Verfügbarkeit: Closed loop control of III - V semiconductor growth by combined spectroscopic ellipsometry and reflectance difference spectroscopy

Closed loop control of III - V semiconductor growth by combined spectroscopic ellipsometry and reflectance difference spectroscopy:

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Bibliographische Detailangaben
Beteilige Person:	Ebert, Martin (VerfasserIn)
Format:	Hochschulschrift/Dissertation Buch
Sprache:	Englisch
Veröffentlicht:	Berlin Wiss.-und-Technik-Verl. 2001
Ausgabe:	1. Aufl.
Schlagwörter:	Ellipsometrie Reflexionsspektroskopie Kristallwachstum MOCVD-Verfahren Drei-Fünf-Halbleiter Hochschulschrift
Links:	http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=009420039&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA
Umfang:	IX, 99 S. Ill., graph. Darst. : 21 cm
ISBN:	3896853686

Internformat

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Datensatz im Suchindex

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physical	IX, 99 S. Ill., graph. Darst. : 21 cm
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publisher	Wiss.-und-Technik-Verl.
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spelling	Ebert, Martin Verfasser aut Closed loop control of III - V semiconductor growth by combined spectroscopic ellipsometry and reflectance difference spectroscopy Martin Ebert 1. Aufl. Berlin Wiss.-und-Technik-Verl. 2001 IX, 99 S. Ill., graph. Darst. : 21 cm txt rdacontent n rdamedia nc rdacarrier Zugl.: Berlin, Techn. Univ., Diss., 2000 Ellipsometrie (DE-588)4152025-7 gnd rswk-swf Reflexionsspektroskopie (DE-588)4177339-1 gnd rswk-swf Kristallwachstum (DE-588)4123579-4 gnd rswk-swf MOCVD-Verfahren (DE-588)4314628-4 gnd rswk-swf Drei-Fünf-Halbleiter (DE-588)4150649-2 gnd rswk-swf (DE-588)4113937-9 Hochschulschrift gnd-content Drei-Fünf-Halbleiter (DE-588)4150649-2 s MOCVD-Verfahren (DE-588)4314628-4 s Kristallwachstum (DE-588)4123579-4 s Ellipsometrie (DE-588)4152025-7 s Reflexionsspektroskopie (DE-588)4177339-1 s DE-604 DNB Datenaustausch application/pdf http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=009420039&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA Inhaltsverzeichnis
spellingShingle	Ebert, Martin Closed loop control of III - V semiconductor growth by combined spectroscopic ellipsometry and reflectance difference spectroscopy Ellipsometrie (DE-588)4152025-7 gnd Reflexionsspektroskopie (DE-588)4177339-1 gnd Kristallwachstum (DE-588)4123579-4 gnd MOCVD-Verfahren (DE-588)4314628-4 gnd Drei-Fünf-Halbleiter (DE-588)4150649-2 gnd
subject_GND	(DE-588)4152025-7 (DE-588)4177339-1 (DE-588)4123579-4 (DE-588)4314628-4 (DE-588)4150649-2 (DE-588)4113937-9
title	Closed loop control of III - V semiconductor growth by combined spectroscopic ellipsometry and reflectance difference spectroscopy
title_auth	Closed loop control of III - V semiconductor growth by combined spectroscopic ellipsometry and reflectance difference spectroscopy
title_exact_search	Closed loop control of III - V semiconductor growth by combined spectroscopic ellipsometry and reflectance difference spectroscopy
title_full	Closed loop control of III - V semiconductor growth by combined spectroscopic ellipsometry and reflectance difference spectroscopy Martin Ebert
title_fullStr	Closed loop control of III - V semiconductor growth by combined spectroscopic ellipsometry and reflectance difference spectroscopy Martin Ebert
title_full_unstemmed	Closed loop control of III - V semiconductor growth by combined spectroscopic ellipsometry and reflectance difference spectroscopy Martin Ebert
title_short	Closed loop control of III - V semiconductor growth by combined spectroscopic ellipsometry and reflectance difference spectroscopy
title_sort	closed loop control of iii v semiconductor growth by combined spectroscopic ellipsometry and reflectance difference spectroscopy
topic	Ellipsometrie (DE-588)4152025-7 gnd Reflexionsspektroskopie (DE-588)4177339-1 gnd Kristallwachstum (DE-588)4123579-4 gnd MOCVD-Verfahren (DE-588)4314628-4 gnd Drei-Fünf-Halbleiter (DE-588)4150649-2 gnd
topic_facet	Ellipsometrie Reflexionsspektroskopie Kristallwachstum MOCVD-Verfahren Drei-Fünf-Halbleiter Hochschulschrift
url	http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=009420039&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA
work_keys_str_mv	AT ebertmartin closedloopcontrolofiiivsemiconductorgrowthbycombinedspectroscopicellipsometryandreflectancedifferencespectroscopy

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