Scanning electron microscopy: physics of image formation and microanalysis
Saved in:
Bibliographic Details
Main Author: Reimer, Ludwig 1928- (Author)
Format: Electronic eBook
Language:English
Published: Berlin, Heidelberg Springer Berlin Heidelberg 1998
Edition:Second Completely Revised and Updated Edition
Series:Springer Series in Optical Sciences 45
Subjects:
Links:https://doi.org/10.1007/978-3-540-38967-5
Item Description:Scanning Electron Microscopy provides a description of the physics of electron-probe formation and of electron-specimen interations. The different imaging and analytical modes using secondary and backscattered electrons, electron-beam-induced currents, X-ray and Auger electrons, electron channelling effects, and cathodoluminescence are discussed to evaluate specific contrasts and to obtain quantitative information
Physical Description:1 Online-Ressource (XIV, 529 p)
ISBN:9783540389675
9783642083723
DOI:10.1007/978-3-540-38967-5