Investigation of the physical properties, performance and application of MEMS sensors based on bulk acoustic waves excited in piezoelectric thin film devices:
Gespeichert in:
| Beteilige Person: | |
|---|---|
| Format: | Buch |
| Sprache: | Englisch |
| Veröffentlicht: |
2007
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| Schlagwörter: | |
| Links: | http://opus.bibliothek.uni-augsburg.de/opus4/frontdoor/index/index/docId/571 https://nbn-resolving.org/urn:nbn:de:bvb:384-opus-6401 |
| Beschreibung: | Augsburg, Univ., Diss., 2007 |
| Umfang: | 162 S. Ill., graph. Darst. |
Internformat
MARC
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| 245 | 1 | 0 | |a Investigation of the physical properties, performance and application of MEMS sensors based on bulk acoustic waves excited in piezoelectric thin film devices |c Jan Weber |
| 264 | 1 | |c 2007 | |
| 300 | |a 162 S. |b Ill., graph. Darst. | ||
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Datensatz im Suchindex
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| author | Weber, Jan 1974- |
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| genre_facet | Hochschulschrift |
| id | DE-604.BV023234893 |
| illustrated | Illustrated |
| indexdate | 2024-12-20T13:11:17Z |
| institution | BVB |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-016420530 |
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| physical | 162 S. Ill., graph. Darst. |
| psigel | ebook |
| publishDate | 2007 |
| publishDateSearch | 2007 |
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| spellingShingle | Weber, Jan 1974- Investigation of the physical properties, performance and application of MEMS sensors based on bulk acoustic waves excited in piezoelectric thin film devices Moden (DE-588)4170305-4 gnd MEMS (DE-588)4824724-8 gnd Akustischer Resonator (DE-588)4120857-2 gnd Dünne Schicht (DE-588)4136925-7 gnd Piezoelektrizität (DE-588)4322722-3 gnd |
| subject_GND | (DE-588)4170305-4 (DE-588)4824724-8 (DE-588)4120857-2 (DE-588)4136925-7 (DE-588)4322722-3 (DE-588)4113937-9 |
| title | Investigation of the physical properties, performance and application of MEMS sensors based on bulk acoustic waves excited in piezoelectric thin film devices |
| title_auth | Investigation of the physical properties, performance and application of MEMS sensors based on bulk acoustic waves excited in piezoelectric thin film devices |
| title_exact_search | Investigation of the physical properties, performance and application of MEMS sensors based on bulk acoustic waves excited in piezoelectric thin film devices |
| title_full | Investigation of the physical properties, performance and application of MEMS sensors based on bulk acoustic waves excited in piezoelectric thin film devices Jan Weber |
| title_fullStr | Investigation of the physical properties, performance and application of MEMS sensors based on bulk acoustic waves excited in piezoelectric thin film devices Jan Weber |
| title_full_unstemmed | Investigation of the physical properties, performance and application of MEMS sensors based on bulk acoustic waves excited in piezoelectric thin film devices Jan Weber |
| title_short | Investigation of the physical properties, performance and application of MEMS sensors based on bulk acoustic waves excited in piezoelectric thin film devices |
| title_sort | investigation of the physical properties performance and application of mems sensors based on bulk acoustic waves excited in piezoelectric thin film devices |
| topic | Moden (DE-588)4170305-4 gnd MEMS (DE-588)4824724-8 gnd Akustischer Resonator (DE-588)4120857-2 gnd Dünne Schicht (DE-588)4136925-7 gnd Piezoelektrizität (DE-588)4322722-3 gnd |
| topic_facet | Moden MEMS Akustischer Resonator Dünne Schicht Piezoelektrizität Hochschulschrift |
| url | http://opus.bibliothek.uni-augsburg.de/opus4/frontdoor/index/index/docId/571 https://nbn-resolving.org/urn:nbn:de:bvb:384-opus-6401 |
| work_keys_str_mv | AT weberjan investigationofthephysicalpropertiesperformanceandapplicationofmemssensorsbasedonbulkacousticwavesexcitedinpiezoelectricthinfilmdevices |