed. by David C. Bell ... |
| title_short | Low voltage electron microscopy |
| title_sort | low voltage electron microscopy principles and applications |
| title_sub | principles and applications |
| url | http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=026744065&sequence=000003&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=026744065&sequence=000004&line_number=0002&func_code=DB_RECORDS&service_type=MEDIA |
| work_keys_str_mv | AT belldavidc lowvoltageelectronmicroscopyprinciplesandapplications |