Scanning electron microscopy physics of image formation and microanalysis - Reimer, Ludwig 1928- (Springer Berlin Heidelberg, 1998)
Scanning Electron Microscopy provides a description of the physics of electron-probe formation and of electron-specimen interations. The different imaging and analytical modes using secondary and backscattered electrons, electron-beam-induced currents, X-ray and Auger electrons, electron channelling effects, and cathodoluminescence are discussed to evaluate specific contrasts and to obtain quantitative information
Keywords: Physics; Solid State Physics; Spectroscopy and Microscopy; Physics, general; Rasterelektronenmikroskopie