Transmission electron microscopy of silicon VLSI circuits and structures:
Gespeichert in:
| Beteiligte Personen: | , |
|---|---|
| Format: | Buch |
| Sprache: | Englisch |
| Veröffentlicht: |
New York [u.a.]
Wiley
1983
|
| Ausgabe: | 1.print. |
| Schlagwörter: | |
| Umfang: | X, 217 S. überwiegend Ill.u.graph.Darst. |
| ISBN: | 0471092517 |
Internformat
MARC
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| 245 | 1 | 0 | |a Transmission electron microscopy of silicon VLSI circuits and structures |c R.B. Marcus and T.T. Sheng |
| 250 | |a 1.print. | ||
| 264 | 1 | |a New York [u.a.] |b Wiley |c 1983 | |
| 300 | |a X, 217 S. |b überwiegend Ill.u.graph.Darst. | ||
| 336 | |b txt |2 rdacontent | ||
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| 650 | 4 | |a Circuits intégrés | |
| 650 | 4 | |a Microscopes électroniques à transmission | |
| 650 | 4 | |a Microscopie électronique à transmission | |
| 650 | 4 | |a Integrated circuits | |
| 650 | 4 | |a Transmission electron microscopy | |
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| 650 | 0 | 7 | |a Halbleiterbauelement |0 (DE-588)4113826-0 |2 gnd |9 rswk-swf |
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Datensatz im Suchindex
| _version_ | 1818963400028323840 |
|---|---|
| any_adam_object | |
| author | Marcus, Robert B. Sheng, Tan T. |
| author_facet | Marcus, Robert B. Sheng, Tan T. |
| author_role | aut aut |
| author_sort | Marcus, Robert B. |
| author_variant | r b m rb rbm t t s tt tts |
| building | Verbundindex |
| bvnumber | BV021908367 |
| callnumber-first | T - Technology |
| callnumber-label | TK7874 |
| callnumber-raw | TK7874 |
| callnumber-search | TK7874 |
| callnumber-sort | TK 47874 |
| callnumber-subject | TK - Electrical and Nuclear Engineering |
| classification_rvk | WC 3100 |
| ctrlnum | (OCoLC)9324161 (DE-599)BVBBV021908367 |
| dewey-full | 621.3819/5835 621.381/73 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 621 - Applied physics |
| dewey-raw | 621.3819/5835 621.381/73 |
| dewey-search | 621.3819/5835 621.381/73 |
| dewey-sort | 3621.3819 45835 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Biologie Elektrotechnik / Elektronik / Nachrichtentechnik |
| edition | 1.print. |
| format | Book |
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| id | DE-604.BV021908367 |
| illustrated | Illustrated |
| indexdate | 2024-12-20T12:44:37Z |
| institution | BVB |
| isbn | 0471092517 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-015123542 |
| oclc_num | 9324161 |
| open_access_boolean | |
| owner | DE-706 |
| owner_facet | DE-706 |
| physical | X, 217 S. überwiegend Ill.u.graph.Darst. |
| publishDate | 1983 |
| publishDateSearch | 1983 |
| publishDateSort | 1983 |
| publisher | Wiley |
| record_format | marc |
| spelling | Marcus, Robert B. Verfasser aut Transmission electron microscopy of silicon VLSI circuits and structures R.B. Marcus and T.T. Sheng 1.print. New York [u.a.] Wiley 1983 X, 217 S. überwiegend Ill.u.graph.Darst. txt rdacontent sti rdacontent n rdamedia nc rdacarrier Circuits intégrés Microscopes électroniques à transmission Microscopie électronique à transmission Integrated circuits Transmission electron microscopy Mikroskopie (DE-588)4039238-7 gnd rswk-swf Fehlererkennung (DE-588)4133764-5 gnd rswk-swf Siliciumbauelement (DE-588)4181368-6 gnd rswk-swf VLSI (DE-588)4117388-0 gnd rswk-swf Elektronenmikroskopie (DE-588)4014327-2 gnd rswk-swf Halbleiterbauelement (DE-588)4113826-0 gnd rswk-swf Durchstrahlungselektronenmikroskopie (DE-588)4215608-7 gnd rswk-swf Mikroskopie (DE-588)4039238-7 s DE-604 Halbleiterbauelement (DE-588)4113826-0 s Fehlererkennung (DE-588)4133764-5 s Durchstrahlungselektronenmikroskopie (DE-588)4215608-7 s Siliciumbauelement (DE-588)4181368-6 s 1\p DE-604 VLSI (DE-588)4117388-0 s Elektronenmikroskopie (DE-588)4014327-2 s 2\p DE-604 Sheng, Tan T. Verfasser aut 1\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk 2\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk |
| spellingShingle | Marcus, Robert B. Sheng, Tan T. Transmission electron microscopy of silicon VLSI circuits and structures Circuits intégrés Microscopes électroniques à transmission Microscopie électronique à transmission Integrated circuits Transmission electron microscopy Mikroskopie (DE-588)4039238-7 gnd Fehlererkennung (DE-588)4133764-5 gnd Siliciumbauelement (DE-588)4181368-6 gnd VLSI (DE-588)4117388-0 gnd Elektronenmikroskopie (DE-588)4014327-2 gnd Halbleiterbauelement (DE-588)4113826-0 gnd Durchstrahlungselektronenmikroskopie (DE-588)4215608-7 gnd |
| subject_GND | (DE-588)4039238-7 (DE-588)4133764-5 (DE-588)4181368-6 (DE-588)4117388-0 (DE-588)4014327-2 (DE-588)4113826-0 (DE-588)4215608-7 |
| title | Transmission electron microscopy of silicon VLSI circuits and structures |
| title_auth | Transmission electron microscopy of silicon VLSI circuits and structures |
| title_exact_search | Transmission electron microscopy of silicon VLSI circuits and structures |
| title_full | Transmission electron microscopy of silicon VLSI circuits and structures R.B. Marcus and T.T. Sheng |
| title_fullStr | Transmission electron microscopy of silicon VLSI circuits and structures R.B. Marcus and T.T. Sheng |
| title_full_unstemmed | Transmission electron microscopy of silicon VLSI circuits and structures R.B. Marcus and T.T. Sheng |
| title_short | Transmission electron microscopy of silicon VLSI circuits and structures |
| title_sort | transmission electron microscopy of silicon vlsi circuits and structures |
| topic | Circuits intégrés Microscopes électroniques à transmission Microscopie électronique à transmission Integrated circuits Transmission electron microscopy Mikroskopie (DE-588)4039238-7 gnd Fehlererkennung (DE-588)4133764-5 gnd Siliciumbauelement (DE-588)4181368-6 gnd VLSI (DE-588)4117388-0 gnd Elektronenmikroskopie (DE-588)4014327-2 gnd Halbleiterbauelement (DE-588)4113826-0 gnd Durchstrahlungselektronenmikroskopie (DE-588)4215608-7 gnd |
| topic_facet | Circuits intégrés Microscopes électroniques à transmission Microscopie électronique à transmission Integrated circuits Transmission electron microscopy Mikroskopie Fehlererkennung Siliciumbauelement VLSI Elektronenmikroskopie Halbleiterbauelement Durchstrahlungselektronenmikroskopie |
| work_keys_str_mv | AT marcusrobertb transmissionelectronmicroscopyofsiliconvlsicircuitsandstructures AT shengtant transmissionelectronmicroscopyofsiliconvlsicircuitsandstructures |