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Universitätsbibliothek
Technische Universität München
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Ruhl, Günther Georg
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XPS-Studien oberflächenchemischer Prozesse beim Plasmaätzen von (Mn,Zn)Ferrit und der MOCVD von TiN x C y
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Ruhl, Günther Georg
Published 1993
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Library Holdings TUM
Library Holdings TUM, LMU, HM, BSB, HSWT
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Book
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Ferrite
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Hochschulschrift
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MOCVD-Verfahren
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Plasmaätzen
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Röntgen-Photoelektronenspektroskopie
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German
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Ruhl, Günther Georg
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