Electrochemical etching strategy for shaping monolithic 3D structures from 4H-SiC wafers - Hochreiter, André; Groß, Fabian; Möller, Morris-Niklas; Krieger, Michael; Weber, Heiko B. (Friedrich-Alexander-Universität Erlangen-Nürnberg, 2023)
Keywords: Engineering.; Science.; Life sciences.; Psychology.; Computer science.; Technology and Engineering.; Physical Sciences.; Life Sciences.; Behavioral Sciences and Psychology.; Computer Science.