Metrology and diagnostic techniques for nanoelectronics:
Saved in:
Bibliographic Details
Other Authors: Ma, Zhiyong (Editor), Seiler, David G. (Editor)
Format: Book
Language:English
Published: Singapore Pan Stanford Publishing [2017]
Subjects:
Physical Description:xli, 1411 Seiten Illustrationen, Diagramme 24 cm
ISBN:9814745081
9789814745086