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Plasma etching for integrated silicon sensor applictions:

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Bibliographic Details
Main Author:	Li, Yuan Xiong (Author)
Format:	Book
Language:	English
Published:	Delft Univ. Press 1995
Subjects:	Detectors Plasma etching Silicium Plasmaätzen Integrierter Sensor Hochschulschrift
Item Description:	Zugl.: Delft, Techn. Univ., Diss., 1995
Physical Description:	XI, 221 S. Ill., graph. Darst.
ISBN:	9040711771

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MARC


LEADER	00000nam a2200000 c 4500
001	BV010706131
003	DE-604
005	19960923
007	t\|
008	960412s1995 xx ad\|\| m\|\|\| 00\|\|\| engod
020			\|a 9040711771 \|9 90-407-1177-1
035			\|a (OCoLC)34556198
035			\|a (DE-599)BVBBV010706131
040			\|a DE-604 \|b ger \|e rakddb
041	0		\|a eng
049			\|a DE-91
050		0	\|a TK7874
084			\|a ELT 285d \|2 stub
100	1		\|a Li, Yuan Xiong \|e Verfasser \|4 aut
245	1	0	\|a Plasma etching for integrated silicon sensor applictions \|c door Yuan Xiong Li
264		1	\|a Delft \|b Univ. Press \|c 1995
300			\|a XI, 221 S. \|b Ill., graph. Darst.
336			\|b txt \|2 rdacontent
337			\|b n \|2 rdamedia
338			\|b nc \|2 rdacarrier
500			\|a Zugl.: Delft, Techn. Univ., Diss., 1995
650		4	\|a Detectors
650		4	\|a Plasma etching
650	0	7	\|a Silicium \|0 (DE-588)4077445-4 \|2 gnd \|9 rswk-swf
650	0	7	\|a Plasmaätzen \|0 (DE-588)4174821-9 \|2 gnd \|9 rswk-swf
650	0	7	\|a Integrierter Sensor \|0 (DE-588)4235815-2 \|2 gnd \|9 rswk-swf
655		7	\|0 (DE-588)4113937-9 \|a Hochschulschrift \|2 gnd-content
689	0	0	\|a Integrierter Sensor \|0 (DE-588)4235815-2 \|D s
689	0	1	\|a Silicium \|0 (DE-588)4077445-4 \|D s
689	0	2	\|a Plasmaätzen \|0 (DE-588)4174821-9 \|D s
689	0		\|5 DE-604
943	1		\|a oai:aleph.bib-bvb.de:BVB01-007147053

Record in the Search Index

DE-BY-TUM_call_number	0001 95 A 3987
DE-BY-TUM_katkey	735812
DE-BY-TUM_location	Mag
DE-BY-TUM_media_number	040001759711
_version_	1821931079092666370
any_adam_object
author	Li, Yuan Xiong
author_facet	Li, Yuan Xiong
author_role	aut
author_sort	Li, Yuan Xiong
author_variant	y x l yx yxl
building	Verbundindex
bvnumber	BV010706131
callnumber-first	T - Technology
callnumber-label	TK7874
callnumber-raw	TK7874
callnumber-search	TK7874
callnumber-sort	TK 47874
callnumber-subject	TK - Electrical and Nuclear Engineering
classification_tum	ELT 285d
ctrlnum	(OCoLC)34556198 (DE-599)BVBBV010706131
discipline	Elektrotechnik / Elektronik / Nachrichtentechnik
format	Book
fullrecord	<?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>01333nam a2200409 c 4500</leader><controlfield tag="001">BV010706131</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">19960923 </controlfield><controlfield tag="007">t\|</controlfield><controlfield tag="008">960412s1995 xx ad\|\| m\|\|\| 00\|\|\| engod</controlfield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">9040711771</subfield><subfield code="9">90-407-1177-1</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)34556198</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)BVBBV010706131</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield><subfield code="e">rakddb</subfield></datafield><datafield tag="041" ind1="0" ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="049" ind1=" " ind2=" "><subfield code="a">DE-91</subfield></datafield><datafield tag="050" ind1=" " ind2="0"><subfield code="a">TK7874</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">ELT 285d</subfield><subfield code="2">stub</subfield></datafield><datafield tag="100" ind1="1" ind2=" "><subfield code="a">Li, Yuan Xiong</subfield><subfield code="e">Verfasser</subfield><subfield code="4">aut</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Plasma etching for integrated silicon sensor applictions</subfield><subfield code="c">door Yuan Xiong Li</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">Delft</subfield><subfield code="b">Univ. Press</subfield><subfield code="c">1995</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">XI, 221 S.</subfield><subfield code="b">Ill., graph. Darst.</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">n</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">nc</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="500" ind1=" " ind2=" "><subfield code="a">Zugl.: Delft, Techn. Univ., Diss., 1995</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Detectors</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Plasma etching</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Silicium</subfield><subfield code="0">(DE-588)4077445-4</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Plasmaätzen</subfield><subfield code="0">(DE-588)4174821-9</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Integrierter Sensor</subfield><subfield code="0">(DE-588)4235815-2</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="655" ind1=" " ind2="7"><subfield code="0">(DE-588)4113937-9</subfield><subfield code="a">Hochschulschrift</subfield><subfield code="2">gnd-content</subfield></datafield><datafield tag="689" ind1="0" ind2="0"><subfield code="a">Integrierter Sensor</subfield><subfield code="0">(DE-588)4235815-2</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="1"><subfield code="a">Silicium</subfield><subfield code="0">(DE-588)4077445-4</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="2"><subfield code="a">Plasmaätzen</subfield><subfield code="0">(DE-588)4174821-9</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="943" ind1="1" ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-007147053</subfield></datafield></record></collection>
genre	(DE-588)4113937-9 Hochschulschrift gnd-content
genre_facet	Hochschulschrift
id	DE-604.BV010706131
illustrated	Illustrated
indexdate	2024-12-20T09:59:14Z
institution	BVB
isbn	9040711771
language	English
oai_aleph_id	oai:aleph.bib-bvb.de:BVB01-007147053
oclc_num	34556198
open_access_boolean
owner	DE-91 DE-BY-TUM
owner_facet	DE-91 DE-BY-TUM
physical	XI, 221 S. Ill., graph. Darst.
publishDate	1995
publishDateSearch	1995
publishDateSort	1995
publisher	Univ. Press
record_format	marc
spellingShingle	Li, Yuan Xiong Plasma etching for integrated silicon sensor applictions Detectors Plasma etching Silicium (DE-588)4077445-4 gnd Plasmaätzen (DE-588)4174821-9 gnd Integrierter Sensor (DE-588)4235815-2 gnd
subject_GND	(DE-588)4077445-4 (DE-588)4174821-9 (DE-588)4235815-2 (DE-588)4113937-9
title	Plasma etching for integrated silicon sensor applictions
title_auth	Plasma etching for integrated silicon sensor applictions
title_exact_search	Plasma etching for integrated silicon sensor applictions
title_full	Plasma etching for integrated silicon sensor applictions door Yuan Xiong Li
title_fullStr	Plasma etching for integrated silicon sensor applictions door Yuan Xiong Li
title_full_unstemmed	Plasma etching for integrated silicon sensor applictions door Yuan Xiong Li
title_short	Plasma etching for integrated silicon sensor applictions
title_sort	plasma etching for integrated silicon sensor applictions
topic	Detectors Plasma etching Silicium (DE-588)4077445-4 gnd Plasmaätzen (DE-588)4174821-9 gnd Integrierter Sensor (DE-588)4235815-2 gnd
topic_facet	Detectors Plasma etching Silicium Plasmaätzen Integrierter Sensor Hochschulschrift
work_keys_str_mv	AT liyuanxiong plasmaetchingforintegratedsiliconsensorapplictions

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Call Number:	0001 95 A 3987 Floor plan
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