X-ray metrology in semiconductor manufacturing:
Gespeichert in:
| Beteilige Person: | |
|---|---|
| Format: | Buch |
| Sprache: | Englisch |
| Veröffentlicht: |
Boca Raton [u.a.]
CRC/Taylor & Francis
2006
|
| Schlagwörter: | |
| Links: | http://www.loc.gov/catdir/enhancements/fy0648/2005052196-d.html |
| Umfang: | 279 S. Ill., graph. Darst. |
| ISBN: | 0849339286 |
Internformat
MARC
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|---|---|---|---|
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| 003 | DE-604 | ||
| 005 | 20091021 | ||
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| 008 | 090923s2006 xxuad|| |||| 00||| eng d | ||
| 015 | |a GBA597324 |2 dnb | ||
| 020 | |a 0849339286 |c alk. paper |9 0-8493-3928-6 | ||
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| 100 | 1 | |a Bowen, David Keith |d 1940- |e Verfasser |0 (DE-588)13163156X |4 aut | |
| 245 | 1 | 0 | |a X-ray metrology in semiconductor manufacturing |c D. Keith Bowen ; Brian K. Tanner |
| 264 | 1 | |a Boca Raton [u.a.] |b CRC/Taylor & Francis |c 2006 | |
| 300 | |a 279 S. |b Ill., graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 650 | 4 | |a Semiconductors |x Design and construction |x Quality control | |
| 650 | 4 | |a Integrated circuits |x Measurement | |
| 650 | 4 | |a Semiconductor wafers |x Inspection | |
| 650 | 4 | |a X-rays |x Diffraction | |
| 650 | 4 | |a Fluroscopy | |
| 650 | 0 | 7 | |a Röntgenstrahlung |0 (DE-588)4129728-3 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Fertigung |0 (DE-588)4016899-2 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Halbleitertechnologie |0 (DE-588)4158814-9 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Halbleiter |0 (DE-588)4022993-2 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Messtechnik |0 (DE-588)4114575-6 |2 gnd |9 rswk-swf |
| 689 | 0 | 0 | |a Halbleitertechnologie |0 (DE-588)4158814-9 |D s |
| 689 | 0 | 1 | |a Röntgenstrahlung |0 (DE-588)4129728-3 |D s |
| 689 | 0 | 2 | |a Messtechnik |0 (DE-588)4114575-6 |D s |
| 689 | 0 | |5 DE-604 | |
| 689 | 1 | 0 | |a Halbleiter |0 (DE-588)4022993-2 |D s |
| 689 | 1 | 1 | |a Fertigung |0 (DE-588)4016899-2 |D s |
| 689 | 1 | 2 | |a Röntgenstrahlung |0 (DE-588)4129728-3 |D s |
| 689 | 1 | 3 | |a Messtechnik |0 (DE-588)4114575-6 |D s |
| 689 | 1 | |5 DE-604 | |
| 700 | 1 | |a Tanner, Brian K. |e Sonstige |4 oth | |
| 856 | 4 | |u http://www.loc.gov/catdir/enhancements/fy0648/2005052196-d.html |3 Publisher description | |
| 943 | 1 | |a oai:aleph.bib-bvb.de:BVB01-018014128 | |
Datensatz im Suchindex
| _version_ | 1818967486103552000 |
|---|---|
| any_adam_object | |
| author | Bowen, David Keith 1940- |
| author_GND | (DE-588)13163156X |
| author_facet | Bowen, David Keith 1940- |
| author_role | aut |
| author_sort | Bowen, David Keith 1940- |
| author_variant | d k b dk dkb |
| building | Verbundindex |
| bvnumber | BV035737660 |
| callnumber-first | T - Technology |
| callnumber-label | TK7874 |
| callnumber-raw | TK7874.58 |
| callnumber-search | TK7874.58 |
| callnumber-sort | TK 47874.58 |
| callnumber-subject | TK - Electrical and Nuclear Engineering |
| classification_rvk | ZN 4800 |
| ctrlnum | (OCoLC)61463809 (DE-599)BVBBV035737660 |
| dewey-full | 621.3815/2 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 621 - Applied physics |
| dewey-raw | 621.3815/2 |
| dewey-search | 621.3815/2 |
| dewey-sort | 3621.3815 12 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Elektrotechnik / Elektronik / Nachrichtentechnik |
| format | Book |
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| id | DE-604.BV035737660 |
| illustrated | Illustrated |
| indexdate | 2024-12-20T13:49:33Z |
| institution | BVB |
| isbn | 0849339286 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-018014128 |
| oclc_num | 61463809 |
| open_access_boolean | |
| owner | DE-20 |
| owner_facet | DE-20 |
| physical | 279 S. Ill., graph. Darst. |
| publishDate | 2006 |
| publishDateSearch | 2006 |
| publishDateSort | 2006 |
| publisher | CRC/Taylor & Francis |
| record_format | marc |
| spelling | Bowen, David Keith 1940- Verfasser (DE-588)13163156X aut X-ray metrology in semiconductor manufacturing D. Keith Bowen ; Brian K. Tanner Boca Raton [u.a.] CRC/Taylor & Francis 2006 279 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Semiconductors Design and construction Quality control Integrated circuits Measurement Semiconductor wafers Inspection X-rays Diffraction Fluroscopy Röntgenstrahlung (DE-588)4129728-3 gnd rswk-swf Fertigung (DE-588)4016899-2 gnd rswk-swf Halbleitertechnologie (DE-588)4158814-9 gnd rswk-swf Halbleiter (DE-588)4022993-2 gnd rswk-swf Messtechnik (DE-588)4114575-6 gnd rswk-swf Halbleitertechnologie (DE-588)4158814-9 s Röntgenstrahlung (DE-588)4129728-3 s Messtechnik (DE-588)4114575-6 s DE-604 Halbleiter (DE-588)4022993-2 s Fertigung (DE-588)4016899-2 s Tanner, Brian K. Sonstige oth http://www.loc.gov/catdir/enhancements/fy0648/2005052196-d.html Publisher description |
| spellingShingle | Bowen, David Keith 1940- X-ray metrology in semiconductor manufacturing Semiconductors Design and construction Quality control Integrated circuits Measurement Semiconductor wafers Inspection X-rays Diffraction Fluroscopy Röntgenstrahlung (DE-588)4129728-3 gnd Fertigung (DE-588)4016899-2 gnd Halbleitertechnologie (DE-588)4158814-9 gnd Halbleiter (DE-588)4022993-2 gnd Messtechnik (DE-588)4114575-6 gnd |
| subject_GND | (DE-588)4129728-3 (DE-588)4016899-2 (DE-588)4158814-9 (DE-588)4022993-2 (DE-588)4114575-6 |
| title | X-ray metrology in semiconductor manufacturing |
| title_auth | X-ray metrology in semiconductor manufacturing |
| title_exact_search | X-ray metrology in semiconductor manufacturing |
| title_full | X-ray metrology in semiconductor manufacturing D. Keith Bowen ; Brian K. Tanner |
| title_fullStr | X-ray metrology in semiconductor manufacturing D. Keith Bowen ; Brian K. Tanner |
| title_full_unstemmed | X-ray metrology in semiconductor manufacturing D. Keith Bowen ; Brian K. Tanner |
| title_short | X-ray metrology in semiconductor manufacturing |
| title_sort | x ray metrology in semiconductor manufacturing |
| topic | Semiconductors Design and construction Quality control Integrated circuits Measurement Semiconductor wafers Inspection X-rays Diffraction Fluroscopy Röntgenstrahlung (DE-588)4129728-3 gnd Fertigung (DE-588)4016899-2 gnd Halbleitertechnologie (DE-588)4158814-9 gnd Halbleiter (DE-588)4022993-2 gnd Messtechnik (DE-588)4114575-6 gnd |
| topic_facet | Semiconductors Design and construction Quality control Integrated circuits Measurement Semiconductor wafers Inspection X-rays Diffraction Fluroscopy Röntgenstrahlung Fertigung Halbleitertechnologie Halbleiter Messtechnik |
| url | http://www.loc.gov/catdir/enhancements/fy0648/2005052196-d.html |
| work_keys_str_mv | AT bowendavidkeith xraymetrologyinsemiconductormanufacturing AT tannerbriank xraymetrologyinsemiconductormanufacturing |