Verfügbarkeit: The materials science of microelectronics

The materials science of microelectronics:

Gespeichert in:

Bibliographische Detailangaben
Beteilige Person:	Bachmann, Klaus J. (VerfasserIn)
Format:	Buch
Sprache:	Englisch
Veröffentlicht:	New York, NY [u.a.] VCH 1995
Schlagwörter:	Materiaalkunde Micro-elektronica Materials > Electric properties Microelectronics > Materials Semiconductors Mikroelektronik Werkstoff
Links:	http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=006711566&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA
Umfang:	VIII, 541 S. zahlr. Ill. und graph. Darst.
ISBN:	0895732807

Internformat

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Datensatz im Suchindex

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adam_text	IMAGE 1 CONTENTS INTRODUCTION THE ELECTRONIC STRUCTURE OF ATOMS AND MOLECULES 17 2.1 EARLY CONCEPTS OF ATOMIC STRUCTURE AND BONDING 17 2.2 ELEMENTS OF QUANTUM MECHANICS 21 2.3 ATOMIC WAVE FUNCTIONS AND ENERGY EIGENVALUES 27 2.4 MOLECULAR WAVE FUNCTIONS AND ENERGY EIGENVALUES 32 2.5 MOLECULAR SYMMETRY 47 THE ELECTRONIC STRUCTURE OF CRYSTALLINE SOLIDS 69 3.1 THE STRUCTURE AND SYMMETRY OF CRYSTALS 69 3.2 ENERGY BANDS 90 3.3 DEFECTS IN CRYSTALLINE SOLIDS 109 3.4 CRYSTAL SURFACES 126 SEMICONDUCTOR DEVICES AND CIRCUITS 149 4.1 P-N JUNCTIONS 149 4.2 BIPOLAR TRANSISTORS 162 4.3 MIS CAPACITORS AND FIELD-EFFECT TRANSISTORS 167 4.4 A CMOS PROCESSING SEQUENCE 177 4.5 MICROWAVE DEVICES 180 4.6 CONFINED HETEROSTRUCTURES 185 IMAGE 2 5. CRYSTAL GROWTH 201 5.1 MATERIALS PURIFICATION AND SYNTHESIS 201 5.2 EQUILIBRIUM CONDITIONS AND KINETIC LIMITATIONS OF GROWTH 227 5.3 THE FABRICATION OF SUBSTRATE CRYSTALS 243 6. EPITAXY AND DIELECTRIC DEPOSITION 285 6.1 CHEMICAL VAPOR DEPOSITION AT ATMOSPHERIC PRESSURE 285 6.2 LOW-PRESSURE AND PLASMA-ENHANCED VAPOR DEPOSITION 304 6.3 ORGANOMETALLIC CHEMICAL VAPOR DEPOSITION 316 6.4 MOLECULAR BEAM EPITAXY AND CHEMICAL BEAM EPITAXY 331 7. PATTERN DEFINITION AND ETCHING 351 7.1 PHOTOLITHOGRAPHIC PATTERN DEFINITION 351 7.2 ULTRAHIGH-RESOLUTION PATTERNING 358 7.3 WET ETCHING 371 7.4 DRY ETCHING 384 8. OXIDATION, DOPING, AND METALLIZATION 405 8.1 THERMAL OXIDATION AND DIELECTRIC ISOLATION OF SILICON 405 8.2 DOPING BY ION IMPLANTATION AND DIFFUSION 427 8.3 NATIVE OXIDES ON III-V SURFACES 454 8.4 SCHOTTKY BARRIERS 470 8.5 OHMIC CONTACTS AND INTERCONNECTS 483 9. OPTICAL ELECTRONICS 503 APPENDIX A: LIST OF ABBREVIATIONS 517 APPENDIX B: SELECTED TABLES 521 SUBJECT INDEX 527
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author	Bachmann, Klaus J.
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discipline	Chemie / Pharmazie Physik Elektrotechnik / Elektronik / Nachrichtentechnik
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id	DE-604.BV010108366
illustrated	Illustrated
indexdate	2024-12-20T09:48:08Z
institution	BVB
isbn	0895732807
language	English
oai_aleph_id	oai:aleph.bib-bvb.de:BVB01-006711566
oclc_num	27934649
open_access_boolean
owner	DE-703 DE-355 DE-BY-UBR DE-29T DE-91G DE-BY-TUM DE-92 DE-384 DE-Aug4 DE-19 DE-BY-UBM DE-634 DE-522 DE-83 DE-11 DE-188
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physical	VIII, 541 S. zahlr. Ill. und graph. Darst.
publishDate	1995
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publisher	VCH
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spellingShingle	Bachmann, Klaus J. The materials science of microelectronics Materiaalkunde gtt Micro-elektronica gtt Materials Electric properties Microelectronics Materials Semiconductors Mikroelektronik (DE-588)4039207-7 gnd Werkstoff (DE-588)4065579-9 gnd
subject_GND	(DE-588)4039207-7 (DE-588)4065579-9
title	The materials science of microelectronics
title_auth	The materials science of microelectronics
title_exact_search	The materials science of microelectronics
title_full	The materials science of microelectronics Klaus J. Bachmann
title_fullStr	The materials science of microelectronics Klaus J. Bachmann
title_full_unstemmed	The materials science of microelectronics Klaus J. Bachmann
title_short	The materials science of microelectronics
title_sort	the materials science of microelectronics
topic	Materiaalkunde gtt Micro-elektronica gtt Materials Electric properties Microelectronics Materials Semiconductors Mikroelektronik (DE-588)4039207-7 gnd Werkstoff (DE-588)4065579-9 gnd
topic_facet	Materiaalkunde Micro-elektronica Materials Electric properties Microelectronics Materials Semiconductors Mikroelektronik Werkstoff
url	http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=006711566&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA
work_keys_str_mv	AT bachmannklausj thematerialsscienceofmicroelectronics

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