Patterning the world: the rise of chemically amplified photoresists
Gespeichert in:
| Beteilige Person: | |
|---|---|
| Format: | Paper |
| Sprache: | Englisch |
| Veröffentlicht: |
2007
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| Schlagwörter: | |
| Umfang: | Ill. |
| ISSN: | 0736-4555 |
Internformat
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Datensatz im Suchindex
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| spelling | Brock, David C. Verfasser aut Patterning the world the rise of chemically amplified photoresists by David C. Brock 2007 Ill. txt rdacontent n rdamedia nc rdacarrier Geschichte gnd rswk-swf Halbleitertechnologie (DE-588)4158814-9 gnd rswk-swf Chemie (DE-588)4009816-3 gnd rswk-swf Halbleitertechnologie (DE-588)4158814-9 s Chemie (DE-588)4009816-3 s Geschichte z DE-604 Chemical heritage / Chemical Heritage Foundation Philadelphia, Pa. 25. 2007/08 (2007),3, S. 26 - 31 (DE-604)BV013333523 0736-4555 (DE-600)1227136-6 |
| spellingShingle | Brock, David C. Patterning the world the rise of chemically amplified photoresists Halbleitertechnologie (DE-588)4158814-9 gnd Chemie (DE-588)4009816-3 gnd |
| subject_GND | (DE-588)4158814-9 (DE-588)4009816-3 |
| title | Patterning the world the rise of chemically amplified photoresists |
| title_auth | Patterning the world the rise of chemically amplified photoresists |
| title_exact_search | Patterning the world the rise of chemically amplified photoresists |
| title_full | Patterning the world the rise of chemically amplified photoresists by David C. Brock |
| title_fullStr | Patterning the world the rise of chemically amplified photoresists by David C. Brock |
| title_full_unstemmed | Patterning the world the rise of chemically amplified photoresists by David C. Brock |
| title_short | Patterning the world |
| title_sort | patterning the world the rise of chemically amplified photoresists |
| title_sub | the rise of chemically amplified photoresists |
| topic | Halbleitertechnologie (DE-588)4158814-9 gnd Chemie (DE-588)4009816-3 gnd |
| topic_facet | Halbleitertechnologie Chemie |
| work_keys_str_mv | AT brockdavidc patterningtheworldtheriseofchemicallyamplifiedphotoresists |