From nuclear physics to semiconductor manufacturing: the making of ion implantation
Gespeichert in:
| Beteiligte Personen: | , |
|---|---|
| Format: | Paper |
| Sprache: | Englisch |
| Veröffentlicht: |
2009
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| Schlagwörter: | |
| ISSN: | 0734-1512 |
Internformat
MARC
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Datensatz im Suchindex
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| spelling | Lécuyer, Christophe Verfasser aut From nuclear physics to semiconductor manufacturing the making of ion implantation Christophe Lécuyer and David C. Brock 2009 txt rdacontent n rdamedia nc rdacarrier Geschichte gnd rswk-swf Ionenimplantation (DE-588)4027606-5 gnd rswk-swf Ionenimplantation (DE-588)4027606-5 s Geschichte z DE-604 Brock, David C. Verfasser aut volume:25 number:3 year:2009 pages:193-217 History and technology Abingdon 25 (2009),3, S. 193 - 217 (DE-604)BV002697814 0734-1512 (DE-600)47030-2 |
| spellingShingle | Lécuyer, Christophe Brock, David C. From nuclear physics to semiconductor manufacturing the making of ion implantation Ionenimplantation (DE-588)4027606-5 gnd |
| subject_GND | (DE-588)4027606-5 |
| title | From nuclear physics to semiconductor manufacturing the making of ion implantation |
| title_auth | From nuclear physics to semiconductor manufacturing the making of ion implantation |
| title_exact_search | From nuclear physics to semiconductor manufacturing the making of ion implantation |
| title_full | From nuclear physics to semiconductor manufacturing the making of ion implantation Christophe Lécuyer and David C. Brock |
| title_fullStr | From nuclear physics to semiconductor manufacturing the making of ion implantation Christophe Lécuyer and David C. Brock |
| title_full_unstemmed | From nuclear physics to semiconductor manufacturing the making of ion implantation Christophe Lécuyer and David C. Brock |
| title_short | From nuclear physics to semiconductor manufacturing |
| title_sort | from nuclear physics to semiconductor manufacturing the making of ion implantation |
| title_sub | the making of ion implantation |
| topic | Ionenimplantation (DE-588)4027606-5 gnd |
| topic_facet | Ionenimplantation |
| work_keys_str_mv | AT lecuyerchristophe fromnuclearphysicstosemiconductormanufacturingthemakingofionimplantation AT brockdavidc fromnuclearphysicstosemiconductormanufacturingthemakingofionimplantation |