Application of iterative methods for solving nonsymmetric linear systems in the simulation of semiconductor processing:
Gespeichert in:
| Beteiligte Personen: | , , |
|---|---|
| Format: | Buch |
| Sprache: | Englisch |
| Veröffentlicht: |
München
1993
|
| Schriftenreihe: | Technische Universität <München>: TUM-MATH
9316 |
| Schlagwörter: | |
| Abstract: | Abstract: "This paper presents a systematic comparison of recently developed iterative methods for solving nonsymmetric linear equations arising from the numerical simulation of semiconductor processing. A non comprehensive survey of the literature concerning iterative solvers is given including theoretical studies as well as current articles on practical applications. In particular, we consider the conjugate gradient-type algorithms CGS, Bi-CGSTAB and GMRES as well as the Broyden type secant method GB specially adapted to the linear case. At the moment these methods are among the most frequently applied techniques for the solution of nonsymmetric linear systems. The algorithms, including ILU-D (incomplete LU-diagonal decomposition) as a preconditioner, are given and their performance is compared on an industrial application within the process simulator MIMAS II. The simulation of semiconductor processing is an important and challenging area of industrial application and therefore an ideal field for testing the performance of iterative methods in real life problems. To highlight the physical background of this application, the physics of process simulation is briefly sketched." |
| Beschreibung: | Literaturverz. S. 25 - 28 |
| Umfang: | 28 S. graph. Darst. |
Internformat
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| 245 | 1 | 0 | |a Application of iterative methods for solving nonsymmetric linear systems in the simulation of semiconductor processing |c Werner Schmid ; Meinhard Paffrath ; R. H. W. Hoppe |
| 264 | 1 | |a München |c 1993 | |
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| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 490 | 1 | |a Technische Universität <München>: TUM-MATH |v 9316 | |
| 500 | |a Literaturverz. S. 25 - 28 | ||
| 520 | 3 | |a Abstract: "This paper presents a systematic comparison of recently developed iterative methods for solving nonsymmetric linear equations arising from the numerical simulation of semiconductor processing. A non comprehensive survey of the literature concerning iterative solvers is given including theoretical studies as well as current articles on practical applications. In particular, we consider the conjugate gradient-type algorithms CGS, Bi-CGSTAB and GMRES as well as the Broyden type secant method GB specially adapted to the linear case. At the moment these methods are among the most frequently applied techniques for the solution of nonsymmetric linear systems. The algorithms, including ILU-D (incomplete LU-diagonal decomposition) as a preconditioner, are given and their performance is compared on an industrial application within the process simulator MIMAS II. The simulation of semiconductor processing is an important and challenging area of industrial application and therefore an ideal field for testing the performance of iterative methods in real life problems. To highlight the physical background of this application, the physics of process simulation is briefly sketched." | |
| 650 | 4 | |a Differential equations, Linear | |
| 650 | 4 | |a Iterative methods (Mathematics) | |
| 650 | 4 | |a Linear systems | |
| 650 | 4 | |a Semiconductors |x Computer simulation | |
| 700 | 1 | |a Paffrath, Meinhard |e Verfasser |4 aut | |
| 700 | 1 | |a Hoppe, Ronald H. W. |d 1951- |e Verfasser |0 (DE-588)133246876 |4 aut | |
| 830 | 0 | |a Technische Universität <München>: TUM-MATH |v 9316 |w (DE-604)BV006186461 |9 9316 | |
| 943 | 1 | |a oai:aleph.bib-bvb.de:BVB01-006187397 | |
Datensatz im Suchindex
| DE-BY-TUM_call_number | 0111 2001 B 6081-1993,16 |
|---|---|
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| DE-BY-TUM_location | 01 |
| DE-BY-TUM_media_number | 040010119476 |
| _version_ | 1821933632301826049 |
| any_adam_object | |
| author | Schmid, Werner Paffrath, Meinhard Hoppe, Ronald H. W. 1951- |
| author_GND | (DE-588)133246876 |
| author_facet | Schmid, Werner Paffrath, Meinhard Hoppe, Ronald H. W. 1951- |
| author_role | aut aut aut |
| author_sort | Schmid, Werner |
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| building | Verbundindex |
| bvnumber | BV009298147 |
| ctrlnum | (OCoLC)34523840 (DE-599)BVBBV009298147 |
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| id | DE-604.BV009298147 |
| illustrated | Illustrated |
| indexdate | 2024-12-20T09:35:45Z |
| institution | BVB |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-006187397 |
| oclc_num | 34523840 |
| open_access_boolean | |
| owner | DE-12 DE-91G DE-BY-TUM |
| owner_facet | DE-12 DE-91G DE-BY-TUM |
| physical | 28 S. graph. Darst. |
| publishDate | 1993 |
| publishDateSearch | 1993 |
| publishDateSort | 1993 |
| record_format | marc |
| series | Technische Universität <München>: TUM-MATH |
| series2 | Technische Universität <München>: TUM-MATH |
| spellingShingle | Schmid, Werner Paffrath, Meinhard Hoppe, Ronald H. W. 1951- Application of iterative methods for solving nonsymmetric linear systems in the simulation of semiconductor processing Technische Universität <München>: TUM-MATH Differential equations, Linear Iterative methods (Mathematics) Linear systems Semiconductors Computer simulation |
| title | Application of iterative methods for solving nonsymmetric linear systems in the simulation of semiconductor processing |
| title_auth | Application of iterative methods for solving nonsymmetric linear systems in the simulation of semiconductor processing |
| title_exact_search | Application of iterative methods for solving nonsymmetric linear systems in the simulation of semiconductor processing |
| title_full | Application of iterative methods for solving nonsymmetric linear systems in the simulation of semiconductor processing Werner Schmid ; Meinhard Paffrath ; R. H. W. Hoppe |
| title_fullStr | Application of iterative methods for solving nonsymmetric linear systems in the simulation of semiconductor processing Werner Schmid ; Meinhard Paffrath ; R. H. W. Hoppe |
| title_full_unstemmed | Application of iterative methods for solving nonsymmetric linear systems in the simulation of semiconductor processing Werner Schmid ; Meinhard Paffrath ; R. H. W. Hoppe |
| title_short | Application of iterative methods for solving nonsymmetric linear systems in the simulation of semiconductor processing |
| title_sort | application of iterative methods for solving nonsymmetric linear systems in the simulation of semiconductor processing |
| topic | Differential equations, Linear Iterative methods (Mathematics) Linear systems Semiconductors Computer simulation |
| topic_facet | Differential equations, Linear Iterative methods (Mathematics) Linear systems Semiconductors Computer simulation |
| volume_link | (DE-604)BV006186461 |
| work_keys_str_mv | AT schmidwerner applicationofiterativemethodsforsolvingnonsymmetriclinearsystemsinthesimulationofsemiconductorprocessing AT paffrathmeinhard applicationofiterativemethodsforsolvingnonsymmetriclinearsystemsinthesimulationofsemiconductorprocessing AT hopperonaldhw applicationofiterativemethodsforsolvingnonsymmetriclinearsystemsinthesimulationofsemiconductorprocessing |
Paper/Kapitel scannen lassen
Teilbibliothek Mathematik & Informatik, Berichte
| Signatur: |
0111 2001 B 6081-1993,16 Lageplan |
|---|---|
| Exemplar 1 | Ausleihbar Am Standort |