Gespeichert in:
| Beteiligte Personen: | , |
|---|---|
| Format: | Buch |
| Sprache: | Englisch |
| Veröffentlicht: |
New York
Nova Science Publ.
2012
|
| Umfang: | XVIII, 144 S. graph. Darst. |
| ISBN: | 9781621003656 |
Internformat
MARC
| LEADER | 00000nam a2200000 c 4500 | ||
|---|---|---|---|
| 001 | BV039546846 | ||
| 003 | DE-604 | ||
| 005 | 20130820 | ||
| 007 | t| | ||
| 008 | 110825s2012 xx d||| |||| 00||| eng d | ||
| 020 | |a 9781621003656 |9 978-1-62100-365-6 | ||
| 035 | |a (OCoLC)918516407 | ||
| 035 | |a (DE-599)BVBBV039546846 | ||
| 040 | |a DE-604 |b ger |e rakwb | ||
| 041 | 0 | |a eng | |
| 049 | |a DE-11 | ||
| 084 | |a SK 950 |0 (DE-625)143273: |2 rvk | ||
| 100 | 1 | |a Geiser, Jürgen |e Verfasser |0 (DE-588)128742402 |4 aut | |
| 245 | 1 | 0 | |a Simulation of deposition processes with PECVD apparatus |b theory and applications |c Jürgen Geiser and Meraa Arab |
| 264 | 1 | |a New York |b Nova Science Publ. |c 2012 | |
| 300 | |a XVIII, 144 S. |b graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 700 | 1 | |a Arab, Meraa |e Verfasser |4 aut | |
| 943 | 1 | |a oai:aleph.bib-bvb.de:BVB01-024398805 | |
Datensatz im Suchindex
| _version_ | 1818975505810980864 |
|---|---|
| any_adam_object | |
| author | Geiser, Jürgen Arab, Meraa |
| author_GND | (DE-588)128742402 |
| author_facet | Geiser, Jürgen Arab, Meraa |
| author_role | aut aut |
| author_sort | Geiser, Jürgen |
| author_variant | j g jg m a ma |
| building | Verbundindex |
| bvnumber | BV039546846 |
| classification_rvk | SK 950 |
| ctrlnum | (OCoLC)918516407 (DE-599)BVBBV039546846 |
| discipline | Mathematik |
| format | Book |
| fullrecord | <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>00888nam a2200277 c 4500</leader><controlfield tag="001">BV039546846</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">20130820 </controlfield><controlfield tag="007">t|</controlfield><controlfield tag="008">110825s2012 xx d||| |||| 00||| eng d</controlfield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">9781621003656</subfield><subfield code="9">978-1-62100-365-6</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)918516407</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)BVBBV039546846</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield><subfield code="e">rakwb</subfield></datafield><datafield tag="041" ind1="0" ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="049" ind1=" " ind2=" "><subfield code="a">DE-11</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">SK 950</subfield><subfield code="0">(DE-625)143273:</subfield><subfield code="2">rvk</subfield></datafield><datafield tag="100" ind1="1" ind2=" "><subfield code="a">Geiser, Jürgen</subfield><subfield code="e">Verfasser</subfield><subfield code="0">(DE-588)128742402</subfield><subfield code="4">aut</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Simulation of deposition processes with PECVD apparatus</subfield><subfield code="b">theory and applications</subfield><subfield code="c">Jürgen Geiser and Meraa Arab</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">New York</subfield><subfield code="b">Nova Science Publ.</subfield><subfield code="c">2012</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">XVIII, 144 S.</subfield><subfield code="b">graph. Darst.</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">n</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">nc</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Arab, Meraa</subfield><subfield code="e">Verfasser</subfield><subfield code="4">aut</subfield></datafield><datafield tag="943" ind1="1" ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-024398805</subfield></datafield></record></collection> |
| id | DE-604.BV039546846 |
| illustrated | Illustrated |
| indexdate | 2024-12-20T15:57:02Z |
| institution | BVB |
| isbn | 9781621003656 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-024398805 |
| oclc_num | 918516407 |
| open_access_boolean | |
| owner | DE-11 |
| owner_facet | DE-11 |
| physical | XVIII, 144 S. graph. Darst. |
| publishDate | 2012 |
| publishDateSearch | 2012 |
| publishDateSort | 2012 |
| publisher | Nova Science Publ. |
| record_format | marc |
| spelling | Geiser, Jürgen Verfasser (DE-588)128742402 aut Simulation of deposition processes with PECVD apparatus theory and applications Jürgen Geiser and Meraa Arab New York Nova Science Publ. 2012 XVIII, 144 S. graph. Darst. txt rdacontent n rdamedia nc rdacarrier Arab, Meraa Verfasser aut |
| spellingShingle | Geiser, Jürgen Arab, Meraa Simulation of deposition processes with PECVD apparatus theory and applications |
| title | Simulation of deposition processes with PECVD apparatus theory and applications |
| title_auth | Simulation of deposition processes with PECVD apparatus theory and applications |
| title_exact_search | Simulation of deposition processes with PECVD apparatus theory and applications |
| title_full | Simulation of deposition processes with PECVD apparatus theory and applications Jürgen Geiser and Meraa Arab |
| title_fullStr | Simulation of deposition processes with PECVD apparatus theory and applications Jürgen Geiser and Meraa Arab |
| title_full_unstemmed | Simulation of deposition processes with PECVD apparatus theory and applications Jürgen Geiser and Meraa Arab |
| title_short | Simulation of deposition processes with PECVD apparatus |
| title_sort | simulation of deposition processes with pecvd apparatus theory and applications |
| title_sub | theory and applications |
| work_keys_str_mv | AT geiserjurgen simulationofdepositionprocesseswithpecvdapparatustheoryandapplications AT arabmeraa simulationofdepositionprocesseswithpecvdapparatustheoryandapplications |