Physical mechanisms of sputtering:
Saved in:
| Main Author: | |
|---|---|
| Format: | Book |
| Language: | English |
| Published: |
Amsterdam
North-Holland
1981
|
| Series: | Physics reports
69,4 |
| Physical Description: | S. 337 - 371 graph. Darst. |
Staff View
MARC
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| id | DE-604.BV003637915 |
| illustrated | Illustrated |
| indexdate | 2024-12-20T08:07:50Z |
| institution | BVB |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-002317704 |
| oclc_num | 35374285 1069603737 |
| open_access_boolean | |
| owner | DE-384 DE-703 DE-29T |
| owner_facet | DE-384 DE-703 DE-29T |
| physical | S. 337 - 371 graph. Darst. |
| publishDate | 1981 |
| publishDateSearch | 1981 |
| publishDateSort | 1981 |
| publisher | North-Holland |
| record_format | marc |
| series | Physics reports |
| series2 | Physics reports |
| spelling | Thompson, Michael W. 1931- Verfasser (DE-588)128700815 aut Physical mechanisms of sputtering M. W. Thompson Amsterdam North-Holland 1981 S. 337 - 371 graph. Darst. txt rdacontent n rdamedia nc rdacarrier Physics reports 69,4 Physics reports 69,4 (DE-604)BV002784816 69,4 |
| spellingShingle | Thompson, Michael W. 1931- Physical mechanisms of sputtering Physics reports |
| title | Physical mechanisms of sputtering |
| title_auth | Physical mechanisms of sputtering |
| title_exact_search | Physical mechanisms of sputtering |
| title_full | Physical mechanisms of sputtering M. W. Thompson |
| title_fullStr | Physical mechanisms of sputtering M. W. Thompson |
| title_full_unstemmed | Physical mechanisms of sputtering M. W. Thompson |
| title_short | Physical mechanisms of sputtering |
| title_sort | physical mechanisms of sputtering |
| volume_link | (DE-604)BV002784816 |
| work_keys_str_mv | AT thompsonmichaelw physicalmechanismsofsputtering |