Verfügbarkeit: Surface analysis by electron spectroscopy

Surface analysis by electron spectroscopy: measurement and interpretation

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Bibliographische Detailangaben
Beteilige Person:	Smith, Graham C. (VerfasserIn)
Format:	Buch
Sprache:	Englisch
Veröffentlicht:	New York [u.a.] Plenum Press 1994
Schriftenreihe:	Updates in applied physics and electrical technology
Schlagwörter:	Auger, Effet Spectroscopie de rayons X Surfaces (technologie) - Analyse Auger effect Surface chemistry Surfaces (Technology) > Analysis X-ray spectroscopy Oberflächenanalyse Elektronenspektroskopie
Links:	http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=006719553&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA
Umfang:	XI, 156 S. graph. Darst.
ISBN:	0306448068

Internformat

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Datensatz im Suchindex

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adam_text	IMAGE 1 SURF ACE ANALYSIS BY ELECTRON SPECTROSCOPY MEASUREMENT AND INTERPRETATION GRAHAM C. SMITH SHELL RESEARCH LTD. EHESTER, ENGLAND PLENUM PRESS * NEW YORK AND LONDON IMAGE 2 CONTENTS CHAPTER 1. INTRODUCTION CHAPTER 2. SURFACE ANALYSIS BY ELECTRON SPECTROSCOPY 2.1 SURFACE SENSITIVITY 2.2 X-RAY PHOTOELECTRON SPECTROSCOPY 2.3 AUGER ELECTRON SPECTROSCOPY 2.4 SPECTRAL INTERPRETATION CHAPTER 3. INSTRUMENTAL TECHNIQUES FOR XPS AND AES 3.1 GENERAL REQUIREMENTS 3.2 EXCITATION SOURCES FOR SURFACE ANALYSIS BY XPS AND 3.2.1 X-RAY SOURCES 3.2.2 ELECTRON BEAM SOURCES 3.3 ELECTRON ENERGY ANALYZERS FOR AES AND XPS 3.3.1 CYLINDRICAL MIRROR ANALYZERS 3.3.2 HEMISPHERICAL SECTOR ANALYZERS 3.3.3 MULTICHANNEL DETECTION 3.3.4 ANALYZER CALIBRATION 3.4 RADIATION DAMAGE 3.5 ELECTROSTATIC CHARGING 3.6 MICROANALYSIS AND SPATIAL RESOLUTION IN AES AND XPS 3.6.1 SPATIAL RESOLUTION IN AES 3.6.2 SPATIAL RESOLUTION IN XPS CHAPTER 4. DATA PROCESSING FOR AES AND XPS 4.1 INTRODUCTION IMAGE 3 X CONTENTS 4.2 DATA ACQUISITION AND DISPLAY 42 4.3 SMOOTHING 44 4.4 DECONVOLUTION 44 4.5 BACKGROUND SUBTRACTION 45 4.6 CURVE FITTING 47 4.7 DIFFERENCE SPECTRA 49 4.8 DIFFERENTIATION 49 4.9 FACTOR ANALYSIS 50 4.10 IMAGE PROCESSING AND MULTI-SPECTRAL IMAGING 51 CHAPTER 5. QUANTIFICATION OF DATA FROM HOMOGENEOUS MATERIALS 5.1 THE GENERAL APPROACH TO QUANTIFICATION 53 5.2 STATISTICAL TREATMENT OF CUMULATIVE ERRORS 54 5.3 ATTENUATION LENGTHS IN ELECTRON SPECTROSCOPY 58 5.4 ACCURATE QUANTIFICATION IN XPS 61 5.4.1 CALCULATIONS OF INTENSITY 61 5.4.2 ACCURATE RELATIVE SENSITIVITY FACTORS 64 5.4.3 THE MEASUREMENT OF INTENSITY 65 5.5 ACCURATE QUANTIFICATION IN AES 65 5.5.1 USE OF DIRECT OR DERIVATIVE SPECTRA IN AES 65 5.5.2 CALCULATIONS OF AUGER INTENSITIES 69 5.5.3 MATRIX FACTORS 70 CHAPTER 6. STRUCTUERAL INFORMATION FROM INHOMOGENEOUS SAMPLES 6.1 ARGON ION SPUTTERING 75 6.2 NON-DESTRUCTIVE DEPTH PROFILING BY ELECTRON 85 SPECTROSCOPY 6.2.1 INFORMATION FROM SIMPLE OVERLAYERS 86 6.2.2 STRUCTURAL INFORMATION FROM ANGLE-DEPENDENT XPS 88 6.2.3 PEAK TO BACKGROUND RATIO METHODS 90 6.2.4 STUDIES OF ROUGH OR RANDOM SAMPLES 91 CHAPTER 7. TRENDS IN SURFACE ANALYSIS 7.1 INTRODUCTION 93 IMAGE 4 CONTENTS 7.2 TRENDS IN SURFACE ANALYSIS BY XPS AND AES 7.3 A COMPARISON OF AES AND XPS WITH ALTERNATIVE METHODS OF SURFACE ANALYSIS 7.3.1 SECONDARY ION MASS SPECTROMETRY 7.3.2 ION SCATTERING SPECTROSCOPY (ISS) 7.3.3 ELECTRON PROBE MICROANALYSIS (EPMA) 7.3.4 REFLECTION ABSORPTION INFRA-RED SPECTROSCOPY (RAIRS) AND DIFFUSE REFLECTION INFRA-RED FOURIER TRANSFORM SPECTROSCOPY (DRIFTS) REFERENCES SELECTED ABSTRACTS INDEX
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id	DE-604.BV010119308
illustrated	Illustrated
indexdate	2024-12-20T09:48:20Z
institution	BVB
isbn	0306448068
language	English
oai_aleph_id	oai:aleph.bib-bvb.de:BVB01-006719553
oclc_num	31242869
open_access_boolean
owner	DE-703 DE-355 DE-BY-UBR DE-91 DE-BY-TUM DE-11
owner_facet	DE-703 DE-355 DE-BY-UBR DE-91 DE-BY-TUM DE-11
physical	XI, 156 S. graph. Darst.
publishDate	1994
publishDateSearch	1994
publishDateSort	1994
publisher	Plenum Press
record_format	marc
series2	Updates in applied physics and electrical technology
spellingShingle	Smith, Graham C. Surface analysis by electron spectroscopy measurement and interpretation Auger, Effet ram Spectroscopie de rayons X ram Surfaces (technologie) - Analyse ram Auger effect Surface chemistry Surfaces (Technology) Analysis X-ray spectroscopy Oberflächenanalyse (DE-588)4172243-7 gnd Elektronenspektroskopie (DE-588)4014332-6 gnd
subject_GND	(DE-588)4172243-7 (DE-588)4014332-6
title	Surface analysis by electron spectroscopy measurement and interpretation
title_auth	Surface analysis by electron spectroscopy measurement and interpretation
title_exact_search	Surface analysis by electron spectroscopy measurement and interpretation
title_full	Surface analysis by electron spectroscopy measurement and interpretation Graham C. Smith
title_fullStr	Surface analysis by electron spectroscopy measurement and interpretation Graham C. Smith
title_full_unstemmed	Surface analysis by electron spectroscopy measurement and interpretation Graham C. Smith
title_short	Surface analysis by electron spectroscopy
title_sort	surface analysis by electron spectroscopy measurement and interpretation
title_sub	measurement and interpretation
topic	Auger, Effet ram Spectroscopie de rayons X ram Surfaces (technologie) - Analyse ram Auger effect Surface chemistry Surfaces (Technology) Analysis X-ray spectroscopy Oberflächenanalyse (DE-588)4172243-7 gnd Elektronenspektroskopie (DE-588)4014332-6 gnd
topic_facet	Auger, Effet Spectroscopie de rayons X Surfaces (technologie) - Analyse Auger effect Surface chemistry Surfaces (Technology) Analysis X-ray spectroscopy Oberflächenanalyse Elektronenspektroskopie
url	http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=006719553&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA
work_keys_str_mv	AT smithgrahamc surfaceanalysisbyelectronspectroscopymeasurementandinterpretation

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