MEMS applications in electronics and engineering:
Gespeichert in:
Weitere beteiligte Personen: | , , , |
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Format: | Elektronisch E-Book |
Sprache: | Englisch |
Veröffentlicht: |
Melville, New York
AIP Publishing
2023
|
Ausgabe: | First edition |
Schlagwörter: | |
Links: | https://doi.org/10.1063/9780735424395 https://doi.org/10.1063/9780735424395 |
Abstract: | MEMS Applications in Electronics and Engineering is a state-of-the-art resource for scientists and students in sensor/device research. It provides a thorough overview of the latest applications and devices in nano-scale sensors and their role in diagnostics, consumer electronics, automotive, energy harvesting, and IoT-based applications. It highlights recent developments in MEMS-based sensors and explains the fundamentals, novel processes, and materials of this global area of focus. This timely and essential book: -- Builds knowledge for people working in other domains through its interdisciplinary approach -- Identifies recent technologies from MEMS sensors domains and their efficacy in real-life applications -- Covers relevant topics for the expert as well as foundational information for non-specialists in MEMS technologies MEMS Applications in Electronics and Engineering is a valuable guide for students, researchers, and faculty engaged in MEMS-related research and research professionals |
Umfang: | 1 Online-Ressource |
ISBN: | 9780735424395 9780735424388 9780735424371 |
DOI: | 10.1063/9780735424395 |
Internformat
MARC
LEADER | 00000nam a2200000 c 4500 | ||
---|---|---|---|
001 | BV049603741 | ||
003 | DE-604 | ||
007 | cr|uuu---uuuuu | ||
008 | 240308s2023 xx o|||| 00||| eng d | ||
020 | |a 9780735424395 |c Online |9 978-0-7354-2439-5 | ||
020 | |a 9780735424388 |c ePDF |9 978-0-7354-2438-8 | ||
020 | |a 9780735424371 |c ePub |9 978-0-7354-2437-1 | ||
024 | 7 | |a 10.1063/9780735424395 |2 doi | |
035 | |a (OCoLC)1427322467 | ||
035 | |a (DE-599)BVBBV049603741 | ||
040 | |a DE-604 |b ger |e rda | ||
041 | 0 | |a eng | |
049 | |a DE-703 | ||
245 | 1 | 0 | |a MEMS applications in electronics and engineering |c edited by Aviru Kumar Basu, Adreeja Basu, Sagnik Ghosh, Shantanu Bhattacharya |
250 | |a First edition | ||
264 | 1 | |a Melville, New York |b AIP Publishing |c 2023 | |
300 | |a 1 Online-Ressource | ||
336 | |b txt |2 rdacontent | ||
337 | |b c |2 rdamedia | ||
338 | |b cr |2 rdacarrier | ||
505 | 8 | |a Introduction to MEMS Applications in Electronics and Engineering -- Scaling Law -- Recent Progress in Cantilever-Based Sensors: An Overview of Application and Fabrication Techniques -- Recent Trends in CMOS-MEMS Sensors -- Mechanics of Materials Considerations in MEMS-Based Medical Devices -- Progress in RF MEMS/NEMS Switches -- Optical MEMS (Microspheres and Ring Resonators): Overview of Recent Progress -- Emerging Trends in MEMS/NEMS Based Technologies for Gas Sensing Applications -- MEMS-Based Energy Harvesting Devices: Overview of Recent Progress -- Index | |
520 | 3 | |a MEMS Applications in Electronics and Engineering is a state-of-the-art resource for scientists and students in sensor/device research. It provides a thorough overview of the latest applications and devices in nano-scale sensors and their role in diagnostics, consumer electronics, automotive, energy harvesting, and IoT-based applications. It highlights recent developments in MEMS-based sensors and explains the fundamentals, novel processes, and materials of this global area of focus. This timely and essential book: -- Builds knowledge for people working in other domains through its interdisciplinary approach -- Identifies recent technologies from MEMS sensors domains and their efficacy in real-life applications -- Covers relevant topics for the expert as well as foundational information for non-specialists in MEMS technologies MEMS Applications in Electronics and Engineering is a valuable guide for students, researchers, and faculty engaged in MEMS-related research and research professionals | |
653 | 0 | |a Nanoscience | |
653 | 0 | |a Microelectromechanical systems | |
653 | 0 | |a Nanosciences | |
653 | 0 | |a Microsystèmes électromécaniques | |
653 | 0 | |a TECHNOLOGY & ENGINEERING / Nanotechnology & MEMS. | |
653 | 0 | |a TECHNOLOGY & ENGINEERING / Sensors | |
653 | 0 | |a TECHNOLOGY & ENGINEERING / Electronics/Microelectronics | |
653 | 0 | |a Microelectromechanical systems | |
653 | 0 | |a Nanoscience | |
700 | 1 | |a Basu, Aviru Kumar |4 edt | |
700 | 1 | |a Basu, Adreeja |4 edt | |
700 | 1 | |a Ghosh, Sagnik |4 edt | |
700 | 1 | |a Bhattacharya, Shantanu |0 (DE-588)1266234497 |4 edt | |
776 | 0 | 8 | |i Erscheint auch als |n Druck-Ausgabe |z 978-0-7354-2436-4 |
856 | 4 | 0 | |u https://doi.org/10.1063/9780735424395 |x Verlag |z URL des Erstveröffentlichers |3 Volltext |
912 | |a ZDB-275-AIPB | ||
912 | |a ZDB-275-AIPB_2 | ||
943 | 1 | |a oai:aleph.bib-bvb.de:BVB01-034948116 | |
966 | e | |u https://doi.org/10.1063/9780735424395 |l DE-703 |p ZDB-275-AIPB |q ZDB-275-AIPB_2 |x Verlag |3 Volltext |
Datensatz im Suchindex
_version_ | 1822694129633591296 |
---|---|
adam_text | |
any_adam_object | |
author2 | Basu, Aviru Kumar Basu, Adreeja Ghosh, Sagnik Bhattacharya, Shantanu |
author2_role | edt edt edt edt |
author2_variant | a k b ak akb a b ab s g sg s b sb |
author_GND | (DE-588)1266234497 |
author_facet | Basu, Aviru Kumar Basu, Adreeja Ghosh, Sagnik Bhattacharya, Shantanu |
building | Verbundindex |
bvnumber | BV049603741 |
collection | ZDB-275-AIPB ZDB-275-AIPB_2 |
contents | Introduction to MEMS Applications in Electronics and Engineering -- Scaling Law -- Recent Progress in Cantilever-Based Sensors: An Overview of Application and Fabrication Techniques -- Recent Trends in CMOS-MEMS Sensors -- Mechanics of Materials Considerations in MEMS-Based Medical Devices -- Progress in RF MEMS/NEMS Switches -- Optical MEMS (Microspheres and Ring Resonators): Overview of Recent Progress -- Emerging Trends in MEMS/NEMS Based Technologies for Gas Sensing Applications -- MEMS-Based Energy Harvesting Devices: Overview of Recent Progress -- Index |
ctrlnum | (OCoLC)1427322467 (DE-599)BVBBV049603741 |
doi_str_mv | 10.1063/9780735424395 |
edition | First edition |
format | Electronic eBook |
fullrecord | <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>00000nam a2200000 c 4500</leader><controlfield tag="001">BV049603741</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="007">cr|uuu---uuuuu</controlfield><controlfield tag="008">240308s2023 xx o|||| 00||| eng d</controlfield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">9780735424395</subfield><subfield code="c">Online</subfield><subfield code="9">978-0-7354-2439-5</subfield></datafield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">9780735424388</subfield><subfield code="c">ePDF</subfield><subfield code="9">978-0-7354-2438-8</subfield></datafield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">9780735424371</subfield><subfield code="c">ePub</subfield><subfield code="9">978-0-7354-2437-1</subfield></datafield><datafield tag="024" ind1="7" ind2=" "><subfield code="a">10.1063/9780735424395</subfield><subfield code="2">doi</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)1427322467</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)BVBBV049603741</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield><subfield code="e">rda</subfield></datafield><datafield tag="041" ind1="0" ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="049" ind1=" " ind2=" "><subfield code="a">DE-703</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">MEMS applications in electronics and engineering</subfield><subfield code="c">edited by Aviru Kumar Basu, Adreeja Basu, Sagnik Ghosh, Shantanu Bhattacharya</subfield></datafield><datafield tag="250" ind1=" " ind2=" "><subfield code="a">First edition</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">Melville, New York</subfield><subfield code="b">AIP Publishing</subfield><subfield code="c">2023</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">1 Online-Ressource</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">c</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">cr</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="505" ind1="8" ind2=" "><subfield code="a">Introduction to MEMS Applications in Electronics and Engineering -- Scaling Law -- Recent Progress in Cantilever-Based Sensors: An Overview of Application and Fabrication Techniques -- Recent Trends in CMOS-MEMS Sensors -- Mechanics of Materials Considerations in MEMS-Based Medical Devices -- Progress in RF MEMS/NEMS Switches -- Optical MEMS (Microspheres and Ring Resonators): Overview of Recent Progress -- Emerging Trends in MEMS/NEMS Based Technologies for Gas Sensing Applications -- MEMS-Based Energy Harvesting Devices: Overview of Recent Progress -- Index</subfield></datafield><datafield tag="520" ind1="3" ind2=" "><subfield code="a">MEMS Applications in Electronics and Engineering is a state-of-the-art resource for scientists and students in sensor/device research. It provides a thorough overview of the latest applications and devices in nano-scale sensors and their role in diagnostics, consumer electronics, automotive, energy harvesting, and IoT-based applications. It highlights recent developments in MEMS-based sensors and explains the fundamentals, novel processes, and materials of this global area of focus. This timely and essential book: -- Builds knowledge for people working in other domains through its interdisciplinary approach -- Identifies recent technologies from MEMS sensors domains and their efficacy in real-life applications -- Covers relevant topics for the expert as well as foundational information for non-specialists in MEMS technologies MEMS Applications in Electronics and Engineering is a valuable guide for students, researchers, and faculty engaged in MEMS-related research and research professionals</subfield></datafield><datafield tag="653" ind1=" " ind2="0"><subfield code="a">Nanoscience</subfield></datafield><datafield tag="653" ind1=" " ind2="0"><subfield code="a">Microelectromechanical systems</subfield></datafield><datafield tag="653" ind1=" " ind2="0"><subfield code="a">Nanosciences</subfield></datafield><datafield tag="653" ind1=" " ind2="0"><subfield code="a">Microsystèmes électromécaniques</subfield></datafield><datafield tag="653" ind1=" " ind2="0"><subfield code="a">TECHNOLOGY & ENGINEERING / Nanotechnology & MEMS.</subfield></datafield><datafield tag="653" ind1=" " ind2="0"><subfield code="a">TECHNOLOGY & ENGINEERING / Sensors</subfield></datafield><datafield tag="653" ind1=" " ind2="0"><subfield code="a">TECHNOLOGY & ENGINEERING / Electronics/Microelectronics</subfield></datafield><datafield tag="653" ind1=" " ind2="0"><subfield code="a">Microelectromechanical systems</subfield></datafield><datafield tag="653" ind1=" " ind2="0"><subfield code="a">Nanoscience</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Basu, Aviru Kumar</subfield><subfield code="4">edt</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Basu, Adreeja</subfield><subfield code="4">edt</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Ghosh, Sagnik</subfield><subfield code="4">edt</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Bhattacharya, Shantanu</subfield><subfield code="0">(DE-588)1266234497</subfield><subfield code="4">edt</subfield></datafield><datafield tag="776" ind1="0" ind2="8"><subfield code="i">Erscheint auch als</subfield><subfield code="n">Druck-Ausgabe</subfield><subfield code="z">978-0-7354-2436-4</subfield></datafield><datafield tag="856" ind1="4" ind2="0"><subfield code="u">https://doi.org/10.1063/9780735424395</subfield><subfield code="x">Verlag</subfield><subfield code="z">URL des Erstveröffentlichers</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">ZDB-275-AIPB</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">ZDB-275-AIPB_2</subfield></datafield><datafield tag="943" ind1="1" ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-034948116</subfield></datafield><datafield tag="966" ind1="e" ind2=" "><subfield code="u">https://doi.org/10.1063/9780735424395</subfield><subfield code="l">DE-703</subfield><subfield code="p">ZDB-275-AIPB</subfield><subfield code="q">ZDB-275-AIPB_2</subfield><subfield code="x">Verlag</subfield><subfield code="3">Volltext</subfield></datafield></record></collection> |
id | DE-604.BV049603741 |
illustrated | Not Illustrated |
indexdate | 2025-01-30T17:02:57Z |
institution | BVB |
isbn | 9780735424395 9780735424388 9780735424371 |
language | English |
oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-034948116 |
oclc_num | 1427322467 |
open_access_boolean | |
owner | DE-703 |
owner_facet | DE-703 |
physical | 1 Online-Ressource |
psigel | ZDB-275-AIPB ZDB-275-AIPB_2 ZDB-275-AIPB ZDB-275-AIPB_2 |
publishDate | 2023 |
publishDateSearch | 2023 |
publishDateSort | 2023 |
publisher | AIP Publishing |
record_format | marc |
spelling | MEMS applications in electronics and engineering edited by Aviru Kumar Basu, Adreeja Basu, Sagnik Ghosh, Shantanu Bhattacharya First edition Melville, New York AIP Publishing 2023 1 Online-Ressource txt rdacontent c rdamedia cr rdacarrier Introduction to MEMS Applications in Electronics and Engineering -- Scaling Law -- Recent Progress in Cantilever-Based Sensors: An Overview of Application and Fabrication Techniques -- Recent Trends in CMOS-MEMS Sensors -- Mechanics of Materials Considerations in MEMS-Based Medical Devices -- Progress in RF MEMS/NEMS Switches -- Optical MEMS (Microspheres and Ring Resonators): Overview of Recent Progress -- Emerging Trends in MEMS/NEMS Based Technologies for Gas Sensing Applications -- MEMS-Based Energy Harvesting Devices: Overview of Recent Progress -- Index MEMS Applications in Electronics and Engineering is a state-of-the-art resource for scientists and students in sensor/device research. It provides a thorough overview of the latest applications and devices in nano-scale sensors and their role in diagnostics, consumer electronics, automotive, energy harvesting, and IoT-based applications. It highlights recent developments in MEMS-based sensors and explains the fundamentals, novel processes, and materials of this global area of focus. This timely and essential book: -- Builds knowledge for people working in other domains through its interdisciplinary approach -- Identifies recent technologies from MEMS sensors domains and their efficacy in real-life applications -- Covers relevant topics for the expert as well as foundational information for non-specialists in MEMS technologies MEMS Applications in Electronics and Engineering is a valuable guide for students, researchers, and faculty engaged in MEMS-related research and research professionals Nanoscience Microelectromechanical systems Nanosciences Microsystèmes électromécaniques TECHNOLOGY & ENGINEERING / Nanotechnology & MEMS. TECHNOLOGY & ENGINEERING / Sensors TECHNOLOGY & ENGINEERING / Electronics/Microelectronics Basu, Aviru Kumar edt Basu, Adreeja edt Ghosh, Sagnik edt Bhattacharya, Shantanu (DE-588)1266234497 edt Erscheint auch als Druck-Ausgabe 978-0-7354-2436-4 https://doi.org/10.1063/9780735424395 Verlag URL des Erstveröffentlichers Volltext |
spellingShingle | MEMS applications in electronics and engineering Introduction to MEMS Applications in Electronics and Engineering -- Scaling Law -- Recent Progress in Cantilever-Based Sensors: An Overview of Application and Fabrication Techniques -- Recent Trends in CMOS-MEMS Sensors -- Mechanics of Materials Considerations in MEMS-Based Medical Devices -- Progress in RF MEMS/NEMS Switches -- Optical MEMS (Microspheres and Ring Resonators): Overview of Recent Progress -- Emerging Trends in MEMS/NEMS Based Technologies for Gas Sensing Applications -- MEMS-Based Energy Harvesting Devices: Overview of Recent Progress -- Index |
title | MEMS applications in electronics and engineering |
title_auth | MEMS applications in electronics and engineering |
title_exact_search | MEMS applications in electronics and engineering |
title_full | MEMS applications in electronics and engineering edited by Aviru Kumar Basu, Adreeja Basu, Sagnik Ghosh, Shantanu Bhattacharya |
title_fullStr | MEMS applications in electronics and engineering edited by Aviru Kumar Basu, Adreeja Basu, Sagnik Ghosh, Shantanu Bhattacharya |
title_full_unstemmed | MEMS applications in electronics and engineering edited by Aviru Kumar Basu, Adreeja Basu, Sagnik Ghosh, Shantanu Bhattacharya |
title_short | MEMS applications in electronics and engineering |
title_sort | mems applications in electronics and engineering |
url | https://doi.org/10.1063/9780735424395 |
work_keys_str_mv | AT basuavirukumar memsapplicationsinelectronicsandengineering AT basuadreeja memsapplicationsinelectronicsandengineering AT ghoshsagnik memsapplicationsinelectronicsandengineering AT bhattacharyashantanu memsapplicationsinelectronicsandengineering |