Modeling and optimization of cluster tools in semiconductor manufacturing:
Gespeichert in:
| Beteilige Person: | |
|---|---|
| Format: | Buch |
| Sprache: | Englisch |
| Veröffentlicht: |
Würzburg
Institut für Informatik, Lehrstuhl für Verteilte Systeme
2004
|
| Schriftenreihe: | Würzburger Beiträge zur Leistungsbewertung verteilter Systeme
2004,1 |
| Schlagwörter: | |
| Beschreibung: | Zugl.: Würzburg, Univ., Diss., 2004 |
| Umfang: | IV, 149 S. Ill., graph. Darst. |
Internformat
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Datensatz im Suchindex
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| indexdate | 2024-12-20T11:25:04Z |
| institution | BVB |
| language | English |
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| physical | IV, 149 S. Ill., graph. Darst. |
| publishDate | 2004 |
| publishDateSearch | 2004 |
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| publisher | Institut für Informatik, Lehrstuhl für Verteilte Systeme |
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| series | Würzburger Beiträge zur Leistungsbewertung verteilter Systeme |
| series2 | Würzburger Beiträge zur Leistungsbewertung verteilter Systeme |
| spellingShingle | Dümmler, Mathias Modeling and optimization of cluster tools in semiconductor manufacturing Würzburger Beiträge zur Leistungsbewertung verteilter Systeme |
| subject_GND | (DE-588)4113937-9 |
| title | Modeling and optimization of cluster tools in semiconductor manufacturing |
| title_auth | Modeling and optimization of cluster tools in semiconductor manufacturing |
| title_exact_search | Modeling and optimization of cluster tools in semiconductor manufacturing |
| title_full | Modeling and optimization of cluster tools in semiconductor manufacturing von Mathias Dümmler |
| title_fullStr | Modeling and optimization of cluster tools in semiconductor manufacturing von Mathias Dümmler |
| title_full_unstemmed | Modeling and optimization of cluster tools in semiconductor manufacturing von Mathias Dümmler |
| title_short | Modeling and optimization of cluster tools in semiconductor manufacturing |
| title_sort | modeling and optimization of cluster tools in semiconductor manufacturing |
| topic_facet | Hochschulschrift |
| volume_link | (DE-604)BV011319966 |
| work_keys_str_mv | AT dummlermathias modelingandoptimizationofclustertoolsinsemiconductormanufacturing |
Paper/Kapitel scannen lassen
Bibliotheksmagazin
| Signatur: |
0001 2007 A 5992
Lageplan |
|---|---|
| Exemplar 1 | Ausleihbar Am Standort |