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Scanning electron microscopy: physics of image formation and microanalysis

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Bibliographic Details
Main Author:	Reimer, Ludwig 1928- (Author)
Format:	Book
Language:	German
Published:	Berlin [u.a.] Springer 1998
Edition:	2., completely rev. and updated ed.
Series:	Springer series in optical sciences 45
Subjects:	Elektronenmicroscopie Kristalstructuur Verstrooiing Scanning electron microscopy Rasterelektronenmikroskopie
Links:	http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=008194847&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA
Physical Description:	XIV, 527 S. Ill., graph. Darst.
ISBN:	3540639764 9783540639763

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Record in the Search Index

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adam_text	LUDWIG REIMER SCANNING ELECTRON MICROSCOPY PHYSICS OF IMAGE FORMATION AND MICROANALYSIS SECOND COMPLETELY REVISED AND UPDATED EDITION WITH 260 FIGURES SPRINGER 2008 AGI-INFORMATION MANAGEMENT CONSULTANTS MAY BE USED FOR PERSONAL PURPORSES ONLY OR BY LIBRARIES ASSOCIATED TO DANDELON.COM NETWORK. CONTENTS 1. INTRODUCTION 1 1.1 PRINCIPLE OF THE SCANNING ELECTRON MICROSCOPE 1 1.2 ELECTRON-SPECIMEN INTERACTIONS 3 1.3 IMAGING MODES OF SCANNING ELECTRON MICROSCOPY 7 1.3.1 SECONDARY ELECTRONS (SE) 7 1.3.2 BACKSCATTERED ELECTRONS (BSE) 8 1.3.3 SPECIMEN CURRENT 8 1.3.4 TRANSMITTED ELECTRONS 9 1.3.5 ELECTRON-BEAM-INDUCED CURRENT (EBIC) 9 1.3.6 CATHODOLUMINESCENCE 9 1.3.7 ACOUSTIC THERMAL-WAVE MICROSCOPY 10 1.3.8 ENVIRONMENTAL ELECTRON MICROSCOPY 10 1.3.9 IMAGING WITH X-RAYS 10 1.4 ANALYTICAL MODES 11 1.4.1 CRYSTAL STRUCTURE AND ORIENTATION 11 1.4.2 ELEMENTAL MICROANALYSIS -. 12 2. ELECTRON OPTICS OF A SCANNING ELECTRON MICROSCOPE 13 2.1 ELECTRON GUNS 13 2.1.1 THERMIONIC ELECTRON GUNS 13 2.1.2 SCHOTTKY-EMISSION GUNS 17 2.1.3 FIELD-EMISSION GUNS 18 2.1.4 MEASUREMENT OF GUN PARAMETERS 19 2.2 ELECTRON OPTICS 21 2.2.1 FOCAL LENGTH OF AN ELECTRON LENS 21 2.2.2 LENS ABERRATIONS 23 2.2.3 SPECIAL DESIGNS OF OBJECTIVE LENSES 27 2.2.4 GEOMETRIC OPTICAL THEORY OF ELECTRON-PROBE FORMATION 30 2.2.5 WAVE-OPTICAL THEORY OF ELECTRON-PROBE FORMATION ... 34 2.2.6 STABILISATION OF THE ELECTRON-PROBE CURRENT 37 2.3 ELECTRON BEAM DEFLECTION MODES 38 2.3.1 ELECTRON BEAM DEFLECTION BY TRANSVERSE FIELDS 38 2.3.2 SCANNING, MAGNIFICATION AND ROCKING 40 X CONTENTS 2.3.3 ELECTRON BEAM BLANKING AND CHOPPING 42 2.4 FOCUSING 46 2.4.1 FOCUSING AND CORRECTION OF ASTIGMATISM 46 2.4.2 DEPTH OF FOCUS 49 2.4.3 DYNAMIC AND AUTOMATIC FOCUSING 50 2.4.4 RESOLUTION AND ELECTRON-PROBE SIZE 52 3. ELECTRON SCATTERING AND DIFFUSION 57 3.1 ELASTIC SCATTERING 57 3.1.1 ELASTIC DIFFERENTIAL CROSS-SECTION 57 3.1.2 CLASSICAL MECHANICS OF ELECTRON-NUCLEUS SCATTERING ... 59 3.1.3 THE RELATIVISTIC SCHRODINGER AND PAULI-DIRAC EQUATIONS 61 3.1.4 QUANTUM MECHANICS OF SCATTERING 63 3.1.5 RUTHERFORD SCATTERING AT A SCREENED NUCLEUS 66 3.1.6 EXACT MOTT CROSS-SECTIONS 69 3.2 INELASTIC SCATTERING 73 3.2.1 ELECTRON EXCITATION PROCESSES AND ENERGY LOSSES 73 3.2.2 ELECTRON-ELECTRON COLLISIONS 76 3.2.3 QUANTUM MECHANICS OF INNER-SHELL IONIZATION 78 3.2.4 ANGULAR DISTRIBUTION OF TOTAL INELASTIC SCATTERING .... 81 3.3 MULTIPLE SCATTERING EFFECTS 82 3.3.1 MEAN-FREE-PATH LENGTH 82 3.3.2 ANGULAR DISTRIBUTION OF TRANSMITTED ELECTRONS 84 3.3.3 SPATIAL BEAM BROADENING 87 3.3.4 CONTINUOUS-SLOWING-DOWN APPROXIMATION 90 3.3.5 MODIFICATION OF THE STOPPING POWER AT LOW ELECTRON ENERGIES 93 3.3.6 DISTRIBUTION OF ENERGY LOSSES 94 3.4 ELECTRON DIFFUSION 98 3.4.1 TRANSMISSION AND ELECTRON RANGE 98 3.4.2 SPATIAL AND DEPTH DISTRIBUTION OF ENERGY DISSIPATION . 101 3.4.3 DIFFUSION MODELS 106 3.4.4 GENERAL TRANSPORT EQUATION 110 3.4.5 SPECIAL SOLUTIONS OF THE TRANSPORT EQUATION 112 3.4.6 MONTE CARLO SIMULATIONS 114 3.5 SPECIMEN HEATING AND DAMAGE 117 3.5.1 SPECIMEN HEATING 117 3.5.2 CHARGING OF INSULATING SPECIMENS 120 3.5.3 RADIATION DAMAGE OF ORGANIC AND INORGANIC SPECIMENS 130 3.5.4 CONTAMINATION 132 CONTENTS XI 4. EMISSION OF BACKSCATTERED AND SECONDARY ELECTRONS 135 4.1 BACKSCATTERED ELECTRONS 135 4.1.1 MEASUREMENT OF THE BACKSCATTERING COEFFICIENT AND THE SECONDARY ELECTRON YIELD 135 4.1.2 BACKSCATTERING FROM FILMS AND PARTICLES 138 4.1.3 BACKSCATTERING FROM SOLID SPECIMENS 142 4.1.4 ANGULAR DISTRIBUTION OF BACKSCATTERING 146 4.1.5 ENERGY DISTRIBUTION OF BACKSCATTERED ELECTRONS AND LOW-LOSS ELECTRONS 148 4.2 SECONDARY ELECTRONS 152 4.2.1 DEPENDENCE OF SECONDARY ELECTRON YIELD ON BEAM AND SPECIMEN PARAMETERS 152 4.2.2 PHYSICS OF SECONDARY-ELECTRON EMISSION 158 4.2.3 CONTRIBUTION OF BACKSCATTERED ELECTRONS TO THE SECONDARY ELECTRON YIELD 162 4.2.4 STATISTICS OF BSE AND SE EMISSION , 165 5. ELECTRON DETECTORS AND SPECTROMETERS 171 5.1 MEASUREMENT OF SMALL CURRENTS 171 5.2 SCINTILLATION DETECTORS AND MULTIPLIERS 172 5.2.1 SCINTILLATION MATERIALS 172 5.2.2 SCINTILLATOR-PHOTOMULTIPLIER COMBINATION 173 5.2.3 ELECTRON CHANNEL MULTIPLIERS 176 5.3 SEMICONDUCTOR DETECTORS 177 5.3.1 SURFACE BARRIER AND P-N JUNCTION DIODES 177 5.3.2 THE ELECTRONIC CIRCUIT OF SEMICONDUCTOR DETECTORS ... 181 5.4 SECONDARY AND BACKSCATTERED ELECTRON DETECTORS 183 5.4.1 SECONDARY ELECTRON DETECTORS 183 5.4.2 BACKSCATTERED ELECTRON DETECTORS 188 5.4.3 MULTIPLE DETECTOR SYSTEMS 191 5.5 DETECTOR NOISE 193 5.5.1 NOISE OF A SCINTILLATOR-PHOTOMULTIPLIER COMBINATION . . 193 5.5.2 NOISE OF SEMICONDUCTOR DETECTORS 196 5.6 ELECTRON SPECTROMETERS AND FILTERS 197 5.6.1 TYPES OF ELECTRON SPECTROMETER 197 5.6.2 SECONDARY ELECTRON SPECTROMETERS 200 5.6.3 BACKSCATTERED AND AUGER ELECTRON SPECTROMETERS 203 6. IMAGE CONTRAST AND SIGNAL PROCESSING 207 6.1 SECONDARY ELECTRON IMAGING MODE 207 6.1.1 TYPES OF IMAGE CONTRAST 207 6.1.2 TOPOGRAPHIC CONTRAST IN THE SE MODE 208 6.1.3 MATERIAL CONTRAST IN THE SE MODE 214 6.1.4 DETECTOR STRATEGIES FOR THE SE MODE 217 6.2 BACKSCATTERED ELECTRON IMAGING MODES 222 XII CONTENTS 6.2.1 TOPOGRAPHIC AND MATERIAL CONTRAST IN THE BSE MODE . 222 6.2.2 CHANNELLING OR CRYSTAL ORIENTATION CONTRAST 225 6.2.3 CONTRAST OF BSE USING MULTIPLE DETECTOR SYSTEMS 227 6.2.4 QUANTITATIVE INFORMATION FROM THE BSE SIGNAL 228 6.2.5 ENERGY-FILTERING OF BACKSCATTERED ELECTRONS 231 6.2.6 THE SPECIMEN-CURRENT MODE 233 6.3 RESOLUTION AND CONTRAST IN THE SE AND BSE MODES 234 6.3.1 SECONDARY-ELECTRON MODE 234 6.3.2 BACKSCATTERED ELECTRON MODE 235 6.4 IMAGE RECORDING AND PROCESSING 237 6.4.1 OBSERVATION AND RECORDING ON CATHODE-RAY TUBES ... 237 6.4.2 ANALOGUE SIGNAL-PROCESSING METHODS 240 6.4.3 DIGITAL IMAGE ACQUISITION 244 6.4.4 DIGITAL IMAGE PROCESSING 245 6.4.5 STEREOGRAMMETRY 250 7. ELECTRON-BEAM-INDUCED CURRENT AND CATHODOLUMINESCENCE 253 7.1 ELECTRON-BEAM-INDUCED CURRENT (EBIC) MODE 253 7.1.1 EBIC MODES AND SPECIMEN GEOMETRY 253 7.1.2 CHARGE CARRIER GENERATION, DIFFUSION AND COLLECTION . 256 7.1.3 QUANTITATIVE MEASUREMENT OF SEMICONDUCTOR PARAMETERS 261 7.1.4 EBIC IMAGING OF DEPLETION LAYERS 264 7.1.5 EBIC IMAGING AND DEFECT ANALYSIS 266 7.1.6 SCANNING DEEP-LEVEL TRANSIENT SPECTROSCOPY (SDLTS) 268 7.1.7 RADIATION DAMAGE EFFECTS IN SEMICONDUCTOR DEVICES .. 269 7.1.8 EBIC AND EBIV WITHOUT ANY DEPLETION LAYER AND IN SUPERCONDUCTORS 270 7.2 CATHODOLUMINESCENCE 273 7.2.1 BASIC MECHANISMS OF CATHODOLUMINESCENCE 273 7.2.2 DETECTION AND SPECTROMETRY OF LIGHT QUANTA 276 7.2.3 QUANTITATIVE CATHODOLUMINESCENCE OF SEMICONDUCTORS . 280 7.2.4 CATHODOLUMINESCENCE IMAGING MODE 284 7.2.5 CATHODOLUMINESCENCE OF ORGANIC SPECIMENS 287 8. SPECIAL TECHNIQUES IN SEM 289 8.1 IMAGING AND MEASUREMENT OF MAGNETIC FIELDS 289 8.1.1 TYPE-1 MAGNETIC CONTRAST 290 8.1.2 TYPE-2 MAGNETIC CONTRAST 293 8.1.3 DEFLECTION OF PRIMARY ELECTRONS BY MAGNETIC FIELDS ... 296 8.1.4 IMAGING OF SURFACE MAGNETIZATION BY POLARIZED ELECTRONS 298 8.2 VOLTAGE CONTRAST 299 8.2.1 QUALITATIVE VOLTAGE CONTRAST 299 CONTENTS XIII 8.2.2 VOLTAGE CONTRAST ON FERROELECTRICS AND PIEZOELECTRICS.. 301 8.2.3 QUANTITATIVE MEASUREMENT OF SURFACE POTENTIAL 303 8.2.4 STROBOSCOPIC MEASUREMENT OF VOLTAGES 306 8.2.5 CAPACITIVE-COUPLING VOLTAGE CONTRAST 307 8.2.6 CAPACITIVELY INDUCED CHARGING IN AN EXTERNAL ELECTRODE 308 8.3 LOW-ENERGY SPECTROSCOPIES 308 8.3.1 THRESHOLD SPECTROSCOPIES 308 8.3.2 ELECTRON TRAP SPECTROSCOPY AND MICROSCOPY 309 8.4 TRANSMITTED ELECTRON MODE 312 8.5 SCANNING ELECTRON MIRROR MICROSCOPY 314 8.6 ENVIRONMENTAL SCANNING ELECTRON MICROSCOPY (ESEM) 316 8.7 SCANNING ELECTRON ACOUSTIC MICROSCOPY 321 8.8 ELECTRON-BEAM LITHOGRAPHY AND METROLOGY 324 8.9 COMBINATION OF SEM AND STM 328 9. CRYSTAL STRUCTURE ANALYSIS BY DIFFRACTION 329 9.1 THEORY OF ELECTRON DIFFRACTION 329 9.1.1 KINEMATICAL THEORY AND BRAGG CONDITION 329 9.1.2 KOSSEL CONES AND KOSSEL MAPS 334 9.1.3 DYNAMICAL THEORY OF ELECTRON DIFFRACTION AND BLOCH WAVES 338 9.1.4 ORIENTATION ANISOTROPY OF ELECTRON BACKSCATTERING.... 349 9.1.5 ANGULAR ANISOTROPY OF ELECTRON BACKSCATTERING 354 9.1.6 TRANSMISSION AND REFLECTION ELECTRON DIFFRACTION PATTERNS 356 9.2 ELECTRON CHANNELLING PATTERNS (ECP-) 359 9.2.1 ELECTRON-OPTICAL PARAMETERS FOR THE RECORDING OF ECP 359 9.2.2 THE STANDARD AND TILT METHOD OF GENERATING ECP ... 361 9.2.3 SMALL-AREA METHODS FOR ECP 363 9.2.4 RECORDING OF ELECTRON CHANNELLING PATTERNS 365 9.2.5 INFORMATION IN ELECTRON CHANNELLING PATTERNS 366 9.3 ELECTRON BACKSCATTERING PATTERNS (EBSP) 368 9.3.1 RECORDING OF EBSP 368 9.3.2 ADVANTAGES OF EBSP OVER ECP 370 9.3.3 THE RECIPROCITY THEOREM BETWEEN ECP AND EBSP ... 371 9.3.4 DETERMINATION OF CRYSTAL STRUCTURE AND ORIENTATION . . 373 9.4 X-RAY KOSSEL PATTERNS 374 9.4.1 GENERATION AND RECORDING OF X-RAY KOSSEL PATTERNS .. 374 9.4.2 INFORMATION FROM X-RAY KOSSEL PATTERNS 375 XIV CONTENTS 10. ELEMENTAL ANALYSIS AND IMAGING WITH X-RAYS 379 10.1 X-RAY AND AUGER ELECTRON EMISSION 380 10.1.1 X-RAY SPECTRA 380 10.1.2 THE X-RAY CONTINUUM 381 10.1.3 THE CHARACTERISTIC X-RAY SPECTRUM 385 10.1.4 ABSORPTION OF X-RAYS 390 10.1.5 AUGER ELECTRON EMISSION 393 10.2 X-RAY SPECTROMETERS 396 10.2.1 WAVELENGTH-DISPERSIVE X-RAY SPECTROMETERS 396 10.2.2 ENERGY-DISPERSIVE X-RAY SPECTROMETERS 399 10.2.3 ELECTRONIC CIRCUIT OF AN ENERGY-DISPERSIVE SPECTROMETER 403 10.2.4 COMPARISON OF WAVELENGTH- AND ENERGY-DISPERSIVE SPECTROMETERS 406 10.3 CORRECTION METHODS FOR X-RAY MICROANALYSIS 407 10.3.1 PROBLEMS OF QUANTITATIVE ANALYSIS 407 10.3.2 X-RAY EXCITATION AND ATOMIC NUMBER CORRECTION .... 410 10.3.3 DEPTH DISTRIBUTION OF X-RAY PRODUCTION AND THE ABSORPTION CORRECTION 416 10.3.4 FLUORESCENCE CORRECTION 420 10.3.5 REFINED METHODS AND STANDARDLESS X-RAY MICROANALYSIS 425 10.3.6 X-RAY MICROANALYSIS OF NONCONDUCTING SPECIMENS .... 426 10.4 X-RAY MICROANALYSIS FOR SPECIAL GEOMETRIES 427 10.4.1 TILTED SPECIMENS 427 10.4.2 PERPENDICULAR INTERFACES AND SPATIAL DISTRIBUTION OF X-RAY EMISSION ... . 429 10.4.3 THIN FILMS ON SUBSTRATES 430 10.4.4 FREE-SUPPORTING FILMS AND PARTICLES 432 10.4.5 X-RAY MICROANALYSIS OF BIOLOGICAL SPECIMENS 433 10.5 DATA PROCESSING AND SENSITIVITY IN X-RAY AND AUGER ELECTRON ANALYSIS 436 10.5.1 BACKGROUND AND PEAK-OVERLAP CORRECTION 436 10.5.2 COUNTING STATISTICS AND SENSITIVITY 436 10.5.3 X-RAY FLUORESCENCE SPECTROSCOPY IN SEM 438 10.5.4 AUGER ELECTRON AND X-RAY PHOTOELECTRON SPECTROSCOPY 439 10.6 IMAGING METHODS WITH X-RAYS 441 10.6.1 X-RAY MAPPING AND LINESCANS 441 10.6.2 TOTAL RATE IMAGING WITH X-RAYS (TRIX) 444 10.6.3 X-RAY PROJECTION MICROSCOPY AND TOMOGRAPHY 444 REFERENCES 449 INDEX 515
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owner	DE-703 DE-92 DE-29T DE-91 DE-BY-TUM DE-20 DE-19 DE-BY-UBM DE-1046 DE-706 DE-522 DE-634 DE-83 DE-11 DE-188 DE-384
owner_facet	DE-703 DE-92 DE-29T DE-91 DE-BY-TUM DE-20 DE-19 DE-BY-UBM DE-1046 DE-706 DE-522 DE-634 DE-83 DE-11 DE-188 DE-384
physical	XIV, 527 S. Ill., graph. Darst.
publishDate	1998
publishDateSearch	1998
publishDateSort	1998
publisher	Springer
record_format	marc
series	Springer series in optical sciences
series2	Springer series in optical sciences
spellingShingle	Reimer, Ludwig 1928- Scanning electron microscopy physics of image formation and microanalysis Springer series in optical sciences Elektronenmicroscopie gtt Kristalstructuur gtt Verstrooiing gtt Scanning electron microscopy Rasterelektronenmikroskopie (DE-588)4048455-5 gnd
subject_GND	(DE-588)4048455-5
title	Scanning electron microscopy physics of image formation and microanalysis
title_auth	Scanning electron microscopy physics of image formation and microanalysis
title_exact_search	Scanning electron microscopy physics of image formation and microanalysis
title_full	Scanning electron microscopy physics of image formation and microanalysis Ludwig Reimer
title_fullStr	Scanning electron microscopy physics of image formation and microanalysis Ludwig Reimer
title_full_unstemmed	Scanning electron microscopy physics of image formation and microanalysis Ludwig Reimer
title_short	Scanning electron microscopy
title_sort	scanning electron microscopy physics of image formation and microanalysis
title_sub	physics of image formation and microanalysis
topic	Elektronenmicroscopie gtt Kristalstructuur gtt Verstrooiing gtt Scanning electron microscopy Rasterelektronenmikroskopie (DE-588)4048455-5 gnd
topic_facet	Elektronenmicroscopie Kristalstructuur Verstrooiing Scanning electron microscopy Rasterelektronenmikroskopie
url	http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=008194847&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA
volume_link	(DE-604)BV000000237
work_keys_str_mv	AT reimerludwig scanningelectronmicroscopyphysicsofimageformationandmicroanalysis

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