Ion solid interactions: fundamentals and applications
Ion-solid interactions are the foundation that underlies the broad application of ion beams to the modification of materials. This text is designed to cover the fundamentals and applications of ion-solid interactions and is aimed at graduate students and researchers interested in electronic devices,...
Gespeichert in:
| Beteiligte Personen: | , , |
|---|---|
| Format: | Buch |
| Sprache: | Englisch |
| Veröffentlicht: |
Cambridge
Cambridge Univ. Press
1996
|
| Ausgabe: | 1. publ. |
| Schlagwörter: | |
| Zusammenfassung: | Ion-solid interactions are the foundation that underlies the broad application of ion beams to the modification of materials. This text is designed to cover the fundamentals and applications of ion-solid interactions and is aimed at graduate students and researchers interested in electronic devices, surface engineering, reactor and nuclear engineering, and materials science issues associated with metastable phase synthesis |
| Abstract: | Modern technology depends on materials with precisely controlled properties. Ion beams are a favored method to achieve controlled modification of surface and near-surface regions. In every integrated circuit production line, for example, there are ion implantation systems. In addition, in integrated circuit technology, ion beams are used to modify the mechanical, tribological, and chemical properties of metal, intermetallic, and ceramic materials without altering their bulk properties |
| Umfang: | XXVI, 540 S. graph. Darst. |
| ISBN: | 052137376X |
Internformat
MARC
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| 100 | 1 | |a Nastasi, Michael |d 1950- |e Verfasser |0 (DE-588)1059463164 |4 aut | |
| 245 | 1 | 0 | |a Ion solid interactions |b fundamentals and applications |c Michael Nastasi ; James W. Mayer ; James K. Hirvonen |
| 246 | 1 | 3 | |a Ion-solid interactions |
| 250 | |a 1. publ. | ||
| 264 | 1 | |a Cambridge |b Cambridge Univ. Press |c 1996 | |
| 300 | |a XXVI, 540 S. |b graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 520 | 3 | |a Modern technology depends on materials with precisely controlled properties. Ion beams are a favored method to achieve controlled modification of surface and near-surface regions. In every integrated circuit production line, for example, there are ion implantation systems. In addition, in integrated circuit technology, ion beams are used to modify the mechanical, tribological, and chemical properties of metal, intermetallic, and ceramic materials without altering their bulk properties | |
| 520 | |a Ion-solid interactions are the foundation that underlies the broad application of ion beams to the modification of materials. This text is designed to cover the fundamentals and applications of ion-solid interactions and is aimed at graduate students and researchers interested in electronic devices, surface engineering, reactor and nuclear engineering, and materials science issues associated with metastable phase synthesis | ||
| 650 | 7 | |a Ionen |2 gtt | |
| 650 | 7 | |a Vaste stoffen |2 gtt | |
| 650 | 4 | |a Ion bombardment | |
| 650 | 4 | |a Ion implantation |x Industrial applications | |
| 650 | 4 | |a Solids |x Effect of radiation on | |
| 650 | 0 | 7 | |a Festkörper |0 (DE-588)4016918-2 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Ion |0 (DE-588)4027597-8 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Ionenimplantation |0 (DE-588)4027606-5 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Ionenstrahlbearbeitung |0 (DE-588)4277034-8 |2 gnd |9 rswk-swf |
| 689 | 0 | 0 | |a Ionenimplantation |0 (DE-588)4027606-5 |D s |
| 689 | 0 | |5 DE-604 | |
| 689 | 1 | 0 | |a Ionenstrahlbearbeitung |0 (DE-588)4277034-8 |D s |
| 689 | 1 | |5 DE-604 | |
| 689 | 2 | 0 | |a Ion |0 (DE-588)4027597-8 |D s |
| 689 | 2 | 1 | |a Festkörper |0 (DE-588)4016918-2 |D s |
| 689 | 2 | |5 DE-604 | |
| 700 | 1 | |a Mayer, James W. |d 1930-2013 |e Verfasser |0 (DE-588)121494349 |4 aut | |
| 700 | 1 | |a Hirvonen, James K. |e Verfasser |4 aut | |
| 943 | 1 | |a oai:aleph.bib-bvb.de:BVB01-007143099 | |
Datensatz im Suchindex
| DE-BY-TUM_call_number | 0001 96 A 3448 |
|---|---|
| DE-BY-TUM_katkey | 780127 |
| DE-BY-TUM_location | Mag |
| DE-BY-TUM_media_number | 040001906743 |
| _version_ | 1821938835986055168 |
| any_adam_object | |
| author | Nastasi, Michael 1950- Mayer, James W. 1930-2013 Hirvonen, James K. |
| author_GND | (DE-588)1059463164 (DE-588)121494349 |
| author_facet | Nastasi, Michael 1950- Mayer, James W. 1930-2013 Hirvonen, James K. |
| author_role | aut aut aut |
| author_sort | Nastasi, Michael 1950- |
| author_variant | m n mn j w m jw jwm j k h jk jkh |
| building | Verbundindex |
| bvnumber | BV010701558 |
| callnumber-first | Q - Science |
| callnumber-label | QC176 |
| callnumber-raw | QC176.8.R3 |
| callnumber-search | QC176.8.R3 |
| callnumber-sort | QC 3176.8 R3 |
| callnumber-subject | QC - Physics |
| classification_rvk | UP 9300 UP 9350 |
| classification_tum | ELT 280f ELT 293f FER 786f PHY 622f |
| ctrlnum | (OCoLC)32274192 (DE-599)BVBBV010701558 |
| dewey-full | 530.4/16 |
| dewey-hundreds | 500 - Natural sciences and mathematics |
| dewey-ones | 530 - Physics |
| dewey-raw | 530.4/16 |
| dewey-search | 530.4/16 |
| dewey-sort | 3530.4 216 |
| dewey-tens | 530 - Physics |
| discipline | Physik Elektrotechnik / Elektronik / Nachrichtentechnik Werkstoffwissenschaften / Fertigungstechnik |
| edition | 1. publ. |
| format | Book |
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| id | DE-604.BV010701558 |
| illustrated | Illustrated |
| indexdate | 2024-12-20T09:59:09Z |
| institution | BVB |
| isbn | 052137376X |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-007143099 |
| oclc_num | 32274192 |
| open_access_boolean | |
| owner | DE-384 DE-703 DE-91 DE-BY-TUM DE-20 DE-634 DE-83 DE-11 |
| owner_facet | DE-384 DE-703 DE-91 DE-BY-TUM DE-20 DE-634 DE-83 DE-11 |
| physical | XXVI, 540 S. graph. Darst. |
| publishDate | 1996 |
| publishDateSearch | 1996 |
| publishDateSort | 1996 |
| publisher | Cambridge Univ. Press |
| record_format | marc |
| spellingShingle | Nastasi, Michael 1950- Mayer, James W. 1930-2013 Hirvonen, James K. Ion solid interactions fundamentals and applications Ionen gtt Vaste stoffen gtt Ion bombardment Ion implantation Industrial applications Solids Effect of radiation on Festkörper (DE-588)4016918-2 gnd Ion (DE-588)4027597-8 gnd Ionenimplantation (DE-588)4027606-5 gnd Ionenstrahlbearbeitung (DE-588)4277034-8 gnd |
| subject_GND | (DE-588)4016918-2 (DE-588)4027597-8 (DE-588)4027606-5 (DE-588)4277034-8 |
| title | Ion solid interactions fundamentals and applications |
| title_alt | Ion-solid interactions |
| title_auth | Ion solid interactions fundamentals and applications |
| title_exact_search | Ion solid interactions fundamentals and applications |
| title_full | Ion solid interactions fundamentals and applications Michael Nastasi ; James W. Mayer ; James K. Hirvonen |
| title_fullStr | Ion solid interactions fundamentals and applications Michael Nastasi ; James W. Mayer ; James K. Hirvonen |
| title_full_unstemmed | Ion solid interactions fundamentals and applications Michael Nastasi ; James W. Mayer ; James K. Hirvonen |
| title_short | Ion solid interactions |
| title_sort | ion solid interactions fundamentals and applications |
| title_sub | fundamentals and applications |
| topic | Ionen gtt Vaste stoffen gtt Ion bombardment Ion implantation Industrial applications Solids Effect of radiation on Festkörper (DE-588)4016918-2 gnd Ion (DE-588)4027597-8 gnd Ionenimplantation (DE-588)4027606-5 gnd Ionenstrahlbearbeitung (DE-588)4277034-8 gnd |
| topic_facet | Ionen Vaste stoffen Ion bombardment Ion implantation Industrial applications Solids Effect of radiation on Festkörper Ion Ionenimplantation Ionenstrahlbearbeitung |
| work_keys_str_mv | AT nastasimichael ionsolidinteractionsfundamentalsandapplications AT mayerjamesw ionsolidinteractionsfundamentalsandapplications AT hirvonenjamesk ionsolidinteractionsfundamentalsandapplications AT nastasimichael ionsolidinteractions AT mayerjamesw ionsolidinteractions AT hirvonenjamesk ionsolidinteractions |
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Bibliotheksmagazin
| Signatur: |
0001 96 A 3448 Lageplan |
|---|---|
| Exemplar 1 | Ausleihbar Am Standort |