Optical microscanners and microspectrometers using thermal bimorph actuators:
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Bibliographic Details
Main Author: Lammel, Gerhard (Author)
Format: Book
Language:English
Published: Boston Kluwer Academic 2002
Series:Microsystems 8
Subjects:
Item Description:Includes bibliographical references (p. 229-253) and index
Physical Description:xii, 268 p. ill. : 25 cm
ISBN:0792376552