Neuartiges Bauteilkonzept quasistatisch-resonanter 2D-Mikroscanner für die Zielanwendung ultrakompakter Laserprojektionsdisplays:
Gespeichert in:
| Beteilige Person: | |
|---|---|
| Format: | Hochschulschrift/Dissertation Buch |
| Sprache: | Deutsch |
| Veröffentlicht: |
Dresden
TUDpress
2012
|
| Schlagwörter: | |
| Links: | http://deposit.dnb.de/cgi-bin/dokserv?id=4044198&prov=M&dok_var=1&dok_ext=htm http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=029665428&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA |
| Umfang: | X, 143 Seiten Illustrationen, Diagramme 21 cm |
| ISBN: | 9783942710701 |
Internformat
MARC
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| 100 | 1 | |a Jung, Denis |e Verfasser |4 aut | |
| 245 | 1 | 0 | |a Neuartiges Bauteilkonzept quasistatisch-resonanter 2D-Mikroscanner für die Zielanwendung ultrakompakter Laserprojektionsdisplays |c Denis Jung |
| 264 | 1 | |a Dresden |b TUDpress |c 2012 | |
| 300 | |a X, 143 Seiten |b Illustrationen, Diagramme |c 21 cm | ||
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| 502 | |b Dissertation |c Technische Universität Dresden |d 2012 | ||
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Datensatz im Suchindex
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| adam_text | IMAGE 1
INHALTSVERZEICHNIS
VERZEICHNIS D E R F O R M E L Z E I C H E N V
V E R Z E I C H N I S D E R A B K UE R Z U N G E N I X
A B S T R A C T X I
1 E I N F UE H R U N G U N D Z I E L S T E L L U N G 1
2 S T A N D D E R T E C H N I K B E I M I K R O S C A N N E R N 7
2.1 M I K R O S C A N N E R F UE R P R O J E K T I O N S D I S P L A Y S
7
2.2 E L E K T R O S T A T I S C H - R E S O N A N T E F R A U N H O F E
R - I P M S - M I K R O S C A N N E R 9
2.2.1 E L E K T R O S T A T I S C H E K R AE F T E U N D M O M E N T E 9
2 . 2 . 2 S P I E G E L S C H W I N G U N G 10
2 . 2 . 3 F E R T I G U N G S P R O Z E S S A M E 7 5 13
2.3 E L E K T R O S T A T I S C H - Q U A S I S T A T I S C H E K I P P
S P I E G E L A K T O R E N 15
2.3.1 A U F B A U U N D F U N K T I O N S W E I S E 15
2 . 3 . 2 A U S F UE H R U N G S B E I S P I E L E V E R T I K A L E R K
A M M E L E K T R O D E N U N D D E R E N F E R T I G U N G 16
3 B A U T E I L K O N Z E P T : Q U A S I S T A T I S C H - R E S O N A
N T E R 2 D - M I K R O S C A N N E R 2 1
3.1 A N T R I E B S K O N Z E P T 2 1
3 . 2 F E R T I G U N G S K O N Z E P T 2 2
3.3 F E S T K OE R P E R M E C H A N I S M E N F UE R D I E F E R T I G U
N G V E R T I K A L E R E L E K T R O D E N 2 2
4 M O D E L L B I L D U N G U N D S I M U L A T I O N 2 5
4.1 E I N F UE H R U N G W E S E N T L I C H E R M O D E L L I E R U N G
S T E C H N I K E N 2 6
4.1.1 F I N I T E - E L E M E N T E - M E T H O D E 2 7
4 . 1 . 2 N E T Z W E R K M O D E L L I E R U N G 2 7
HTTP://D-NB.INFO/1022586742
IMAGE 2
I N H A L T S V E R Z E I C H N I S
4 . 1 . 3 R E D U K T I O N P H Y S I K A L I S C H E R F E L D P R O B
L E M E A N E L E K T R O D E N F I N G E R N A U F F L AE C H E N P A A
R I N T E R A K T I O N E N 2 9
4 . 2 M A T E R I A L E I G E N S C H A F T E N V O N S I L I Z I U M 3
2
4.2.1 E L A S T O M E C H A N I S C H E E I G E N S C H A F T E N 3 2
4 . 2 . 2 B R U C H M E C H A N I S C H E E I G E N S C H A F T E N 3 4
4 . 2 . 3 E L E K T R I S C H E E I G E N S C H A F T E N 3 5
4 . 3 E L E K T R O S T A T I S C H E D O M AE N E 3 5
4.3.1 A N A L Y T I S C H E K A P A Z I T AE T S M O D E L L E 3 6
4 . 3 . 2 F I N I T E - E L E M E N T E - M O D E L L 3 7
4 . 3 . 3 VERTEILTES 3 D - P L A T T E N K O N D E N S A T O R M O D E L
L 3 8
4 . 3 . 4 3 D - H Y B R I D M O D E L ) 3 9
4 . 4 F L U I D M E C H A N I S C H E D O M AE N E 4 0
4.4.1 R E L E V A N T E D I M E N S I O N S L O S E K E N N Z A H L E N
U N D R A N D B E D I N G U N G E N 4 1
4 . 4 . 2 D AE M P F U N G S M E C H A N I S M E N D E R S P I E G E L S
T R U K T U R 4 2
4 . 4 . 3 D AE M P F U N G S M E C H A N I S M E N D E R E L E K T R O D
E N S T R U K T U R 4 3
4.5 M E C H A N I S C H E D O M AE N E 4 7
4.5.1 V E R F O R M U N G S C H L A N K E R T R AE G E R R E C H T E C K
I G E N Q U E R S C H N I T T S 4 8
4 . 5 . 2 V E R F O R M U N G V O N F E S T K OE R P E R M E C H A N I K
E N U N T E R S T A T I S C H E R L A S T 5 2
4 . 5 . 3 S C H W I N G U N G S V E R H A L T E N V O N S P I E G E L S
T R U K T U R E N 5 7
4 . 6 E L E K T R O M E C H A N I S C H E W E C H S E L W I R K U N G 5
9
4.6.1 PULL-IN T R A P E Z F OE R M I G E R E L E K T R O D E N F I N G E
R 6 1
4 . 6 . 2 V E R F O R M U N G D E R S P I E G E L S T R U K T U R A U F
G R U N D E L E K T R O S T A T I S C H E R A N T R I E B S K R AE F T E
6 2
4 . 7 M O D E L L I E R U N G D E R D Y N A M I S C H E N S P I E G E L
V E R K I P P U N G 6 3
4.7.1 D Y N A M I S C H E S M A K R O M O D E L L 6 3
4 . 7 . 2 D Y N A M I S C H E S V E R H A L T E N S M O D E L L 6 5
4 . 7 . 3 A N A L Y T I S C H E N AE H E R U N G S L OE S U N G E N F UE R
E I N E L I N E A R I S I E R T E S P I E G E L S C H W I N G U N G 6 6
4 . 8 M O D E L L V A L I D I E R U N G 7 0
4.8.1 A V C - U N D S V C - T E S T S T R U K T U R E N 7 1
4 . 8 . 2 S T A T I S C H E S B A U T E I L V E R H A L T E N 7 2
4 . 8 . 3 D Y N A M I S C H E S B A U T E I L V E R H A L T E N 7 3
E I G E N S C H A F T E N V E R T I K A L E R K A M M A N T R I E B E 7
7
5.1 E L E K T R O S T A T I S C H E E I G E N S C H A F T E N V O N E L
E K T R O D E N G R U N D T Y P E N 7 7
5.1.1 E L E K T R O S T A T I S C H E S A N T R I E B S M O M E N T 7 8
5 . 1 . 2 P A R A S I T AE R E E L E K T R O S T A T I S C H E K R AE F T
E 7 9
5 . 2 E L E K T R O M E C H A N I S C H E R P U L L - L N V O N X - U N
D Y - A N T R I E B E N 8 0
IMAGE 3
INHALTSVERZEICHNIS III
6 T E C H N O L O G I E & F E R T I G U N G 8 3
6.1 B E S O N D E R H E I T E N B E I D E R S P I E G E L - W A F E R -
F E R T I G U N G M I T D E M A M E 7 5 - P R O Z E S S 8 3
6 . 2 D E C K E L - W A F E R - F E R T I G U N G 8 5
6.3 A D H AE S I V E S W A F E R B O N D E N M I T T E L S B E N Z O C Y
C L O B U T E N 8 7
6.3.1 B E N Z O C Y C L O B U T E N - W A F E R - B O N D P R O Z E S S
8 8
6 . 3 . 2 B O N D V O R V E R S U C H E A N P O L I E R T E N S I L I Z
I U M - W A F E R N 8 8
6 . 3 . 3 E R G E B N I S S E B E I M B O N D E N V O N D E C K E L - U
N D S P I E G E L - W A F E R N 8 8
7 S P I E G E L - D E S I G N S U N D C H A R A K T E R I S T I S C H E
E I G E N S C H A F T E N 91
7.1 D E S I G N S M I T C A V C - A N T R I E B 9 2
7.2 D E S I G N S M I T S V C - A N T R I E B 9 5
7 . 3 E I N O R D N U N G U N D D I S K U S S I O N D E R E R Z I E L T
E N E R G E B N I S S E 9 7
8 P O S I T I O N S S T E U E R U N G U N D - R E G E L U N G 9 9
8.1 E X A K T E L I N E A R I S I E R U N G 9 9
8 . 2 L I N E A R I S I E R U N G M I T T E L S INVERTIERTER G L E I C H
G E W I C H T S K E N N L I N I E 101
8.3 P O S I T I O N S S T E U E R U N G 101
8 . 4 P O S I T I O N S R E G E L U N G 104
8.4.1 H E U R I S T I S C H E D I F F E R E N Z R E G E L U N G ( H D )
104
8 . 4 . 2 H E U R I S T I S C H E G E S C H W I N D I G K E I T S R E G
E L U N G ( H G ) 107
8 . 4 . 3 K O M P E N S A T I O N S R E G L E R M I T L I N E A R I S I
E R U N G D E S S T R E C K E N E I N G A N G S 109
8.5 F O L G E V E R H A L T E N A U S G E W AE H L T E R R E G E L U N G
S K O N Z E P T E 109
9 Z U S A M M E N F A S S U N G U N D A U S B L I C K 1 1 7
A B B I L D U N G S V E R Z E I C H N I S 121
T A B E L L E N V E R Z E I C H N I S 1 2 7
L I T E R A T U R V E R Z E I C H N I S 1 2 9
A N H A N G 1 3 5
A B I L D A U F B A U I M S AE G E Z A H N - S I N U S S C A N - M O D U
S 1 3 5
IMAGE 4
I N H A L T S V E R Z E I C H N I S
M A T H E M A T I S C H E R A N H A N G 1 3 9
B . L K O O R D I N A T E N T R A N S F O R M A T I O N E N 139
B . L . L A K T I V E D R E H U N G 139
B . L . 2 P A S S I V E D R E H U N G 139
B . L . 3 E L E M E N T A R E D R E H U N G E N I M FT 3 1 3 9
B . 1 . 4 D R E H M A T R I Z E N D E S 3 D - T R AE G E R - E L E M E N
T S 140
B . 2 F L AE C H E N T R AE G H E I T S M O M E N T E 140
B.2.1 A X I A L E S F L AE C H E N T R AE G H E I T S M O M E N T 1 4 0
B . 2 . 2 A X I A L E S F L AE C H E N T R AE G H E I T S M O M E N T B E
I R E C H T E C K I G E R F L AE C H E 141
B . 2 . 3 P O L A R E S F L AE C H E N T R AE G H E I T S M O M E N T 141
B.3 M A S S E N T R AE G H E I T S M O M E N T 141
B.3.1 M A S S E N T R AE G H E I T S M O M E N T A U S G E W AE H L T E R
P L A T T E N G E O M E T R I E N 142
B . 4 G E O M E T R I E 142
B.4.1 F L AE C H E N S C H W E R P U N K T S K D E R P R O J E K T I O N
S F L AE C H E A K 1 4 2
B . 4 . 2 M I T T L E R E R F L AE C H E N A B S T A N D D * D E R P R O
J E K T I O N S F L AE C H E A K 1 4 2
B . 5 G UE T E K R I T E R I E N 142
B.5.1 E I N S C H W I N G Z E I T T A N 1 4 2
B . 5 . 2 Q U A D R A T I S C H E R E G E L F L AE C H E I S E 143
B . 5 . 3 S T E L L E N E R G I E S E 143
|
| any_adam_object | 1 |
| author | Jung, Denis |
| author_facet | Jung, Denis |
| author_role | aut |
| author_sort | Jung, Denis |
| author_variant | d j dj |
| building | Verbundindex |
| bvnumber | BV044260492 |
| classification_rvk | ST 180 ZN 3750 |
| ctrlnum | (OCoLC)801769183 (DE-599)DNB1022586742 |
| dewey-full | 681.418 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 681 - Precision instruments and other devices |
| dewey-raw | 681.418 |
| dewey-search | 681.418 |
| dewey-sort | 3681.418 |
| dewey-tens | 680 - Manufacture of products for specific uses |
| discipline | Handwerk und Gewerbe / Verschiedene Technologien Informatik Elektrotechnik / Elektronik / Nachrichtentechnik |
| format | Thesis Book |
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| genre | (DE-588)4113937-9 Hochschulschrift gnd-content |
| genre_facet | Hochschulschrift |
| id | DE-604.BV044260492 |
| illustrated | Illustrated |
| indexdate | 2024-12-20T17:58:12Z |
| institution | BVB |
| isbn | 9783942710701 |
| language | German |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-029665428 |
| oclc_num | 801769183 |
| open_access_boolean | |
| owner | DE-83 |
| owner_facet | DE-83 |
| physical | X, 143 Seiten Illustrationen, Diagramme 21 cm |
| publishDate | 2012 |
| publishDateSearch | 2012 |
| publishDateSort | 2012 |
| publisher | TUDpress |
| record_format | marc |
| spellingShingle | Jung, Denis Neuartiges Bauteilkonzept quasistatisch-resonanter 2D-Mikroscanner für die Zielanwendung ultrakompakter Laserprojektionsdisplays Laser Display Technologie (DE-588)7672373-2 gnd Geräteentwicklung (DE-588)4267986-2 gnd Herstellung (DE-588)4159653-5 gnd Kippspiegel (DE-588)7620751-1 gnd Scanner (DE-588)4195691-6 gnd MEMS (DE-588)4824724-8 gnd |
| subject_GND | (DE-588)7672373-2 (DE-588)4267986-2 (DE-588)4159653-5 (DE-588)7620751-1 (DE-588)4195691-6 (DE-588)4824724-8 (DE-588)4113937-9 |
| title | Neuartiges Bauteilkonzept quasistatisch-resonanter 2D-Mikroscanner für die Zielanwendung ultrakompakter Laserprojektionsdisplays |
| title_auth | Neuartiges Bauteilkonzept quasistatisch-resonanter 2D-Mikroscanner für die Zielanwendung ultrakompakter Laserprojektionsdisplays |
| title_exact_search | Neuartiges Bauteilkonzept quasistatisch-resonanter 2D-Mikroscanner für die Zielanwendung ultrakompakter Laserprojektionsdisplays |
| title_full | Neuartiges Bauteilkonzept quasistatisch-resonanter 2D-Mikroscanner für die Zielanwendung ultrakompakter Laserprojektionsdisplays Denis Jung |
| title_fullStr | Neuartiges Bauteilkonzept quasistatisch-resonanter 2D-Mikroscanner für die Zielanwendung ultrakompakter Laserprojektionsdisplays Denis Jung |
| title_full_unstemmed | Neuartiges Bauteilkonzept quasistatisch-resonanter 2D-Mikroscanner für die Zielanwendung ultrakompakter Laserprojektionsdisplays Denis Jung |
| title_short | Neuartiges Bauteilkonzept quasistatisch-resonanter 2D-Mikroscanner für die Zielanwendung ultrakompakter Laserprojektionsdisplays |
| title_sort | neuartiges bauteilkonzept quasistatisch resonanter 2d mikroscanner fur die zielanwendung ultrakompakter laserprojektionsdisplays |
| topic | Laser Display Technologie (DE-588)7672373-2 gnd Geräteentwicklung (DE-588)4267986-2 gnd Herstellung (DE-588)4159653-5 gnd Kippspiegel (DE-588)7620751-1 gnd Scanner (DE-588)4195691-6 gnd MEMS (DE-588)4824724-8 gnd |
| topic_facet | Laser Display Technologie Geräteentwicklung Herstellung Kippspiegel Scanner MEMS Hochschulschrift |
| url | http://deposit.dnb.de/cgi-bin/dokserv?id=4044198&prov=M&dok_var=1&dok_ext=htm http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=029665428&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA |
| work_keys_str_mv | AT jungdenis neuartigesbauteilkonzeptquasistatischresonanter2dmikroscannerfurdiezielanwendungultrakompakterlaserprojektionsdisplays |