Carbon for micro and nano devices - Sharma, Swati (De Gruyter, 2024)
Keywords: Nanoelektromechanik; Kohlenstoffwerkstoff; Technische Chemie; Mikroelektrode; Mikroelektronik; Grafit; Bio-MEMS; MEMS; Graphite; Microelectrodes; Microelectronics; Nanoelectromechanics; Nanofabrication; Carbon Materials.; TB: Textbook