Advanced ceramic oxides for electronics: electrochemistry, spectroscopy, properties, and applications
Saved in:
| Main Author: | |
|---|---|
| Format: | Thesis/Dissertation Book |
| Language: | English |
| Published: |
Stuttgart
Fraunhofer-IRB-Verl.
2006
|
| Series: | Schriftenreihe Kompetenzen in Keramik; 1
1 |
| Subjects: | |
| Links: | http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=025351945&sequence=000002&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA |
| Physical Description: | II, I, 152 S. Ill., graph. Darst. 21 cm |
| ISBN: | 9783816772163 3816772161 |
Staff View
MARC
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Record in the Search Index
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|---|---|
| adam_text | Contents
1 Introduction,
1.1 Valve metal- and ceramic oxides in electronics 1
1.2 Experimental approaches 3
2 Fundamentals
2.1 Electrochemical oxide layer formation on valve metals 5
2.2 The C(U) behavior of valve metal electrodes 6
2.3 Applications of lasers in electrochemistry 7
2.4 Electrochemical photocurrent measurements 8
3 The valve metal Systems
3.1 The Ti/TiO2 System 13
3.2 The Zr/ZrO2 and Hf/HfO2 Systems 31
3.2.1 Zr/ZrO2 31
3.2.2 Hf/HfO2 39
3.3 The Nb/Nb2O5, Ta/Ta2O5 and AI/A12O3 Systems 41
3.3.1 Nb/Nb2O5 41
3.3.2 A1/AI2O3 45
3.3.3 Ta/Ta2O5 46
3.4 Application of valve metal oxide in capacitor manufacturing 49
3.4.1 Capacitor fundamentals 49
3.4.2 Capacitor device types and production of Ta-capacitors 52
3.4.3 Current research trends for Ta-capacitors 56
3.4.4 Effect of oxygen and sintering on dislocation formation 57
3.4.5 Thermal runaway 60
4 The Si/SiO2 System 66
4.1 Si/SiO2 in MOSFETs 68
4.2 Si/SiO2 in DRAMs 71
4.3 The DRAM storage capacitor (deep trench DT) 73
4.3.1 Aspect ratio increase of DT Si etch 76
4.3.2 Bottle shaped DT 77
4.3.3 Hemispherical Silicon grain (HSG) formation 79
4.3.4 Alternative dielectrics 80
4.4 Vertical transistor devices 89
5 Advanced electroceramic Systems: ferroelectrics, high T, superconductors 93
5.1 Ferroelectrics 93
5.2 High Tc superconductors, YBCO 96
5.2.1 Experimental details for YBCO measurements 98
5.2.2 Results for the YBCO System 99
6 Spectroscopic ellipsometry in electronics,
6.1 Fundamentais of conventional spectroscopic ellipsometry 119
6.2 Fundamentais of Spectroscopic Anisotropy Micro-Ellipsometry SAME 122
63 Application of SAME in electronics 128
6.3.1 SAME for thin film growth control 128
6.3.2 Form birefringence: SAME for structure analysis 129
6.3.3 Stress birefringence: SAME for film stress analysis 134
7 Summary 138
References 142
i
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| any_adam_object | 1 |
| author | Michaelis, Alexander |
| author_facet | Michaelis, Alexander |
| author_role | aut |
| author_sort | Michaelis, Alexander |
| author_variant | a m am |
| building | Verbundindex |
| bvnumber | BV040505296 |
| classification_rvk | ZM 6220 |
| ctrlnum | (OCoLC)723569520 (DE-599)DNB982022875 |
| dewey-full | 666.04 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 666 - Ceramic & allied technologies |
| dewey-raw | 666.04 |
| dewey-search | 666.04 |
| dewey-sort | 3666.04 |
| dewey-tens | 660 - Chemical engineering |
| discipline | Chemie / Pharmazie Werkstoffwissenschaften / Fertigungstechnik Elektrotechnik / Elektronik / Nachrichtentechnik |
| format | Thesis Book |
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| genre_facet | Hochschulschrift |
| id | DE-604.BV040505296 |
| illustrated | Illustrated |
| indexdate | 2024-12-20T16:16:24Z |
| institution | BVB |
| isbn | 9783816772163 3816772161 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-025351945 |
| oclc_num | 723569520 |
| open_access_boolean | |
| owner | DE-83 |
| owner_facet | DE-83 |
| physical | II, I, 152 S. Ill., graph. Darst. 21 cm |
| publishDate | 2006 |
| publishDateSearch | 2006 |
| publishDateSort | 2006 |
| publisher | Fraunhofer-IRB-Verl. |
| record_format | marc |
| series | Schriftenreihe Kompetenzen in Keramik; 1 |
| series2 | Schriftenreihe Kompetenzen in Keramik; 1 |
| spellingShingle | Michaelis, Alexander Advanced ceramic oxides for electronics electrochemistry, spectroscopy, properties, and applications Schriftenreihe Kompetenzen in Keramik; 1 Elektrokeramik (DE-588)4151820-2 gnd Oxidkeramik (DE-588)4173025-2 gnd Elektrochemische Reaktion (DE-588)4151764-7 gnd Dielektrische Schicht (DE-588)4194257-7 gnd Dünne Schicht (DE-588)4136925-7 gnd Integrierte Schaltung (DE-588)4027242-4 gnd Hochleistungskeramik (DE-588)4392837-7 gnd |
| subject_GND | (DE-588)4151820-2 (DE-588)4173025-2 (DE-588)4151764-7 (DE-588)4194257-7 (DE-588)4136925-7 (DE-588)4027242-4 (DE-588)4392837-7 (DE-588)4113937-9 |
| title | Advanced ceramic oxides for electronics electrochemistry, spectroscopy, properties, and applications |
| title_auth | Advanced ceramic oxides for electronics electrochemistry, spectroscopy, properties, and applications |
| title_exact_search | Advanced ceramic oxides for electronics electrochemistry, spectroscopy, properties, and applications |
| title_full | Advanced ceramic oxides for electronics electrochemistry, spectroscopy, properties, and applications Alexander Michaelis |
| title_fullStr | Advanced ceramic oxides for electronics electrochemistry, spectroscopy, properties, and applications Alexander Michaelis |
| title_full_unstemmed | Advanced ceramic oxides for electronics electrochemistry, spectroscopy, properties, and applications Alexander Michaelis |
| title_short | Advanced ceramic oxides for electronics |
| title_sort | advanced ceramic oxides for electronics electrochemistry spectroscopy properties and applications |
| title_sub | electrochemistry, spectroscopy, properties, and applications |
| topic | Elektrokeramik (DE-588)4151820-2 gnd Oxidkeramik (DE-588)4173025-2 gnd Elektrochemische Reaktion (DE-588)4151764-7 gnd Dielektrische Schicht (DE-588)4194257-7 gnd Dünne Schicht (DE-588)4136925-7 gnd Integrierte Schaltung (DE-588)4027242-4 gnd Hochleistungskeramik (DE-588)4392837-7 gnd |
| topic_facet | Elektrokeramik Oxidkeramik Elektrochemische Reaktion Dielektrische Schicht Dünne Schicht Integrierte Schaltung Hochleistungskeramik Hochschulschrift |
| url | http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=025351945&sequence=000002&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA |
| volume_link | (DE-604)BV035217914 |
| work_keys_str_mv | AT michaelisalexander advancedceramicoxidesforelectronicselectrochemistryspectroscopypropertiesandapplications |