Transmission electron microscopy of silicon VLSI circuits and structures:
Gespeichert in:
| Beteiligte Personen: | , |
|---|---|
| Format: | Buch |
| Sprache: | Englisch |
| Veröffentlicht: |
New York [u.a.]
Wiley
1983
|
| Schriftenreihe: | A Wiley-Interscience publication
|
| Schlagwörter: | |
| Beschreibung: | Literaturverzeichnis Seite 211 - 213 |
| Umfang: | X, 217 Seiten Illustrationen, Diagramme |
| ISBN: | 0471092517 |
Internformat
MARC
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| 100 | 1 | |a Marcus, Robert B. |e Verfasser |4 aut | |
| 245 | 1 | 0 | |a Transmission electron microscopy of silicon VLSI circuits and structures |c R. B. Marcus and T. T. Sheng |
| 264 | 1 | |a New York [u.a.] |b Wiley |c 1983 | |
| 300 | |a X, 217 Seiten |b Illustrationen, Diagramme | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 490 | 0 | |a A Wiley-Interscience publication | |
| 500 | |a Literaturverzeichnis Seite 211 - 213 | ||
| 650 | 4 | |a Circuits intégrés | |
| 650 | 4 | |a Microscopes électroniques à transmission | |
| 650 | 4 | |a Microscopie électronique à transmission | |
| 650 | 4 | |a Integrated circuits | |
| 650 | 4 | |a Transmission electron microscopy | |
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Datensatz im Suchindex
| DE-BY-TUM_call_number | 0001 84 B 232 |
|---|---|
| DE-BY-TUM_katkey | 212000 |
| DE-BY-TUM_location | Mag |
| DE-BY-TUM_media_number | 040001477618 |
| _version_ | 1821934632644378624 |
| any_adam_object | |
| author | Marcus, Robert B. Sheng, Tan T. |
| author_facet | Marcus, Robert B. Sheng, Tan T. |
| author_role | aut aut |
| author_sort | Marcus, Robert B. |
| author_variant | r b m rb rbm t t s tt tts |
| building | Verbundindex |
| bvnumber | BV002033180 |
| callnumber-first | T - Technology |
| callnumber-label | TK7874 |
| callnumber-raw | TK7874 |
| callnumber-search | TK7874 |
| callnumber-sort | TK 47874 |
| callnumber-subject | TK - Electrical and Nuclear Engineering |
| classification_rvk | WC 3100 |
| classification_tum | ELT 355 |
| ctrlnum | (OCoLC)9324161 (DE-599)BVBBV002033180 |
| dewey-full | 621.381/73 621.3819/5835 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 621 - Applied physics |
| dewey-raw | 621.381/73 621.3819/5835 |
| dewey-search | 621.381/73 621.3819/5835 |
| dewey-sort | 3621.381 273 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Biologie Elektrotechnik / Elektronik / Nachrichtentechnik |
| format | Book |
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| id | DE-604.BV002033180 |
| illustrated | Illustrated |
| indexdate | 2024-12-20T07:45:03Z |
| institution | BVB |
| isbn | 0471092517 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-001329040 |
| oclc_num | 9324161 |
| open_access_boolean | |
| owner | DE-91 DE-BY-TUM DE-739 DE-29T DE-83 |
| owner_facet | DE-91 DE-BY-TUM DE-739 DE-29T DE-83 |
| physical | X, 217 Seiten Illustrationen, Diagramme |
| psigel | TUB-nveb |
| publishDate | 1983 |
| publishDateSearch | 1983 |
| publishDateSort | 1983 |
| publisher | Wiley |
| record_format | marc |
| series2 | A Wiley-Interscience publication |
| spellingShingle | Marcus, Robert B. Sheng, Tan T. Transmission electron microscopy of silicon VLSI circuits and structures Circuits intégrés Microscopes électroniques à transmission Microscopie électronique à transmission Integrated circuits Transmission electron microscopy Siliciumbauelement (DE-588)4181368-6 gnd VLSI (DE-588)4117388-0 gnd Halbleiterbauelement (DE-588)4113826-0 gnd Mikroskopie (DE-588)4039238-7 gnd Durchstrahlungselektronenmikroskopie (DE-588)4215608-7 gnd Fehlererkennung (DE-588)4133764-5 gnd Elektronenmikroskopie (DE-588)4014327-2 gnd |
| subject_GND | (DE-588)4181368-6 (DE-588)4117388-0 (DE-588)4113826-0 (DE-588)4039238-7 (DE-588)4215608-7 (DE-588)4133764-5 (DE-588)4014327-2 |
| title | Transmission electron microscopy of silicon VLSI circuits and structures |
| title_auth | Transmission electron microscopy of silicon VLSI circuits and structures |
| title_exact_search | Transmission electron microscopy of silicon VLSI circuits and structures |
| title_full | Transmission electron microscopy of silicon VLSI circuits and structures R. B. Marcus and T. T. Sheng |
| title_fullStr | Transmission electron microscopy of silicon VLSI circuits and structures R. B. Marcus and T. T. Sheng |
| title_full_unstemmed | Transmission electron microscopy of silicon VLSI circuits and structures R. B. Marcus and T. T. Sheng |
| title_short | Transmission electron microscopy of silicon VLSI circuits and structures |
| title_sort | transmission electron microscopy of silicon vlsi circuits and structures |
| topic | Circuits intégrés Microscopes électroniques à transmission Microscopie électronique à transmission Integrated circuits Transmission electron microscopy Siliciumbauelement (DE-588)4181368-6 gnd VLSI (DE-588)4117388-0 gnd Halbleiterbauelement (DE-588)4113826-0 gnd Mikroskopie (DE-588)4039238-7 gnd Durchstrahlungselektronenmikroskopie (DE-588)4215608-7 gnd Fehlererkennung (DE-588)4133764-5 gnd Elektronenmikroskopie (DE-588)4014327-2 gnd |
| topic_facet | Circuits intégrés Microscopes électroniques à transmission Microscopie électronique à transmission Integrated circuits Transmission electron microscopy Siliciumbauelement VLSI Halbleiterbauelement Mikroskopie Durchstrahlungselektronenmikroskopie Fehlererkennung Elektronenmikroskopie |
| work_keys_str_mv | AT marcusrobertb transmissionelectronmicroscopyofsiliconvlsicircuitsandstructures AT shengtant transmissionelectronmicroscopyofsiliconvlsicircuitsandstructures |
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Bibliotheksmagazin
| Signatur: |
0001 84 B 232
Lageplan |
|---|---|
| Exemplar 1 | Ausleihbar Am Standort |