Verfügbarkeit: Passive triggering of a high power hollow cathode EUV lamp for lithography

Passive triggering of a high power hollow cathode EUV lamp for lithography:

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Bibliographische Detailangaben
Beteilige Person:	Smith, Christopher Sydney 1974- (VerfasserIn)
Format:	Hochschulschrift/Dissertation Buch
Sprache:	Englisch
Veröffentlicht:	Aachen Shaker 2006
Schriftenreihe:	Berichte aus der Physik
Schlagwörter:	Extremes Ultraviolett Lithografie > Halbleitertechnologie Hohlkathodenentladung Pinch Hochschulschrift
Links:	http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=014913331&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA
Umfang:	150 S. Ill., graph. Darst. 21 cm, 225 gr.
ISBN:	3832249109

Internformat

MARC


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Datensatz im Suchindex

DE-BY-TUM_call_number	0001 2006 A 7478
DE-BY-TUM_katkey	1560325
DE-BY-TUM_location	Mag
DE-BY-TUM_media_number	040006246937
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adam_text	PASSIVE TRIGGERING OF A HIGH-POWER HOLLOW-CATHODE EUV LAMP FOR LITHOGRAPHY VON DER FAKULTAT FUR MASCHINENWESEN DER RHEINISCH-WESTFALISCHEN TECHNISCHEN HOCHSCHULE AACHEN ZUR ERLANGUNG DES AKADEMISCHEN GRADES EINES DOKTORS DER NATURWISSENSCHAFTEN GENEHMIGTE DISSERTATION VORGELEGT VON CHRISTOPHER SYDNEY SMITH M.SC. AUS SHEFFIELD, ENGLAND BERICHTER: UNIV.-PROF. DR.RER.NAT. REINHART POPRAWE MA UNIV.-PROF. DR.-LNG. KURT KUGELER TAG DER MUNDLICHEN PRIIFUNG: 16. AUGUST 2005 CONTENTS 1. INTRODUCTION 9 1.1. MICROPROCESSOR PRODUCTION 9 1.2. MOTIVATION 11 1.3. CURRENT TECHNOLOGY FOR EUV RADIATION 14 1.3.1. PLASMA SOURCES - GENERAL 14 1.3.2. LASER PRODUCED PLASMA SOURCES 14 1.3.3. CAPILLARY DISCHARGE SOURCES 15 1.3.4. Z-PINCH 16 1.3.5. PLASMA FOCUS 17 1.3.6. STAR PINCH 19 1.3.7. SYNCHROTRON RADIATION 19 1.3.8. THE HOLLOW-CATHODE TRIGGERED DISCHARGE 21 1.4. SOURCE SELECTION AND OBJECTIVES 21 2. THEORY 25 2.1. ELECTRICAL DISCHARGES 25 2.2. HOLLOW CATHODE DISCHARGES 30 2.2.1. TOWNSEND PHASE 33 2.2.2. HOLLOW-CATHODE PHASE 35 2.2.3. BOTTLENECK PHASE 38 2.3.4. HIGH-CURRENT PHASE AND PINCH FORMATION 39 3. TRIGGERING THE HC DISCHARGE 43 3.1. A LITERATURE REVIEW 44 3.1.1. GLOW-DISCHARGE TRIGGERING 44 3.1.2. DISCHARGE TRIGGERING WITH BLOCKING ELECTRODES 48 3.1.3. DIELECTRIC TRIGGER 51 3.1.4. UV FLASH-LAMP TRIGGER 53 3.2. FURTHER TRIGGERING CONCEPTS 55 3.2.1. THE PASSIVE TRIGGERING CONCEPT 55 3.2.2. MICROWAVE TRIGGERING 57 3.2.3. LASER TRIGGER 58 3.3. DISCUSSION 58 4. THE PASSIVE-TRIGGERED LAMP 63 4.1. DEMANDS ON THE TRIGGER FOR A HIGH-POWER LAMP 63 4.2. FUNCTION OF THE TRIGGER 64 4.2.1. INTRODUCTION 64 4.2.2. TRIGGERED OPERATION 66 4.2.3. COMPARISON OF POSSIBLE ELECTRODES 68 4.2.4. IDENTIFICATION OF THE LIMITING FACTOR 73 4.3. FREQUENCY SCALING OF THE HCT LAMP 76 4.3.1. CHARGING TIME - TD, KGE 76 4.3.2. TRIGGER DELAY TIME - T IGN 78 4.3.3. RECOVERY TIME - T REC 80 4.3.4. WORKING GAS 83 4.4. EFFICIENCY SCALING OF THE HCT LAMP 85 4.4.1. ENERGY LOSS 87 4.4.2. TRIGGER GLOW 88 4.4.3. TRIGGER DISCHARGE 91 4.4.4. DISCUSSION 94 4.5. INPUT POWER SCALING OF THE PASSIVE-TRIGGERED SYSTEM 96 4.5.1. COOLING 96 5. LIFETIME 99 5.1. METALLISATION 99 5.2. INCREASING THE LIFETIME OF THE TRIGGER 101 5.2.1. ON OR OFF-AXIS 101 5.2.2. RESULTS 103 6. STABILITY 105 7. PERSPECTIVES 119 7.1. ACTIVE-PASSIVE TRIGGER 119 7.2. THE NEED FOR A HOLLOW CATHODE 122 8. SUMMARY AND CONCLUSIONS 129 9. APPENDIX 135 9.1. PASCHEN SLAW 135 9.2. ADDITIONS AND CALCULATIONS 137 9.2.1. THE MEAN FREE PATH OF AN ELECTRON IN XE AT 15 PA 137 9.2.2. THE MAXIMUM SPEED OF A XE ION IN A 3 KV FIELD 137 9.2.3. THE MEAN FREE PATH OF A XENON ION IN XE AT 15 PA 138 9.3. PLASMA DECAY 138 10. LITERATURE LIST 143
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author	Smith, Christopher Sydney 1974-
author_GND	(DE-588)13145949X
author_facet	Smith, Christopher Sydney 1974-
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building	Verbundindex
bvnumber	BV021699370
ctrlnum	(OCoLC)179826629 (DE-599)BVBBV021699370
discipline	Physik
format	Thesis Book
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genre	(DE-588)4113937-9 Hochschulschrift gnd-content
genre_facet	Hochschulschrift
id	DE-604.BV021699370
illustrated	Illustrated
indexdate	2024-12-20T12:39:41Z
institution	BVB
isbn	3832249109
language	English
oai_aleph_id	oai:aleph.bib-bvb.de:BVB01-014913331
oclc_num	179826629
open_access_boolean
owner	DE-91 DE-BY-TUM DE-29T
owner_facet	DE-91 DE-BY-TUM DE-29T
physical	150 S. Ill., graph. Darst. 21 cm, 225 gr.
publishDate	2006
publishDateSearch	2006
publishDateSort	2006
publisher	Shaker
record_format	marc
series2	Berichte aus der Physik
spellingShingle	Smith, Christopher Sydney 1974- Passive triggering of a high power hollow cathode EUV lamp for lithography Extremes Ultraviolett (DE-588)4264163-9 gnd Lithografie Halbleitertechnologie (DE-588)4191584-7 gnd Hohlkathodenentladung (DE-588)4160439-8 gnd Pinch (DE-588)4275535-9 gnd
subject_GND	(DE-588)4264163-9 (DE-588)4191584-7 (DE-588)4160439-8 (DE-588)4275535-9 (DE-588)4113937-9
title	Passive triggering of a high power hollow cathode EUV lamp for lithography
title_alt	Passive triggering of a high-power hollow-cathode EUV lamp for lithography
title_auth	Passive triggering of a high power hollow cathode EUV lamp for lithography
title_exact_search	Passive triggering of a high power hollow cathode EUV lamp for lithography
title_full	Passive triggering of a high power hollow cathode EUV lamp for lithography Christopher Sydney Smith
title_fullStr	Passive triggering of a high power hollow cathode EUV lamp for lithography Christopher Sydney Smith
title_full_unstemmed	Passive triggering of a high power hollow cathode EUV lamp for lithography Christopher Sydney Smith
title_short	Passive triggering of a high power hollow cathode EUV lamp for lithography
title_sort	passive triggering of a high power hollow cathode euv lamp for lithography
topic	Extremes Ultraviolett (DE-588)4264163-9 gnd Lithografie Halbleitertechnologie (DE-588)4191584-7 gnd Hohlkathodenentladung (DE-588)4160439-8 gnd Pinch (DE-588)4275535-9 gnd
topic_facet	Extremes Ultraviolett Lithografie Halbleitertechnologie Hohlkathodenentladung Pinch Hochschulschrift
url	http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=014913331&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA
work_keys_str_mv	AT smithchristophersydney passivetriggeringofahighpowerhollowcathodeeuvlampforlithography

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