Semiconductor process modeling:
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Bibliographic Details
Main Authors: Joppich, Wolfgang (Author), Mijalković, Slobodan (Author)
Format: Book
Language:Undetermined
Published: Sankt Augustin GMD - Forschungszentrum Informationstechnik 1997
Series:Arbeitspapiere der GMD 1054
Physical Description:23 S. graph. Darst.
ISSN:0723-0508